JPS5928435B2 - Densibee Muyosetsuki - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electron beam welding machine for welding objects that are large in shape but whose welding area is limited to a small area.

In other words, the scope of application of electron beam welding has expanded in recent years, and the shapes of the objects to be welded have become increasingly complex. It's getting bigger. For this reason, the internal volume of the welding chamber that accommodates the objects to be welded must also be increased.

However, some objects to be welded have a small area to be welded compared to the overall size of the object. The present invention relates to an electron beam welding machine equipped with a welding chamber intended for such objects to be welded. In conventional electron beam welding machines, the electron beam generator is either fixedly mounted in the center of the welding chamber or movably mounted at the top of the welding chamber.
In the former case, the planar size of the welding chamber needs to be four times the planar dimensions of the workpiece. In the latter case, the size of the welding chamber can be approximately the same as the size of the workpiece on a plane, but since the electron beam generating part is located in a vacuum, the mechanical part for moving it, the high voltage cable etc. will also be located in a vacuum. This traveling mechanism is required to have performance different from that of a machine tool or the like. - In Italy, normal lubricants cannot be used in a vacuum atmosphere, so we try to use as little lubrication as possible, and because the coefficient of friction increases in a vacuum, the contact surfaces have a structure that avoids surface contact and uses rolling contact. However, since the high-voltage cable must be moved together with the electron beam generator while maintaining its flexibility, its reliability and manufacturing cost are inferior. An object of the present invention is to provide a welding chamber of a size that is just large enough to accommodate the objects to be welded, while providing an electron beam generating section outside the welding chamber so that it can be easily moved. The object of the present invention is to provide an economical welding device suitable for welding a limited welding area. The welding chamber according to the present invention has a size that is approximately the same as the size of the object to be welded, a vacuum valve is provided above each part to be welded, and an electron beam generator is movably mounted outside the welding chamber above the vacuum valve. A vacuum valve is provided at the bottom of the electron beam generating section, and a mechanism is provided below the vacuum valve for mechanical connection to the welding chamber in an airtight manner.

Therefore, since the size of the welding chamber is approximately the same as the workpiece, the vacuum pump can be small, and the electron beam generator only needs to run in the atmosphere, so its mechanism is similar to that of the conventional one. It can be done in the same way as a machine tool. It also eliminates the drawbacks of the conventional method, such as the fact that the high-voltage cable only needs to be moved in sufficient space in the atmosphere. Next, the present invention will be explained in detail with reference to the drawings.

FIG. 1 is a plan view showing an example of the shape of a suitable workpiece to be welded according to the present invention. The objects to be welded are base metals 1a and 2a,
It is composed of 2b, 2c and 2d, and the welding part is the connection part between the base metal 1a and 2a to 2d. In this example, the dimension L of the object to be welded is long, and compared to this, the length m to be welded is
is small. FIGS. 2 and 3 show a conventional electron beam welding machine. In FIG. 2, the electron beam generator 3a is fixedly mounted outside the welding chamber 4 and at the center. The electron beam generating section 3a is equipped with a dedicated vacuum pump 9 for evacuating the electron beam generating section 3a.
The workpiece 1 to be welded is placed on the moving table 5 and placed on a plane (X,
Since welding is carried out while traveling in the Y direction, the planar size of the welding chamber is the dimensions 113 and 11 of the workpiece 1 in the X and Y directions.
4 must be at least twice as large as each other. Therefore, in order to accommodate a large workpiece as shown in FIG. 1, the size of the welding chamber becomes too large, and the pump for evacuating the room must also be large, making the cost of the apparatus prohibitively high.

In FIG. 3, the electron beam generating section 3b is mounted above the interior of the welding chamber 6 together with a moving mechanism 8 capable of traveling on a plane (XY directions).

The workpiece 1 to be welded is mounted on a sample stage 7, but remains fixed during welding, and the electron beam generator 3b travels to the welding location to perform the welding work. Therefore, the size of the welding chamber may be approximately the same size as the object to be welded on a plane, and the height does not pose much of a problem since the space required to accommodate the electron beam generating section and the like is required. However, since the electron beam generating section 3b is located in a vacuum, the electron beam generating section 3b
cannot be evacuated by an independent vacuum pump, and the vacuum level in the welding room cannot be maintained at 5X1, which is necessary to constantly generate an electron beam.
It is difficult to handle the equipment during welding work, as the pressure must be maintained at 0-4T0rr or less, and there is no observation method for positioning the welded part, resulting in blind welding. FIG. 4 shows a welding room showing an embodiment of the present invention.

The welding chamber 10 may be large enough to accommodate the work to be welded 1 and the same sample stage 7 shown in FIG. Holes are formed in the upper surface of the welding chamber 10 corresponding to the welding locations of the workpiece 1, and vacuum valves 12a to 12d are attached to each hole. An electron beam generator is connected above the vacuum valve to maintain airtightness. The electron beam generating section 3c is equipped with a dedicated vacuum pump 9 and is mechanically integrated with a moving mechanism 11 so that it can be moved as a unit on a plane. FIG. 5 shows an embodiment of the joint between the electron beam generator 3c and the vacuum valve 12.

Immediately below the electron beam generating section 3c, there is a bellows coupling 16 which is moved up and down by a housing 14 and a cylinder 15 that houses a vacuum valve 13 on the side of the electron beam generating section, and a leakage valve attached to a part of the bellows coupling 16. A valve 17 is installed. A housing 18 containing a vacuum valve 12 is attached to the upper surface of the welding chamber 10. 21 to 28 are sealing materials for maintaining airtightness.

Now, the object to be welded is attached to the welding chamber 10, and the vacuum is evacuated to the welding vacuum level, for example, 1X10-2T0rr. On the other hand, the electron beam generating section 3c is moved by the moving mechanism 11 while being maintained at a vacuum level of 5X10-4T0rr or less at which an electron beam can be generated by a dedicated vacuum pump 9, and when positioned on the housing 18, the cylinder 15 is operated. Then, the bellows coupler 16 descends and comes into contact with the housing 18 to be kept airtight. Vacuum valve 12 is then opened to evacuate interior 19 of Perot coupling 16. However, this interior 1
Since the volume of the welding chamber 9 is extremely small compared to the size of the welding chamber 10, it is instantly evacuated. Next, the vacuum valve 13 on the electron beam generation side is opened, and the electron beam is irradiated to perform welding. At this time, if the welding length 1!5 is short, welding can be performed with deflection by the deflection coil 20. When welding is completed, the vacuum valves 12 and 13 are closed, the leak valve 17 is opened, and air flows into the interior 19 of the Perot coupling, causing the Perot coupling 16 to be raised by the cylinder 15, and the housing 18 and the electron beam generator are mechanically removed. Separate. Then, the electron beam generating section 3c is moved to the next welding location. In the electron beam welding machine according to the present invention, the size of the welding chamber can be approximately the same as the workpiece, so an exhaust device is not required. It is small and requires less exhaust time.

Furthermore, since the electron beam generator is equipped with a dedicated exhaust system and can be moved in the atmosphere, its movement mechanism can be considered similar to that of a general machine tool. It is possible to provide an inexpensive device for short objects, and since the electron beam generator is installed outside the welding room, an observation device can be installed in the electron beam generator to observe the welding area, resulting in high quality welding. The effects are great, such as being able to carry out

[Brief explanation of the drawing]

Claims (1)

[Claims] 1. A welding chamber equipped with a housing equipped with vacuum valves at two or more locations, and an electron beam generating section equipped with a coupling that connects to the housing and a vacuum valve that opens and closes gas flow in the coupling section. , a moving means for joining the electron beam generating section to an arbitrary housing in the welding chamber.