JPS5920804A - 膜厚監視装置 - Google Patents
膜厚監視装置Info
- Publication number
- JPS5920804A JPS5920804A JP13235082A JP13235082A JPS5920804A JP S5920804 A JPS5920804 A JP S5920804A JP 13235082 A JP13235082 A JP 13235082A JP 13235082 A JP13235082 A JP 13235082A JP S5920804 A JPS5920804 A JP S5920804A
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical
- thin film
- film thickness
- monitoring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012806 monitoring device Methods 0.000 title claims description 11
- 230000003287 optical effect Effects 0.000 claims abstract description 53
- 239000013307 optical fiber Substances 0.000 claims abstract description 52
- 239000010409 thin film Substances 0.000 claims abstract description 32
- 238000012544 monitoring process Methods 0.000 claims abstract description 5
- 239000010408 film Substances 0.000 claims description 24
- 238000001514 detection method Methods 0.000 claims description 23
- 238000006243 chemical reaction Methods 0.000 claims description 19
- 238000005375 photometry Methods 0.000 claims description 12
- 238000007738 vacuum evaporation Methods 0.000 claims description 9
- 230000003595 spectral effect Effects 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 2
- 239000011521 glass Substances 0.000 abstract description 39
- 230000000694 effects Effects 0.000 abstract description 4
- 238000001704 evaporation Methods 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 238000010586 diagram Methods 0.000 description 11
- 238000001771 vacuum deposition Methods 0.000 description 7
- 239000003990 capacitor Substances 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 235000007516 Chrysanthemum Nutrition 0.000 description 1
- 244000189548 Chrysanthemum x morifolium Species 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13235082A JPS5920804A (ja) | 1982-07-28 | 1982-07-28 | 膜厚監視装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13235082A JPS5920804A (ja) | 1982-07-28 | 1982-07-28 | 膜厚監視装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5920804A true JPS5920804A (ja) | 1984-02-02 |
| JPH0410003B2 JPH0410003B2 (cs) | 1992-02-24 |
Family
ID=15079296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13235082A Granted JPS5920804A (ja) | 1982-07-28 | 1982-07-28 | 膜厚監視装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5920804A (cs) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6324144A (ja) * | 1986-07-02 | 1988-02-01 | Sanyo Kokusaku Pulp Co Ltd | 爆発性雰囲気内を走行中のシ−トの赤外線水分測定方法及び装置 |
| JPS6324145A (ja) * | 1986-07-02 | 1988-02-01 | Sanyo Kokusaku Pulp Co Ltd | ドライヤ−パ−トにおけるシ−トの水分測定方法及び装置 |
| US4774000A (en) * | 1985-11-01 | 1988-09-27 | Kabushiki Kaisha Tsuchiya Seisakusho | Submicron disc filters |
| JPS63289105A (ja) * | 1987-05-20 | 1988-11-25 | Mitsubishi Heavy Ind Ltd | ダムの放流設備据付方法 |
| US5175697A (en) * | 1986-06-02 | 1992-12-29 | Minolta Camera Kabushiki Kaisha | Spectrophotometer for accurately measuring light intensity in a specific wavelength region |
| WO2012141090A1 (ja) * | 2011-04-11 | 2012-10-18 | 東京エレクトロン株式会社 | 基板処理装置に用いられるプロセスモニター装置、プロセスモニター方法、および基板処理装置 |
| US11892664B2 (en) | 2018-11-02 | 2024-02-06 | Viavi Solutions Inc. | Stepped structure optical filter |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53119076A (en) * | 1977-03-26 | 1978-10-18 | Ritsuo Hasumi | Optical thicknessmeter for transparent film |
-
1982
- 1982-07-28 JP JP13235082A patent/JPS5920804A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53119076A (en) * | 1977-03-26 | 1978-10-18 | Ritsuo Hasumi | Optical thicknessmeter for transparent film |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4774000A (en) * | 1985-11-01 | 1988-09-27 | Kabushiki Kaisha Tsuchiya Seisakusho | Submicron disc filters |
| US5175697A (en) * | 1986-06-02 | 1992-12-29 | Minolta Camera Kabushiki Kaisha | Spectrophotometer for accurately measuring light intensity in a specific wavelength region |
| US5305233A (en) * | 1986-06-02 | 1994-04-19 | Minolta Camera Kabushiki Kaisha | Spectrophotometer for accurately measuring light intensity in a specific wavelength region |
| JPS6324144A (ja) * | 1986-07-02 | 1988-02-01 | Sanyo Kokusaku Pulp Co Ltd | 爆発性雰囲気内を走行中のシ−トの赤外線水分測定方法及び装置 |
| JPS6324145A (ja) * | 1986-07-02 | 1988-02-01 | Sanyo Kokusaku Pulp Co Ltd | ドライヤ−パ−トにおけるシ−トの水分測定方法及び装置 |
| JPS63289105A (ja) * | 1987-05-20 | 1988-11-25 | Mitsubishi Heavy Ind Ltd | ダムの放流設備据付方法 |
| WO2012141090A1 (ja) * | 2011-04-11 | 2012-10-18 | 東京エレクトロン株式会社 | 基板処理装置に用いられるプロセスモニター装置、プロセスモニター方法、および基板処理装置 |
| JP2012220359A (ja) * | 2011-04-11 | 2012-11-12 | Tokyo Electron Ltd | 基板処理装置に用いられるプロセスモニター装置、プロセスモニター方法、および基板処理装置 |
| US11892664B2 (en) | 2018-11-02 | 2024-02-06 | Viavi Solutions Inc. | Stepped structure optical filter |
| US12436328B2 (en) | 2018-11-02 | 2025-10-07 | Viavi Solutions Inc. | Stepped structure optical filter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0410003B2 (cs) | 1992-02-24 |
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