JPS592144B2 - Mass spectrometer ion source - Google Patents

Mass spectrometer ion source

Info

Publication number
JPS592144B2
JPS592144B2 JP56154066A JP15406681A JPS592144B2 JP S592144 B2 JPS592144 B2 JP S592144B2 JP 56154066 A JP56154066 A JP 56154066A JP 15406681 A JP15406681 A JP 15406681A JP S592144 B2 JPS592144 B2 JP S592144B2
Authority
JP
Japan
Prior art keywords
belt
ionization chamber
sample
ions
mass spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56154066A
Other languages
Japanese (ja)
Other versions
JPS5854540A (en
Inventor
「とく」夫 水野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP56154066A priority Critical patent/JPS592144B2/en
Publication of JPS5854540A publication Critical patent/JPS5854540A/en
Publication of JPS592144B2 publication Critical patent/JPS592144B2/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/14Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Description

【発明の詳細な説明】 本発明は液体クロマトグラフで分離された試料溶液を質
量分析装置で分析する際に用いて好適なイオン源に関す
る。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ion source suitable for use when a sample solution separated by a liquid chromatograph is analyzed by a mass spectrometer.

従来液体クロマトグラフで分離された試料溶液を質量分
析装置のイオン源へ導入する方式としてベルト方式が知
られている。
Conventionally, a belt method is known as a method for introducing a sample solution separated by a liquid chromatograph into an ion source of a mass spectrometer.

これは液体クロマトグラフからの流出液をベルト上に展
開保持させ、このベルトをイオン源内に導入し、イオン
化位置においてベルトを加熱して試料を蒸発させてイオ
ン化するものである。ところがこの様な従来の方式では
加熱により試料を蒸発させた後電子衝撃イ・ オン化あ
るいは化学イオン化するため、不安定な試料は蒸発の段
階で熱分解してしまい又難揮発性試料は十分蒸発せず、
測定可能な試料は極めて限定されたものとなつていた。
本発明はこの点に鑑みてなされたものであり、0 ベル
ト上の試料に高速度が与えられた中性粒子(原子)を衝
突させることにより加熱せずにイオン化し、上述した欠
点を解消することを特徴としている。
In this method, the liquid effluent from a liquid chromatograph is developed and held on a belt, this belt is introduced into an ion source, and the belt is heated at the ionization position to evaporate and ionize the sample. However, in this conventional method, the sample is evaporated by heating and then subjected to electron impact ionization or chemical ionization, so unstable samples are thermally decomposed during the evaporation stage, and non-volatile samples are not sufficiently evaporated. Without,
The samples that could be measured were extremely limited.
The present invention was made in view of this point, and eliminates the above-mentioned drawbacks by colliding neutral particles (atoms) given a high velocity to the sample on the belt to ionize it without heating. It is characterized by

以下図面を用いて本発明を詳述する。図面は本発明の一
実施例の構成を示す断面図で、51は質量分析装置のイ
オン化室である。このイオン化室内にはイオン引出し電
極2、フォーカス電極3、主スリット4が置かれ、その
内部は真空ポンプ5によつて高真空に保たれている。6
は屈曲可能な回転ベルトで無端にされ、上記引出し電極
・O2に近接して配置されたプーリ7、8及び真空外の
プーリ9に張架されている。
The present invention will be explained in detail below using the drawings. The drawing is a sectional view showing the configuration of an embodiment of the present invention, and 51 is an ionization chamber of a mass spectrometer. An ion extraction electrode 2, a focus electrode 3, and a main slit 4 are placed in this ionization chamber, and the inside thereof is maintained at a high vacuum by a vacuum pump 5. 6
is made into an endless bendable rotary belt, and is stretched around pulleys 7 and 8 placed close to the extraction electrode O2 and a pulley 9 outside the vacuum.

プーリ9の近傍には液体クロマトグラフ10からの流出
液を上記ベルト6に連続的に付着させるための試料添着
部1計及びベルトに付着した流出液から試料成分の・5
みを残し溶媒成分を蒸発させるためのヒータ12が配
置されている。該ヒータ12により溶媒が除去されて残
つた試料成分を表面に保持したベルトは差圧排気手段1
3を介してイオン化室1内へ移送される。この差圧排気
手段は隔壁14a、14b、■014cによつて形成さ
れた部屋15a、15bを有し、各部屋は真空度に応じ
た適宜な真空ポンプ、16a、16bに接続されている
。そして、ベルト6は各隔壁に設けた通路を通つてイオ
ン化室に或いは大気中に移送されるが、この部分におけ
る35空気の流通は極めて少くされており、従つてイオ
ン化室の真空度を悪化させることなくヘルドの移送を行
うことができる。この様にしてイオン化室1内へ移送さ
れたベルト6にはプーリ7,8間に設定されるイオン化
部17において、後述する中性粒子源18からの高速中
性粒子ビーム19が照射され、該ビームの照射によりベ
ルト6の表面に保持されている試料成分はイオン化され
、引出し電極2,フオーカス電極3,主スリツト4を介
して質量分析系へ導かれる0上記中性粒子源18は高速
度が与えられた中性粒子ビーム例えばアルゴン原子ビー
ムを作成するもので、アルゴンガスを導入して電子衝撃
によりイオン化して加速しアルゴンイオンビーム20を
得るためのアルゴンイオン銃21と、該アルゴンイオン
ビーム20を浮遊アルゴンガスに衝突させアルゴンイオ
ンから電荷を奪うための衝突室22と、該衝突室22か
ら出射したアルゴン原子ビーム中に混在する電荷を奪わ
れなかつたアルゴンイオンを取出す偏向器23とから構
成される。
In the vicinity of the pulley 9, there is a sample attachment part for continuously adhering the effluent from the liquid chromatograph 10 to the belt 6, and a sample attachment part for continuously adhering the effluent from the liquid chromatograph 10 to the belt 6.
A heater 12 is provided to evaporate the solvent components while leaving a residue behind. The belt holding the remaining sample components on the surface after the solvent has been removed by the heater 12 is used as a differential pressure exhaust means 1.
3 into the ionization chamber 1. This differential pressure evacuation means has chambers 15a, 15b formed by partition walls 14a, 14b, 1014c, and each chamber is connected to an appropriate vacuum pump 16a, 16b depending on the degree of vacuum. The belt 6 is then transferred to the ionization chamber or into the atmosphere through passages provided in each partition, but the circulation of air in this section is extremely small, which deteriorates the degree of vacuum in the ionization chamber. Heald can be transported without any trouble. The belt 6 transferred into the ionization chamber 1 in this manner is irradiated with a high-speed neutral particle beam 19 from a neutral particle source 18, which will be described later, in the ionization section 17 set between the pulleys 7 and 8. The sample components held on the surface of the belt 6 are ionized by the beam irradiation and guided to the mass spectrometry system via the extraction electrode 2, the focus electrode 3, and the main slit 4. It is used to create a given neutral particle beam, for example, an argon atomic beam, and includes an argon ion gun 21 for introducing argon gas, ionizing it by electron impact, and accelerating it to obtain an argon ion beam 20; It is composed of a collision chamber 22 for colliding with floating argon gas to deprive the argon ions of electric charge, and a deflector 23 for extracting the argon ions that have not been deprived of the electric charge mixed in the argon atomic beam emitted from the collision chamber 22. be done.

尚アルゴン原子ビームの照射とイオンの引出しを容易に
するため、ブーリ7,8間におけるベルト面力弓1出し
電極2に対して傾斜する(例えば45f)程度)ように
該プーリ7,8の位置が配慮されており、その部分には
アルゴン原子ビームの照射領域を限定するための穴あき
プレート24が配置されている。又25はイオン化され
ずに残つた試料成分を蒸発させて除去するためのヒータ
であるO上述の如き構成においてプーリ7,8,9を矢
印方向に回転させベルトを差圧排気手段13を通して一
定速度で移送しながら試料添着部11において液体クロ
マトグラフ10からの流出液をベルトに付着せしめれば
、該流出液はベルト上に液体クロマトグラムとして展開
される。
In order to facilitate the irradiation of the argon atomic beam and the extraction of ions, the pulleys 7 and 8 are positioned so that the belt surface force bow 1 between the pulleys 7 and 8 is inclined (for example, about 45 f) with respect to the output electrode 2. This is taken into consideration, and a perforated plate 24 is placed in that area to limit the irradiation area of the argon atomic beam. Further, 25 is a heater for evaporating and removing sample components remaining without being ionized. In the above-described configuration, the pulleys 7, 8, and 9 are rotated in the direction of the arrow, and the belt is passed through the differential pressure evacuation means 13 at a constant speed. If the liquid effluent from the liquid chromatograph 10 is applied to the belt in the sample applying section 11 while being transferred by the liquid chromatogram, the liquid effluent is developed as a liquid chromatogram on the belt.

展開された流出液からはヒータ12により溶媒成分が除
かれ、残つた試料成分のみがベルトに保持されて順次イ
オン化部17へ移送され、そこでアルゴン原子ビームの
照射を受けてイオン化されて質量分析される。この時イ
オン化部17では高速のアルゴン原子(中性粒子)を試
料に衝突させて試料のイオン化を行つているため、従来
の様な加熱による気化過程が全く不要であり、試料の熱
による分解をなくすことが可能である。従つて不安定な
試料であつても正確な測定を行うことができる。又同じ
く高速のアルゴン原子との衝突により試料をイオン化さ
せているため難揮発性物質あるいは絶縁物であつても効
率よくイオン化させることができ、測定可能な試料の範
囲も拡大されることになる。本実施例では偏向器23に
よつて取出されたアルゴンイオンを測定後のベルトに照
射して該ベルトをスバツタリングし、イオン化されずに
残つた試料を除去できるのでヒータ25と併せて残留試
料を完全になくすことができる。尚上述した実施例では
中性粒子としてアルゴン原子を用いたが、それに限らず
他の原子あるいは中性粒子を用いることが可能である。
The solvent component is removed from the expanded effluent by the heater 12, and only the remaining sample components are held on the belt and sequentially transferred to the ionization section 17, where they are ionized by irradiation with an argon atomic beam and subjected to mass spectrometry. Ru. At this time, in the ionization section 17, the sample is ionized by colliding high-speed argon atoms (neutral particles) with the sample, so there is no need for the conventional vaporization process by heating, and the sample is not decomposed due to heat. It is possible to eliminate it. Therefore, accurate measurements can be made even with unstable samples. Furthermore, since the sample is ionized by collision with high-speed argon atoms, even non-volatile substances or insulators can be efficiently ionized, and the range of samples that can be measured is expanded. In this embodiment, the argon ions taken out by the deflector 23 are irradiated onto the belt after measurement to splatter the belt, and the remaining sample that has not been ionized can be removed. can be lost. In the embodiments described above, argon atoms were used as neutral particles, but the present invention is not limited to this, and other atoms or neutral particles may be used.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本発明の一実施例の構成を示す断面図であるO1
・・・・・・イオン化室、5,16a,16b・・・・
・・真空ポンプ、6・・・・・・ベルト、7,8,9・
・・・・・プーリ、10・・・・・・液体クロマトグラ
フ、11・・・・・・試料添着部、12,25・・・・
・・ヒータ、13・・・・・・差圧排気手段、14a,
14b,14c・・・・・・隔壁、15a,15b・・
・・・・部屋、17・・・・・・イオン化部、18・・
・・・・中性粒子源、19・・・・・・中性粒子ビーム
、20・・・・・・アルゴンィォンビ―ム、21・・・
・・・アルゴンイオン銃、22・・・・・・衝突室、2
3・・・・・・偏向器、24・・・・・・穴あきプレー
ト。
The drawing is a sectional view showing the configuration of one embodiment of the present invention.
...Ionization chamber, 5, 16a, 16b...
・・Vacuum pump, 6・・・・Belt, 7, 8, 9・
... Pulley, 10 ... Liquid chromatograph, 11 ... Sample attachment part, 12, 25 ...
...Heater, 13...Differential pressure exhaust means, 14a,
14b, 14c...Partition wall, 15a, 15b...
...Room, 17...Ionization section, 18...
...Neutral particle source, 19...Neutral particle beam, 20...Argonion beam, 21...
...Argon ion gun, 22...Collision chamber, 2
3...Deflector, 24...Perforated plate.

Claims (1)

【特許請求の範囲】[Claims] 1 真空排気されたイオン化室と、該イオン化室へ真空
外から連続的に移送されるベルトと、該ベルトのイオン
化室への導入部に設けられた差圧排気手段と、該ベルト
に真空外において試料溶液を付着させるための手段と、
イオン銃と、該イオン銃から発生したイオンの電荷を奪
い中性粒子に変換するための手段と、該変換手段からイ
オン化室内の前記ベルト上へ向けて照射される中性粒子
ビーム中に混在するイオンを取出すための偏向手段と、
中性粒子照射により得られた試料イオンを引出して加速
するための電極とを備え、前記偏向手段により中性粒子
ビーム中から取出されたイオンを前記ベルト上に照射す
るようにしたことを特徴とする質量分析装置のイオン源
1. An evacuated ionization chamber, a belt that is continuously transferred to the ionization chamber from outside the vacuum, a differential pressure exhaust means provided at the introduction part of the belt into the ionization chamber, and a belt that is continuously transferred to the ionization chamber from outside the vacuum. means for depositing a sample solution;
an ion gun, a means for removing the electric charge of ions generated from the ion gun and converting them into neutral particles, and a neutral particle beam that is irradiated from the converting means onto the belt in the ionization chamber. a deflection means for extracting ions;
It is characterized by comprising an electrode for extracting and accelerating sample ions obtained by neutral particle irradiation, and irradiating the belt with the ions extracted from the neutral particle beam by the deflection means. The ion source of the mass spectrometer.
JP56154066A 1981-09-29 1981-09-29 Mass spectrometer ion source Expired JPS592144B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56154066A JPS592144B2 (en) 1981-09-29 1981-09-29 Mass spectrometer ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56154066A JPS592144B2 (en) 1981-09-29 1981-09-29 Mass spectrometer ion source

Publications (2)

Publication Number Publication Date
JPS5854540A JPS5854540A (en) 1983-03-31
JPS592144B2 true JPS592144B2 (en) 1984-01-17

Family

ID=15576144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56154066A Expired JPS592144B2 (en) 1981-09-29 1981-09-29 Mass spectrometer ion source

Country Status (1)

Country Link
JP (1) JPS592144B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5977299U (en) * 1982-11-15 1984-05-25 株式会社ミネロン Electronic parts storage case

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60100044A (en) * 1984-09-28 1985-06-03 Hitachi Ltd Liquid chromatograph-mass spectrometer linked analyzer
FR2745382B1 (en) * 1996-02-27 1998-05-07 Devienne Fernand Marcel APPARATUS FOR DETECTING AND ANALYZING MOLECULES OF VARIOUS NATURES

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5977299U (en) * 1982-11-15 1984-05-25 株式会社ミネロン Electronic parts storage case

Also Published As

Publication number Publication date
JPS5854540A (en) 1983-03-31

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