JPS5925969A - Decomposition device by glow discharge - Google Patents

Abstract

PURPOSE:To enable inexpensive and continuous mass production of amorphous photoconductive layers with a simple constitution and good reproducibility, by placing plural pieces of conductive drums opposite to each other in a reaction chamber, and generating glow discharge by a high frequency electric power source between the conductive drums. CONSTITUTION:A formed gas is fed into introducing pipes 14 in the stage of forming, for example, amorphous Si photoconductive layers on the circumferential surfaces of respective conductive drums 12. The inside of a reaction chamber 10 is beforehand evacuated to a vacuum state and the drums 12 are beforehand heated to about 100-400 deg.C prior to said feeding. High frequency electric power is applied from a high frequency power source 17 to two rows of the drums 12a, 12b at the center; at the same time, the formed gas is ejected from the ejection holes 13 of the pipes 14. Then glow discharge is generated between the drums 12a, 12b and the drums 12c, 12d at the two end rows to decompose the formed gas, whereby amorphous Si photoconductive layers are formed on the drums 12 and the drums 12 themselves are the finished products.

Description

DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to a capacitively coupled glow lightning decomposition apparatus suitable for continuous mass production of photoreceptors having a photoconductive layer of amorphous silicon or germanium.

Prior Art In recent years, amorphous silicon has been used as a photoreceptor drum for the circumferential surface of a conductive drum.
A light guide such as amorphous silicon-germanium (a-3i:Ge) or amorphous silicon-germanium (a-3i: Ge)
Live IJ of small stations! 41° has been developed. Such photoreceptor drums can be manufactured by various methods, but among them, the capacitively coupled glow discharge decomposition method is widely adopted because of its excellent discharge efficiency.

As a tank-coupled glow discharge decomposition apparatus for carrying out all of this method, an Mli structure shown in Fig. 1 has been proposed. It is made of 414 conductors such as.

In the central part of the reaction chamber σ), a -8i, a -8i:
A conductive drum such as aluminum on which a layer of conductive material such as Ge is formed is rotated by a rotating shaft (3).
1; 1ilj 1iG-i, and is heated to about 200 to 3000C by a heating means only shown in the figure.

1 l-1 around this conductive drum (2): this drum (
A conductive electrode drum (4) having a cylindrical shape similar to that of 2) and having a larger diameter is provided in a surrounding relationship. The pole drum (41p- + bottom 1) is arranged at equal intervals with the surface of the drum (2), and a light guiding skewer and a layer forming gasket are placed on both sides of the drum (2) in the direction of the arrow shown in the figure. The jetting holes are arranged in rows in pairs 18 and shaped like squares 11.

The pipes (5) and (6) are arranged in a relationship that shields these 1 yen-1 discharges from the outer circumferential surface of the electrode drum (4) and communicates with the source of the 1-sound generation scum. The gas generated from the photoconductive layer is blown out through these holes 1 onto the surface of the brown drum (2) by the nozzle holes. It's on. The spun tube (5) is connected to a conductor for 111 days and connected to a high-frequency S source (7), so that high-frequency power is applied to the electrode tram (4). Incidentally, the conductive drum (2) is electrically grounded at I':A1jlj of n or more, and is circled (5)? High-frequency power is applied to the 'M54% drum (4) through the M54% drum (2) to produce G (glow IIk i city) and to guide light up the eruption hole '1Jf1 layer +IV;
Blow out gas and generate plasma a -8i, a
-8i: Form a photoconductive layer of Ge or the like.

However, in such a glow discharge decomposition device, there are various problems with Pi. First, the photoconductive layer-generating gas adheres to the inner circumferential surface of the electrode drum (4) in the form of powder or glands, contaminating the apparatus. 4. In 1.1, 11 and 13, the attachment to the periphery of holes causes abnormal claw discharge.

When used repeatedly, the film may crack or fail, causing various inconveniences. Like this (;J'*t
``f is the conductive drum (2) being heated whereas?
This is due to the fact that the i-electrode drum is not heated and is at a low temperature. As a result, the manufacturing conditions vary with each manufacturing process, and reproducibility is severely lacking, and in some cases, a large amount of the powdered gas may be mixed into the light guide box and layer.

Therefore, there is an inconvenience that rM must be cleaned every time it is manufactured.

Secondly, in the above manufacturing apparatus, the pipe (5)
The high-frequency force is applied to the isidrum (4), but the reaction chamber (1) is a conductor (・111) as mentioned above.
Since the electrode drum itself is made up of 100% carbon dioxide, it is necessary to take care of the electrode drum itself, otherwise, that part will be left unused and reproducible manufacturing will not be possible. Moreover, the grounding/grounding requires considerable effort and is required every time the electrode tram is cleaned.

Third, it is extremely difficult to continuously mass-produce photoreceptors using the manufacturing equipment ``-1'' and ``-t''. It is conceivable to arrange a plurality of drums (4) in parallel, but in this case, one electrode drum (4) must be provided for each photoreceptor to be manufactured, and the device fGf itself would be extremely large. However, it is very expensive.

(The purpose of the month The misfire 1-1 was created based on the discussion on the first day of the month). The object of the present invention is to provide a glow discharge decomposition device jl', jk 4A1 which is extremely simple and has an attractive coupling type that is easy to manufacture.

Embodiment ε) 1 □ 2 and 3 f'71 is a container-coupled glow discharge decomposition device according to the present invention, which is constructed as approximately 1.1,
FIG. 2 is a plan view, and FIG. 3 is a plane view of l:l. In the figure, (10) is a reaction chamber that can be depressurized, and a part thereof is formed with an observation window (1]) made of, for example, quartz glass. Inside the reaction chamber (10), a conductive drum (12) of, for example, aluminum or NESA glass, on which a photoconductive layer is to be formed, is rotatably mounted on a suitable support. In the figure, a total of 24 conductive drums (12) in 4 rows of 6 x 1^1 are placed in parallel. From now on
1-1 central 2nd evening 11th drum k (12a), (12b)
, the two end rows f (], 2c), (12d).Although it will be explained later, misfire Q, l can be implemented with at least two conductive drums (12) of 11μ. ′! l:
As shown in the figure, each conductive drum (12) is heated to about 100 to 400° C. preferably +415° C. by heating means.
It is uniformly heated to a temperature of 0 to 300'C.

Kd between the central two rows of conductive drums (12a)N21i)
: l'l 1″ PI type product gas inlet pipe (14) with many product gas ejection holes (13) or IJψ shape on its circumferential surface
A plurality of drums (12) are provided in parallel. The product gas inlet pipe (14) 6;j, which has approximately the same height as the drum, causes the gas to flow through the drum, thereby ejecting waste from the ejection hole (13).

Note that (15) and (16) are generated gas exhaust pipes.

As shown in 3rd and 1, upper 2.4 @ sex drum (12)
Of these, the center two rows of drums (12a) and (12b) U
(1,05-2,0PQvO high frequency military power (frequency 1~
50 (2) is connected to the high frequency power supply (17) to which the drums (12c) and 42d) are electrically grounded. In this regard, the two rows of drums in the center are mounted so that they are electrically insulated from the drums in the two end rows.
be done. This is, for example, the two central rows of drums (1
The part on which 2a), (], 2b) are placed or the fertile drum mounting table is entirely constructed of insulators so that γF and force can be directly applied to the drum. In this case, drum (], 2a), (1
2b) When the upper end also comes into contact with the upper wall surface of the reaction chamber, the
That part also needs to be insulated.

In the above (・7h II1 customer-use combined glow dispersion and disassembly device), when producing, for example, an A-8I photoconductive layer on the circumferential surface of each conductive drum Cl2, a tank (not shown) is installed. H2, Ar, He, etc. SiH < gas (or i: Si 2Hfl, 5i3
I (6th grade), more if necessary! I-, 1 “Open II (,
'56-15 (as shown in '1834 Koyuki 1φ, for dark resistance' 2, I3□H6 gas and 02 gasket are sent to the generated gas induction war (14). Along with this, the reaction chamber (10 ) inside (is in a vacuum state of about 0.5 to 2.0 Torr), and the conductive drum (12) that has been cut is
Heat to 00-400°C. And the central two rows of conductive drums (12a), 41.21))K High frequency%
Source (17) Yo') Zhou2JfE a 0.05~2
．． While high frequency power is applied to OKWσ)1:,
勺三l&ノjスzJ￥ノ(Pipe (14) spout hole (13)
The generated gas force '-11j:i,'ilj is generated.

koiK,): each of the central 2 rows)” Ram (12a
)−(12+)) and b:j,, each door in the second row is (1
2C), (12d)
;A1, the generated gas is decomposed and a-8i is deposited on each drum.
tsu ゛゛〶'6 +,l,'Ii''1 is formed. That is, glow emission'N=i iJ, high) 1 wave'11.Nonobun-applied central two rows of drums (12A), (IZ
b) Two rows of drums (1
2c), (12d) and 117) 1; 11, the resulting gas is separated and a photoconductive layer is formed on the snack tram. Therefore: 21 (su[:lsuIni'' 7
・(ρ) The conductive drums (12) themselves are
-1', I', and the drum itself becomes the production light 1+ν, 1st']. With this 71, it is necessary to separate the poles from the drum as in the past.
, but the miniaturization of manufacturing equipment and the compatibility k I]J
'fi! Let's say. Moreover, the valley drum that functions as an electrode (12) days: Since it is all heated, it is raw LIIy,,
The photoconductive layer never deteriorates when the gas is used, and the photoconductive layer is always stable. can be generated.

The container-coupled glow dispersion and decomposition device according to the present invention is not limited to the configuration shown in FIGS. 2 and 3;
Various modifications are possible. Thread conductive, sex drum (12
) & M. It is best to use at least two of them, and the configuration is such that high-frequency power is applied to one and the other is grounded. Furthermore, each conductive drum is ki・1 so that it rotates, but in addition, for example, in FIG. It may also be made to revolve in the direction of the arrow. This is effective in forming a single photoconductive layer without unevenness in dll olfactory thickness. At this time, it is necessary to switch from the power application side of the drum to the ground side and vice versa due to the revolution, but this can be done, for example, on each drum. This can be done by making the part from the ground side 1 to the power application side discontinuous.

Glow related to 'Unexploded 1' from the theory of more than 1 village! Since the conductive drum itself, which is the finished product, acts as the Flf pole, one manufacturing device can be made smaller and cheaper, and moreover, 112 consecutive mass production cycles are required. Cut the cow 1
The gas does not turn into powder, there is almost no contamination of the equipment, and it has excellent removability and properties. Furthermore, the structure is %1 element, and it has many effects.

[Brief explanation of drawings]

Figure 1 shows the combination type glow frosting for 1 minute.
,',A diagram showing the schematic configuration of 1, Figures 2 and 3 dA
111I is a plan view and a side view, respectively, showing the glow discharge decomposition device according to Q-Drinking 1, taken along lines 1v and 1. (10) ... reaction u, (12,) , (12a)
, (12b), (12c), (12d) conductive drum, (14)...generated gas introduction πi, (1γ) high frequency power source. Applicant Minolta Camera Co., Ltd. Figure 1 Figure 2r41 Figure 3

Claims (1)

[Claims] (1) In a glow discharge decomposition device that uses a capacitively coupled glow discharge decomposition method to decompose generated gas on a conductive drum in a reaction chamber that can be depressurized to form a photoconducting layer, the conductive drum is placed in the reaction chamber. A glow discharge device (' 1゜