JPS59214713A - 静電容量型変位検出器 - Google Patents

静電容量型変位検出器

Info

Publication number
JPS59214713A
JPS59214713A JP8980683A JP8980683A JPS59214713A JP S59214713 A JPS59214713 A JP S59214713A JP 8980683 A JP8980683 A JP 8980683A JP 8980683 A JP8980683 A JP 8980683A JP S59214713 A JPS59214713 A JP S59214713A
Authority
JP
Japan
Prior art keywords
electrode
transmitting
noise
fixed plate
receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8980683A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354285B2 (enrdf_load_stackoverflow
Inventor
Koji Sasaki
康二 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP8980683A priority Critical patent/JPS59214713A/ja
Publication of JPS59214713A publication Critical patent/JPS59214713A/ja
Publication of JPH0354285B2 publication Critical patent/JPH0354285B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP8980683A 1983-05-20 1983-05-20 静電容量型変位検出器 Granted JPS59214713A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8980683A JPS59214713A (ja) 1983-05-20 1983-05-20 静電容量型変位検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8980683A JPS59214713A (ja) 1983-05-20 1983-05-20 静電容量型変位検出器

Publications (2)

Publication Number Publication Date
JPS59214713A true JPS59214713A (ja) 1984-12-04
JPH0354285B2 JPH0354285B2 (enrdf_load_stackoverflow) 1991-08-19

Family

ID=13980960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8980683A Granted JPS59214713A (ja) 1983-05-20 1983-05-20 静電容量型変位検出器

Country Status (1)

Country Link
JP (1) JPS59214713A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02269908A (ja) * 1989-04-12 1990-11-05 Mitsutoyo Corp 静電容量型変位検出器
JPH04242117A (ja) * 1991-01-16 1992-08-28 Mitsutoyo Corp 静電容量形変位測定装置
JP2006047135A (ja) * 2004-08-05 2006-02-16 Olympus Corp 静電エンコーダ
WO2019184136A1 (zh) * 2018-03-26 2019-10-03 磐石电气(常州)有限公司 一种数字式位移传感器及其位移测量方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02269908A (ja) * 1989-04-12 1990-11-05 Mitsutoyo Corp 静電容量型変位検出器
JPH04242117A (ja) * 1991-01-16 1992-08-28 Mitsutoyo Corp 静電容量形変位測定装置
JP2006047135A (ja) * 2004-08-05 2006-02-16 Olympus Corp 静電エンコーダ
WO2019184136A1 (zh) * 2018-03-26 2019-10-03 磐石电气(常州)有限公司 一种数字式位移传感器及其位移测量方法
US10890432B2 (en) 2018-03-26 2021-01-12 Monolith Electric (changzhou) Co., Ltd. Digital displacement sensor and displacement measuring method thereof

Also Published As

Publication number Publication date
JPH0354285B2 (enrdf_load_stackoverflow) 1991-08-19

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