JPS62269007A - Optical displacement measuring apparatus - Google Patents

Optical displacement measuring apparatus

Info

Publication number
JPS62269007A
JPS62269007A JP11339186A JP11339186A JPS62269007A JP S62269007 A JPS62269007 A JP S62269007A JP 11339186 A JP11339186 A JP 11339186A JP 11339186 A JP11339186 A JP 11339186A JP S62269007 A JPS62269007 A JP S62269007A
Authority
JP
Japan
Prior art keywords
light
specimen
photodetector
scanner
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11339186A
Other languages
Japanese (ja)
Inventor
Hisatsugu Ishizu
Kozo Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP11339186A priority Critical patent/JPS62269007A/en
Publication of JPS62269007A publication Critical patent/JPS62269007A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To measure optically a displacement of a specimen without enlarging a photodetector size, by using a spot light by a scanner and determining quantity of deviation of the scanner.
CONSTITUTION: A beam of light from a source 2 of light-flashing unit 6 is collected by a condenser lens 3 and becomes a flying spot light 12 waved on a specimen 1. A beam of light reflected by a specimen 1 passes through a light- receiving lens 4 on an optical axis 11 of a light-receiving unit 7 and develops its image on a photodetector 5. The photodetector 5 is displaced by a feed mechanism 9 driven by a servo-motor 10 and develops its image on the elements of the photodetector 5 on the axis 11. When the specimen 1 is located on an A position, a swaying angle of a scanner 8 is θ1 and that after displacement of X of the specimen 1 to a B position is θ2 and by measuring a physical quantity corresponding to angles θ1, θ2 as, for instance, an electric quantity, the displacement quantity x is measured, with the photodetector 5 being kept small.
COPYRIGHT: (C)1987,JPO&Japio
JP11339186A 1986-05-16 1986-05-16 Optical displacement measuring apparatus Pending JPS62269007A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11339186A JPS62269007A (en) 1986-05-16 1986-05-16 Optical displacement measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11339186A JPS62269007A (en) 1986-05-16 1986-05-16 Optical displacement measuring apparatus

Publications (1)

Publication Number Publication Date
JPS62269007A true JPS62269007A (en) 1987-11-21

Family

ID=14611123

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11339186A Pending JPS62269007A (en) 1986-05-16 1986-05-16 Optical displacement measuring apparatus

Country Status (1)

Country Link
JP (1) JPS62269007A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4130119A1 (en) * 1991-09-11 1993-03-25 Leuze Electronic Gmbh & Co Optical triangulation distance measurement device - light source, transmission lens, wide angle receiver lens and position sensitive light receiver
JP2010216927A (en) * 2009-03-16 2010-09-30 Sumitomo Metal Ind Ltd Apparatus and method of measuring thickness of steel pipe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4130119A1 (en) * 1991-09-11 1993-03-25 Leuze Electronic Gmbh & Co Optical triangulation distance measurement device - light source, transmission lens, wide angle receiver lens and position sensitive light receiver
JP2010216927A (en) * 2009-03-16 2010-09-30 Sumitomo Metal Ind Ltd Apparatus and method of measuring thickness of steel pipe

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