JPS59205140A - Device for displaying electron-ray diffracted image - Google Patents

Abstract

PURPOSE:To obtain a device in which a diffracted image consisting of duplicatedly written lines can be displayed without carrying out lining after photographing by douplicating a plural number of parallel marker lines to form the diffracted image which is displayed on the cathode-ray tube. CONSTITUTION:Diffracted images formed in an electric microscope 1, are converted into electric signals by means of an image pickup device 2 before being supplied to a picture-signal-storing device 4 and stored in it. When the stored electric signal is read out and supplied to a cathode-ray tube 11, a diffracted images containing many diffraction spots are displayed on the cathode-ray tube 11. At this point, an electric pen 16 is moved on a tablet 15 so that the positions of luminous points coincide with the spots thereby storing positional signals in a memory 19. In an operation-controlling circuit 20, signals for indicating luminous lines are produced according to data representing the coordinates of the positional signals, then supplied to a parallel-luminous-line-displaying-signal- producing circuit 24. As a result, an image in which luminous lines exist along a grid formed by diffracted spots, is displayed on the cathode-ray tube 11.

Description

Detailed Description of the Invention [Industrial Field of Application] The present invention is a method for analyzing an electron beam diffraction image having a diffraction pattern.
In order to display the diffraction image, the diffraction image is opened on a device for displaying it on a display device such as a cathode ray.

[Prior Art] An electron microscope is used to obtain a diffraction image of a sample in a transmission image mode or a scanning transmission image mode, and this diffraction image is analyzed to obtain information regarding the crystal structure, etc. of the sample. A convenient processing step for this analysis is to calculate the index (=I tJ) for the diffraction sub-boxes 1 to Δ, B, (c, . . . ) of the diffraction image as shown in FIG. Note that the center spot of OtJ is ~.In this index f41J work, (is the diffraction spot I~△, , +3.C.

C in Fig. 2 along the grid formed by...
A, 1-1 etc. (・Draw a line parallel to the indicated h, and for example Subo l-D, which is not tenths east of this line, spot △, 13
, C, etc. are determined to be Tatsumi's Subo 1~, and,
The dotted line C indicates that 1 should appear at the position of 1 to 1, but 1 does not actually appear. After developing the image, lines were drawn on the image using a ruler, divider, etc. Therefore, it was necessary to develop and dry the image in a dark room. In addition to being troublesome, it was not possible to perform the analysis process in a short time.3
Moreover, once the lines had been polished, it was an office job to cut them in and out, and the repairs could not be made by redrawing the lines.

[Object of the Invention] The present invention solves these conventional drawbacks and provides a diffraction image display capable of displaying the above-mentioned diffraction image by superimposing the lines without taking a photograph. The purpose is to provide a device 6.

[Structure of the Invention] The present invention provides means for converting a diffraction image to the right of an electron beam diffraction spot into an electric signal, a display means for displaying a C diffraction image based on the electric signal, and a third display means for displaying a C diffraction image based on the electric signal. It is characterized in that the means includes means for superimposing a plurality of manochor lines parallel to each other on the diffraction image and displaying the image in C.

[Example] Embodiments of the present invention will be described below based on the drawings.

FIG. 3 shows an embodiment of the present invention. 1 is an electron microscope. The electron microscope 1 can form a diffraction image in a transmission image observation mode and a diffraction image in a scanning image observation mode. Reference numeral 2 denotes an imaging device δ for converting a transmitted image into an electrical signal, and the output signal from this dancing image device 2 is stored in an image signal storage device 4 via a ΔD converter 3. On the other hand, the scanning diffraction image (an electric signal (A L) converted by the transmission electron detector 5) is supplied to the image signal storage 4 via the converter 6.
is a tarokku pulse generator (1 included, 171 pulse generators 7J, 1 tsuku pulse is X direction scanning 1)
It is supplied to the first counter 8x which produces the number 5.

The output signal of the first counter 8x is sent to the DA converter 9X.
n8Y, which is supplied to the cathode ray color '11Q)X deflection coil DX via
The output signal 8 of this second counter 8Y is 1]
and the Y-direction deflection of the cathode ray tube 11 via the amplifier 10Y. These, 1st. The output signals of the second counters 8X and 8Y are supplied to the image unit 3 storage device 4 (and the image signal/signal supplied to the storage device 4) is read out based on this scanning signal. ,
The signal is supplied to the cathode K of the cathode ray tube 11 via the adder circuit 12. Note that 13 is a DA converter and 14 is a tit amplifier. 15 is l! The tablet 1 has areas corresponding to both sides of the bipolar whistle 11, and when an electric pen 16'U indicates an arbitrary position on the tablet, the tablet 15 moves to the indicated position in the X and Y directions. X and Y position signals of corresponding magnitude are generated. This signal is sent to the bright spot signal generation circuit 1 via the DA converters 17X and 17Y.
8. The bright spot signal generating circuit 18 has a first. It consists of second AND circuits 18a, 18b and a third AND circuit 18c to which the output signals of these ant circuits 18a, 18b are supplied. The output signals of the first and second counters 8X and 8Y, which have been converted into analog signals 8 by DA converters 9X and 9Y, are also supplied to the first and second AND circuits 18a and 18b. The bright spot signal generation circuit 18 generates a signal from the tablets 1 to 15 in the Xlj direction (
Q: At the moment when the f signal 'I3 and the X-direction scanning signal 15 match, and the Y-direction position signal and the Y-direction scanning signal from tablets 1 to 15 match, a bright spot that becomes a mark is displayed on the hidden line whistle 11. Generates a bright spot display signal for the display. In this case, the blank point display signal is supplied to the cathode K of the -C cathode ray'1ffll through the charging circuit 12, so that the electric pen's instruction to I17
A bright spot is immediately displayed at the IC position corresponding to 3.j. The input device 21 of the arithmetic and control unit 20 is operated by the input device 21 of the arithmetic and control unit 20. The storage device 19 stores Monkey J and Unatsu C. The arithmetic and control unit 20 stores C based on this entry.
1! 2 polar lines @ 110 Parallel 4” 1 (described later) on both sides ≧
(Illustrated 9) The irises are created by the emote, and the created signal is output to the first and second counters 8X and BY.
Synchronized with C output.

The original signal for displaying the parallel bright lines from the arithmetic and control unit 20 is supplied to the parallel bright line display signal generation circuit 244Cf via the DΔ converter 22,23. To this person L+, ii line person>J, Jingo light cow circuit 24 has the above D A exchange: t;
1st through 9x and 9y. Second counter 8×.

t3 Y and Y)' direction running signals are also supplied.

For example, when observing a transmitted image and trying to analyze the diffraction image of 11%' in the electron microscope 1, observation[
1115 to form a diffraction image on the image device 2. This projected image is transferred to the image device 2 and converted into an electrical signal, and this electrical signal is converted into an electrical signal. [ΔF] After being converted into a digital signal by the converter 3, it is supplied to the image signal storage device 4 and stored in C. This image signal Y is stored in the storage device rf4.
The image signal stored in the first . Second counter 8X, 8
The same +111 L/-C is read out from the scanning signal from Y, and this scanning signal is fed to the cathode ray tube 11.
The cathode ray tube 11 displays a diffraction image including many diffraction spora 1 as shown in FIG. , 1' trowel, shade lf
While observing the screen of the i-line tube 11, press the tablet 15-[
Smell-C Avoid moving the electric pen 16 and detect the diffraction spora 1~ on the back side of this diffraction image, for example S+ in FIG.
4 so that the position of the bright spot P matches the position of the
When the position of the 6° bright spot P coincides with this diffraction spora 1~, operate the input device 21 to obtain this)lk'+(D't
'/'L/t1~15'', the X and Yh direction positions (H bows) corresponding to the output luminescent spot P's mark (X+, Vl) are stored in the storage device 19.Next , Tablet h 15.
1, 15 - (move electric pen 1G U, shade 4! I
The diffraction spora I ~ that is displayed in the beam tube 11 is the second spora l-3 that is close to the spot where the j bar was first hit.
2 and 11 and 1) are t! <〈J K, '', sea urchin (j
Ru. Now, operate the input device 21 to select Tazore 1-1 corresponding to the coordinates (x2.yz) of spot S2!
The output information of □3 is stored in the storage device 19). Similarly,
Cathode ray tube 11 soil 31st spot 1~S3 pruning profit P
Please let me know the location! , F+Is''n< 33 coordinates (x 3 , y 3 ) [Qdl+i> Riruri/The output signal of Let 15 is distributed to the storage device 19. Performance ζ
) In the control circuit 20, the four votes other than these three points are displayed and used as data. The direction and interval tl), d2 are taken out, and this J, UnaFli line is displayed, and a signal is created for Igome.This Buddha) River, A)1. The outputs of the second counters 8X and 8Y are output from the arithmetic and control unit 20 in synchronization with the supply of the bow,
2.23, it is supplied to the parallel bright line display one circle generation circuit 24. In this parallel bright line display 6-generation circuit 24, D△
Since the r>(and YI)-plane scanning I5tan is also supplied via the converters 22 and 23, the Xh direction and Y direction scanning signals become l! ! /, f to the values corresponding to the coordinates that make up the line
Then, this circuit 24 outputs a signal for displaying a bright spot on the cathode ray tube 11 at high brightness. As a result, the cathode ray tube 11 has, for example, a diffraction spora 1- as shown in FIG.
An image in which bright lines G exist along the grid formed by j and C is displayed.

Note that the present invention is not limited to the embodiments described above, and can be modified in many ways.

For example, in order to input data for determining the direction and nn interval of bright lines displayed on the cathode ray tube 11, in the embodiment described above, the diffraction spot displayed on the cathode ray tube 11 is detected using an electric pen. I tried to give instructions using the tablet 1~, but the diffraction spora l~ displayed on the screen with the light pen
It is also possible to give an instruction.

Furthermore, in the above embodiment, the operator
4t! line? By instructing the displayed diffraction spora 1 to 1, we were able to manually generate data for calculating the direction and spacing of the flat<j emission lines, but the image data for displaying the diffraction image was It is also possible to display C on an electronic computer based on the output (by determining the rightward direction and interval of the emission line and the t).

[Effect 1] As described above, the present invention (1) allows lines to be drawn on a diffraction image for analysis without developing the 31'-times image photograph or using props. 3
3 Follow 'C Analysis Name Comfortable T: Frees you from darkroom work. Also, this line is a line that is displayed on both sides of the cathode ray, so the way to draw the line is appropriate. LL, μ can be easily corrected when it is 7:'7\ru.

[Brief explanation of drawings]

Fig. 1 is a diagram for explaining a diffraction image, Fig. 2 is a diagram for explaining the disadvantages of the conventional method, Fig. 3 is a diagram for explaining an embodiment of the present invention, and Fig. 4 is a diagram for explaining a diffraction image. The figure is a diagram showing an example of displaying a diffraction image on a cathode ray colored soil based on an embodiment of the apparatus.
;A! The lj diagram is a diagram for explaining the J-month calculation in the calculation control question, and FIG. 6 is a diagram for illustrating parallel bright lines displayed on a de-λ polar ray tube. It is. 1: Electron microscope, 2: Image withdrawal device, 3, 6: △[) converter, 4: Image signal storage device, 5-Transmission electron detector, 7: RiCJ y pulse generator, 8X, 8Y: Counter, 9.
X, 9Y, 17X, 17Y, 22゜23: DA change 1
9! instrument, 10X, IOY, -14: amplifier, 11: cathode ray color, 12: addition circuit, 15: to tablet l, 16: electric pen, 18: bright 1++j display signal generation circuit, 19: storage device, 20: trick Control device, 21: Human power device ita 1°
, 2/l: Parallel bright line display jM: S3 photogenerating circuit, P: Bright 1:, +, G: Parallel bright line, 11'1 revision Applicant: Nikki Denshi Co., Ltd. Representative: Italian pancreatic - person

Claims (3)

[Claims] (1) means for converting the diffraction image of the electric r-ray beam JJi spot 1~ into an electric signal; a display means for displaying the diffraction image based on the electric signal; and a display means for displaying the diffraction image based on the electric signal. 1. A display device for an electron beam diffraction image, comprising: means for superimposing and displaying a plurality of marker lines parallel to the beam on the diffraction image. (2) means for displaying a plurality of marker lines parallel to the display means by superimposing them on the diffraction image; means for arbitrarily moving the position of the mark; a position signal generator q'f for generating an information signal corresponding to the display position of the mark;
x Determine the direction and spacing of the marker line based on the three types of Buddhist symbols from the W signal generating means, and generate a signal for displaying the marker line based on the determined values. 17f. An electron beam diffraction image display device u according to claim 1. (3) The means for superimposing and displaying a plurality of marker lines parallel to each other on the diffraction image on the display means includes an electric pen and a tablet that generates an information signal corresponding to the indicated position of the electric pen. and means for determining the direction and interval of the marker lines based on three types of position signals from the tablet 1 to 1, and generating a signal for displaying the marker lines based on the determined values. An electron beam diffraction image display device according to claim 1, comprising: