JPS59203904A - Contactless measuring method of sectional size - Google Patents

Contactless measuring method of sectional size

Info

Publication number
JPS59203904A
JPS59203904A JP7803783A JP7803783A JPS59203904A JP S59203904 A JPS59203904 A JP S59203904A JP 7803783 A JP7803783 A JP 7803783A JP 7803783 A JP7803783 A JP 7803783A JP S59203904 A JPS59203904 A JP S59203904A
Authority
JP
Japan
Prior art keywords
cross
laser light
sectional size
linear
linear body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7803783A
Other languages
Japanese (ja)
Other versions
JPH0359363B2 (en
Inventor
Yoshiki Chigusa
佳樹 千種
Hiroo Matsuda
松田 裕男
Kunio Fujiwara
藤原 国生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP7803783A priority Critical patent/JPS59203904A/en
Publication of JPS59203904A publication Critical patent/JPS59203904A/en
Publication of JPH0359363B2 publication Critical patent/JPH0359363B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE:To measure sectional size without damaging the surface of a linear body in irregular torsional motion nor deforming the body by irradiating the body with laser light beams which oscillates crossing the linear body in >=3 directions. CONSTITUTION:Wire diameter measurement systems S1-S3 which utilize three laser light beams are arranged at equal intervals of 120 deg. on a circumference C which includes the linear body W having rectangular section in the center. Those measurement systems S1-S2 each have a laser light source 1, reflection mirror 3, rotating mirror 5 which oscillates a laser beam across the linear body W at a frequency of hundreds of Hz, and lens 7 which shapes this laser beam into a parallel beam. This constitution measures the sectional size without deforming the body.

Description

【発明の詳細な説明】 本発明は不規則なねじれ運動をする長方形断面を有する
線状物体の断面寸法を非接触にて瞬時に割出す測定法に
関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a measurement method for instantaneously determining the cross-sectional dimension of a linear object having a rectangular cross section that undergoes irregular twisting motion without contact.

従来、不規則なねじれ運動をする長方形断面を有する物
体、例えば線引き過程でねじれや回転等の運動を伴う光
フアイバテープ心線、の断面寸法を測定する方法として
は、不規則なねじれ運動を停止させるか或は不規則なね
じれ運動を規則的なねじれ運動に変えて非接触による外
径測定器や厚み測定器等で検出値の最大、最小値より寸
法を割出すという方法が採用されていた。
Conventionally, methods for measuring the cross-sectional dimensions of an object with a rectangular cross section that undergoes irregular twisting motion, such as an optical fiber tape core that undergoes twisting and rotation during the drawing process, involve stopping the irregular twisting motion. The method used was to change the irregular twisting motion to regular twisting motion and calculate the dimensions from the maximum and minimum values detected using a non-contact outer diameter measuring device, thickness measuring device, etc. .

しかしながら、上記従来の方法では不規則なねじれ運動
を停止させたり、不規則な運動を規則的な運動に変えた
りするために物体に外力を加える必要があり、このため
物体表面に傷をつげたり物体を変形乃至破損させたりす
る危険性がある。
However, in the above conventional methods, it is necessary to apply an external force to the object in order to stop the irregular twisting motion or change the irregular motion into regular motion, which may cause scratches on the object surface. There is a risk of deforming or damaging the object.

本発明は上記従来の欠点を除去して、完全に非接触状態
にて不規則なねじれ運動をする長方形断面を有する線状
物体の断面寸法を該不規則なねじれ運動をさせたままで
測定する方法を提供することを目的とする。
The present invention eliminates the above-mentioned conventional drawbacks, and provides a method for measuring the cross-sectional dimension of a linear object having a rectangular cross section that undergoes irregular twisting motion in a completely non-contact state while the irregular twisting motion continues. The purpose is to provide

このため本発明は、不規則なねじれ運動をする長方形断
面を有する線状物体に三方向以上から線状物体を横切る
方向に振動するレーザ光を照射させ、その斜影を光電素
子で検出し、該検出信号を演算器により演算処理するこ
とにより扉状物体の断面寸法を非接触にて瞬時に割出し
、これにより物体弄面に傷をつげたり物体を変形乃至破
損させたりする危険性なく断面寸法を測定可能としたこ
とを特徴とする。
Therefore, the present invention irradiates a linear object with a rectangular cross section that makes irregular twisting motions with a laser beam that vibrates in a direction across the linear object from three or more directions, and detects the oblique shadow with a photoelectric element. By processing the detection signal with a computer, the cross-sectional dimensions of a door-like object can be determined instantly without contact, and the cross-sectional dimensions can be determined without the risk of damaging the surface of the object or deforming or damaging the object. It is characterized by being able to measure.

以下、本発明の内容を添附図に沿って詳細に説明する。Hereinafter, the content of the present invention will be explained in detail with reference to the accompanying drawings.

第1図に示すように、本発明方法においては、長方形断
面を有する線状物体Wを中心とする円周C上に120°
の等間隔をあげて3組のレーザ光を利用した線径測定系
S□、S2、S3を配置する。
As shown in FIG. 1, in the method of the present invention, a linear object W having a rectangular cross section is
Three sets of wire diameter measuring systems S□, S2, and S3 using laser light are arranged at equal intervals.

各測定系Sユ、S2、S3は、図に示すように、レーザ
光源1と、反射ミラー3と、レーザビームを数百Hzの
周波数にて線状物体Wを横切る方向に振動させる回転ミ
ラー(又は音叉偏向器)5と、該レーザビームを平行ビ
ームに形成するレンズ7と、線状物体Wを間にはさんで
該レンズγと点対称位置に配置された集光レンズ9と、
該集光レンズ9からの光を受光する光電素子11とを含
む。
As shown in the figure, each measurement system S, S2, and S3 includes a laser light source 1, a reflection mirror 3, and a rotating mirror ( or a tuning fork deflector) 5, a lens 7 for forming the laser beam into a parallel beam, and a condenser lens 9 disposed at a point symmetrical position with the lens γ with the linear object W in between.
A photoelectric element 11 that receives light from the condensing lens 9 is included.

各測定系S□、S2、S3で形成される数百Hzで振動
するレーザビームにより被測定物体Wを走査し、その走
萱光を集光レンズ9により集光して光電素子11により
受光すると、物体Wの影を表わす方形波状の信号、つま
り物体Wの影の部分にて光強度が落込んだ出力波形の信
号が得られ、これから物体Wの斜影寸法が正確に求めら
れる。測定系S工、S3、S3は120°離して三組使
用しているので、物体Wの120°離れた3方向からの
斜影寸法を表わす信号が得られ、これらの信号をマイク
ロコンピータ等の演算器により演算処理して物体の断面
寸法を割出すことができる。該演算方法の一例を第2図
を参照して説明すると、上記の受光菓子11の受信信号
により得られる斜影寸法をa、b、cとすると、第2図
より次式が成立する0 r a= L cos (α−β十石) b=  L cos  (α+β) π C= Lcos (“β−百) (但しL:被測定物体の対角長、 α:基準方向に対する被測定物体の捩れ角度、 β:被測定物体の長辺と対角線とのなす角度) これより物体の断面寸法Lsinβ、L cosβは次
のように求められる。
When the object W to be measured is scanned by a laser beam vibrating at several hundred Hz formed by each measurement system S□, S2, and S3, the scanning light is focused by a condensing lens 9 and received by a photoelectric element 11. , a rectangular waveform signal representing the shadow of the object W, that is, an output waveform signal in which the light intensity falls in the shadow part of the object W, is obtained, and from this, the diagonal shadow size of the object W can be accurately determined. Since the measurement systems S, S3, and S3 are used in three sets separated by 120 degrees, signals representing the oblique shadow dimensions of the object W from three directions separated by 120 degrees are obtained, and these signals are used for calculations by a microcomputer, etc. It is possible to calculate the cross-sectional dimensions of an object through arithmetic processing using a device. An example of the calculation method will be explained with reference to FIG. 2. If the oblique shadow dimensions obtained from the received signal of the light-receiving confectionery 11 are a, b, and c, then from FIG. 2, the following equation holds: 0 r a = L cos (α-β 10 stones) b= L cos (α+β) π C= L cos (“β-100) (L: Diagonal length of the object to be measured, α: Torsion angle of the object to be measured with respect to the reference direction , β: angle between the long side of the object to be measured and the diagonal) From this, the cross-sectional dimensions L sin β and L cos β of the object are determined as follows.

L sinβ=Asin(%cos ’(:)−%co
s ”(i)4 ) −・■Lcosβ=:Acos(
%cos−1(N)””””。8−1(i)4)  −
=■この演算処理をするのに、被測定物体の斜影寸法を
表わす光電素子11からのアナログ信号なA/D変換し
てマイクロコンピュータに入力してやり、上記方程式か
らLsinβ、L cosβを算出するプログラムを実
行させてやればミリセカンドオーダーにて演算処理を完
了させることが可能である。該方法による測定精度はレ
ーザ光の女定性や受光素子の精度等により規定されるが
、高精度のものを使用すれば数μm以下の精度を得るこ
とも可能である。又、被測定物体の不規則なねじれ運動
の運動速度に対し十分速い検出速度で検出できるよう測
定系を構成する必要があるが、光フアイバテープの線引
のようにテープの回転振動が0.3rad/秒程反であ
る場合には毎秒100〜1000Hz 程度の走査速度
をもつレーザビームを使用すれば十分正確に測定可能で
ある。以上の方法により、完全に非接触にて不規則なね
じれ運動をする長方形断面を有する線状物体の断面寸法
を該不規則なねじれ運動をさせたまま高精度に測定する
ことが可能となる。
L sin β = Asin(%cos'(:)-%co
s”(i)4) −・■Lcosβ=:Acos(
%cos-1(N)””””. 8-1(i)4) −
= ■ To perform this arithmetic processing, an analog signal from the photoelectric element 11 representing the oblique shadow dimension of the object to be measured is A/D converted and inputted to a microcomputer, and a program is run to calculate L sin β and L cos β from the above equation. If executed, the calculation process can be completed in millisecond order. The measurement accuracy by this method is determined by the determinism of the laser beam, the accuracy of the light receiving element, etc., but if a highly accurate one is used, it is possible to obtain an accuracy of several μm or less. In addition, it is necessary to configure the measurement system so that it can detect the irregular torsional motion of the object to be measured at a sufficiently high detection speed. If the deviation is about 3 rad/sec, it can be measured with sufficient accuracy by using a laser beam with a scanning speed of about 100 to 1000 Hz/sec. By the above method, it is possible to highly accurately measure the cross-sectional dimension of a linear object having a rectangular cross section that undergoes irregular twisting motion in a completely non-contact manner while the object undergoes irregular twisting motion.

なお、上記実施例においては特に線径測定系S□、S3
、S3が被測定物体Wまわりに120°等間隔に離間配
置されて3組設けられたが、本発明は上記線径測定系を
3組以上用い、又角度配置を非等間隔としてもつ被測定
物体の断面寸法を測定することができる。また、断面寸
法を割出すための演算方程式は上記方程式に限定されな
い。
In addition, in the above embodiment, especially the wire diameter measuring systems S□, S3
, S3 are arranged at equal intervals of 120° around the object to be measured W, but the present invention uses three or more sets of the wire diameter measurement systems described above, and the angular arrangement is non-equally spaced. The cross-sectional dimensions of objects can be measured. Further, the calculation equation for determining the cross-sectional dimension is not limited to the above equation.

(実施例) 以下に本発明の一実施例を示す。(Example) An example of the present invention is shown below.

長方形断面を有するプラスチック製のテープを第1図に
示すように、該テープの断面図心を中心とする500の
円周上に120°等間隔に間を明けて各線径測定系S工
、S2、S3の平行ビーム形成用のレンズ7と集光レン
ズ9とを対向配置させ、レーザ光源1としてHe−Ne
レーザ、振動ビーム形成手段として音叉偏向器、および
演算器としてマイクロコンピュータを用意し、レーザ光
線を音叉偏向器とレンズとによって500 Hzの平行
な振動ビームとして被測定物体を走亙し、光電素子によ
る受光信号をマイクロコンピータで上記演算式■、■に
従って処理したところ、縦52μm、横349μmとい
う値を得た。このテープを顕微鏡にて断面寸法を測定し
たところ、縦50μm、@351μm という値を得た
As shown in Fig. 1, a plastic tape with a rectangular cross section is placed on each wire diameter measuring system S, S2 at equal intervals of 120° on a circumference of 500 around the center of the cross section of the tape. , S3, the parallel beam forming lens 7 and the condensing lens 9 are arranged facing each other, and the laser light source 1 is He-Ne.
A laser, a tuning fork deflector as a vibration beam forming means, and a microcomputer as a calculation unit are prepared, and the laser beam is transmitted through the object to be measured as a parallel vibration beam of 500 Hz by the tuning fork deflector and lens, and the laser beam is transmitted by a photoelectric element. When the received light signal was processed by a microcomputer according to the above calculation formulas (1) and (2), values of 52 μm in length and 349 μm in width were obtained. When the cross-sectional dimensions of this tape were measured using a microscope, values of 50 μm in length and 351 μm were obtained.

以上のように、本発明によれば不規則なねじれ運動をす
る長方形断面を有する線状物体の断面寸法を測定するに
、線状物体に全く外力を作用することなく該不規則なね
じれ運動をしたまま測定可能としたので、従来のように
物体狭面に傷をつげたり物体を変形させたり破損させた
りすることなしに断面寸法を測定することが可能である
As described above, according to the present invention, the cross-sectional dimensions of a linear object having a rectangular cross section that undergoes irregular twisting motion can be measured without applying any external force to the linear object. Since measurements can be made while the object is still in place, it is possible to measure the cross-sectional dimension without scratching the narrow surface of the object or deforming or damaging the object, unlike conventional methods.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明方法の原理を示す線図、第2図は線状物
体と斜影寸法との関係を示す線図である。 1・−・・レーザ光源、    5・・・・・回転ミラ
ー、11・・・・・受光素子、   W−・・・線状物
体、S工、S3、S3・・・・測定系。 特許出願人 住友電気工業株式会社 (外4名) 第1図 第2図
FIG. 1 is a diagram showing the principle of the method of the present invention, and FIG. 2 is a diagram showing the relationship between a linear object and a diagonal shadow dimension. 1... Laser light source, 5... Rotating mirror, 11... Light receiving element, W-... Linear object, S work, S3, S3... Measurement system. Patent applicant: Sumitomo Electric Industries, Ltd. (4 others) Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] 不規則なねじれ運動をする長方形断面を有する線状物体
に三方向以上から線状物体を横切る方向に振動するレー
ザ光を照射させ、その斜影を光電素子で検出し、該検出
信号を演算器により演ズ処理することにより線状物体の
断面寸法を非接触にて瞬時に割出す測定法。
A linear object with a rectangular cross section that makes irregular twisting motions is irradiated with laser light that oscillates in a direction across the linear object from three or more directions, the oblique shadow of the object is detected by a photoelectric element, and the detection signal is sent to a computing unit. A measurement method that instantaneously determines the cross-sectional dimensions of linear objects without contact.
JP7803783A 1983-05-02 1983-05-02 Contactless measuring method of sectional size Granted JPS59203904A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7803783A JPS59203904A (en) 1983-05-02 1983-05-02 Contactless measuring method of sectional size

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7803783A JPS59203904A (en) 1983-05-02 1983-05-02 Contactless measuring method of sectional size

Publications (2)

Publication Number Publication Date
JPS59203904A true JPS59203904A (en) 1984-11-19
JPH0359363B2 JPH0359363B2 (en) 1991-09-10

Family

ID=13650619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7803783A Granted JPS59203904A (en) 1983-05-02 1983-05-02 Contactless measuring method of sectional size

Country Status (1)

Country Link
JP (1) JPS59203904A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62503121A (en) * 1985-06-14 1987-12-10 ザ ブロ−クン ヒル プロプライエタリ− カンパニ− リミテツド Method and apparatus for obtaining information regarding the cross-sectional shape or contour of at least a portion of the surface of an object
EP0305107A2 (en) * 1987-08-24 1989-03-01 L.B.P. Partnership Three-dimensional scanner
WO1992008949A1 (en) 1990-11-20 1992-05-29 Mesacon Gesellschaft Für Messtechnik Mbh Process for the continuous contactless measurement of outlines and device for implementing the measuring process
US5383022A (en) * 1992-04-10 1995-01-17 Zumbach Electronic Ag Method and apparatus for measuring the dimensions of an object
CN105806229A (en) * 2016-05-27 2016-07-27 四川三维测控设备有限公司 Thickness-width online contactless measuring method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62503121A (en) * 1985-06-14 1987-12-10 ザ ブロ−クン ヒル プロプライエタリ− カンパニ− リミテツド Method and apparatus for obtaining information regarding the cross-sectional shape or contour of at least a portion of the surface of an object
EP0305107A2 (en) * 1987-08-24 1989-03-01 L.B.P. Partnership Three-dimensional scanner
EP0305107A3 (en) * 1987-08-24 1990-01-24 L.B.P. Partnership Three-dimensional scanner
WO1992008949A1 (en) 1990-11-20 1992-05-29 Mesacon Gesellschaft Für Messtechnik Mbh Process for the continuous contactless measurement of outlines and device for implementing the measuring process
US5383022A (en) * 1992-04-10 1995-01-17 Zumbach Electronic Ag Method and apparatus for measuring the dimensions of an object
CN105806229A (en) * 2016-05-27 2016-07-27 四川三维测控设备有限公司 Thickness-width online contactless measuring method

Also Published As

Publication number Publication date
JPH0359363B2 (en) 1991-09-10

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