JPS5928841B2 - パタ−ン走査装置 - Google Patents

パタ−ン走査装置

Info

Publication number
JPS5928841B2
JPS5928841B2 JP48042662A JP4266273A JPS5928841B2 JP S5928841 B2 JPS5928841 B2 JP S5928841B2 JP 48042662 A JP48042662 A JP 48042662A JP 4266273 A JP4266273 A JP 4266273A JP S5928841 B2 JPS5928841 B2 JP S5928841B2
Authority
JP
Japan
Prior art keywords
scanning
signal
pattern
scanner
sequence command
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48042662A
Other languages
English (en)
Japanese (ja)
Other versions
JPS49131015A (enrdf_load_stackoverflow
Inventor
秦 戸塚
正治 坂本
謙二 福岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP48042662A priority Critical patent/JPS5928841B2/ja
Publication of JPS49131015A publication Critical patent/JPS49131015A/ja
Publication of JPS5928841B2 publication Critical patent/JPS5928841B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Analysis (AREA)
JP48042662A 1973-04-17 1973-04-17 パタ−ン走査装置 Expired JPS5928841B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48042662A JPS5928841B2 (ja) 1973-04-17 1973-04-17 パタ−ン走査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48042662A JPS5928841B2 (ja) 1973-04-17 1973-04-17 パタ−ン走査装置

Publications (2)

Publication Number Publication Date
JPS49131015A JPS49131015A (enrdf_load_stackoverflow) 1974-12-16
JPS5928841B2 true JPS5928841B2 (ja) 1984-07-16

Family

ID=12642210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48042662A Expired JPS5928841B2 (ja) 1973-04-17 1973-04-17 パタ−ン走査装置

Country Status (1)

Country Link
JP (1) JPS5928841B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53118145A (en) * 1977-03-25 1978-10-16 Fujitsu Ltd Detecting method of light beam position
JPS5654038A (en) * 1979-10-08 1981-05-13 Toshiba Corp Checking device for shape of photomask

Also Published As

Publication number Publication date
JPS49131015A (enrdf_load_stackoverflow) 1974-12-16

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