JPS59202194A - Micro-welding method - Google Patents

Micro-welding method

Info

Publication number
JPS59202194A
JPS59202194A JP58075730A JP7573083A JPS59202194A JP S59202194 A JPS59202194 A JP S59202194A JP 58075730 A JP58075730 A JP 58075730A JP 7573083 A JP7573083 A JP 7573083A JP S59202194 A JPS59202194 A JP S59202194A
Authority
JP
Japan
Prior art keywords
welding
diameter
light beam
micro
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58075730A
Other languages
Japanese (ja)
Inventor
Kazuo Yokoi
横井 和雄
Naohisa Matsushita
直久 松下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58075730A priority Critical patent/JPS59202194A/en
Publication of JPS59202194A publication Critical patent/JPS59202194A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To prevent generation of residual stress owing to an abrupt temp. difference near the welding point in the stage of welding a micro-part by using a light beam by passing the light beam through a diaphragm mechanism having a specifically shaped diaphragm aperture. CONSTITUTION:A laser light beam 1 emitted from a light beam welding machine using a laser beam is restricted to laser light having the diameter D0 by a diaphragm mechanism 2 and is condensed by a condenser lens 3 to form a micro-spot image 5 of a diameter D1 on the surface of a work 4 thereby welding the work. A diaphragm aperture of the diameter d0 smaller than said diameter D0 is provided to the mechanism 2 or a brysanthemum-shaped notch 6a of the diameter d1 slightly larger than d0 is provided or a small hole group 6b of semitransparent part 2C is provided around the diaphragm aperture of the diameter d0. The temp. gradient in the part around the spot image 5 on the surface of the object to be welded is made gentle and the remaining of thermal stress owing to the abrupt temp. change is obviated, by which the generation of a crack and corrosion owing to the residual stress around the welding point is prevented.

Description

【発明の詳細な説明】 +al  発明の技術分野 本発明は光ビームを利用して微小部分の溶接を行うマイ
クロ溶接方法に係り、特に溶接部に大きな残留応力を発
生しないマイクロ溶接方法に関する。
DETAILED DESCRIPTION OF THE INVENTION +al Technical Field of the Invention The present invention relates to a micro welding method for welding minute parts using a light beam, and particularly to a micro welding method that does not generate large residual stress in a welded part.

(bl  技術の背景 溶接方法としては古来電気抵抗溶接やアーク溶接法、あ
るいはガスバーナを使用したガス溶接法等幾多の方法が
それぞれの用途に応じて採用されてきているが、比較的
に小さい部分の、しかも精度の高い溶接としては専らス
ボソH8接機による電気抵抗溶接が用いられてきた。
(bl Technology background) Many welding methods have been used since ancient times, such as electric resistance welding, arc welding, and gas welding using a gas burner, depending on the application. Moreover, electric resistance welding using a Suboso H8 welding machine has been used exclusively for high-precision welding.

さらに微細な部分の溶接法として最近光ビーム溶接法が
急速に発展してきており、殊に情報処理装置の精密且つ
微細な機構の溶接組立に利用されている。
Furthermore, light beam welding has recently been rapidly developed as a welding method for fine parts, and is particularly used for welding and assembling precise and fine mechanisms of information processing equipment.

(C1従来技術と問題点 周知のように、レーザ光綿や赤外線は光学的に収斂させ
て所望の点に集中出来るので、その溶接点の面積を微小
に制御出来ること、従ってそのエネルギー密度を上げる
ことが容易であること1周辺の物体に対して温度上昇や
酸化等の悪影響を与えない等の多くの利点がある。
(C1 Prior Art and Problems As is well known, laser beams and infrared rays can be optically converged and concentrated on a desired point, so the area of the welding point can be minutely controlled, and the energy density can therefore be increased. It has many advantages such as: 1) it does not cause any adverse effects such as temperature rise or oxidation on surrounding objects;

然しこの高度のエネルギー集中性の反面、これに基づく
欠点も存在する。少しくこの点に就いて説明しよう。
However, despite this high degree of energy concentration, there are also disadvantages based on this. Let me explain this point a little bit.

第1図はレーザ光線による光ビーム溶接機の光学系を説
明する図である。図に示してないレーザ光源から発射さ
れたレーザ光ビーム1は、一般に3〜10mmの直径り
をもち平行線状をなして投射され、内径Doの絞り機構
2により周辺部のレーザ光線を削除した後、R点に位置
する集光レンズ3で集光されて焦点Fで焦点を結んだ後
、逆に発散してW点にある被加工物4の表面にある直径
り、のスポ・7ト像5を結ぶ。
FIG. 1 is a diagram illustrating an optical system of a light beam welding machine using a laser beam. A laser beam 1 emitted from a laser light source (not shown) is generally projected in parallel lines with a diameter of 3 to 10 mm, and the laser beam at the periphery is removed by an aperture mechanism 2 with an inner diameter Do. After that, the light is condensed by the condensing lens 3 located at the point R and focused at the focal point F, and then conversely diverges to reach the diameter spot 7 on the surface of the workpiece 4 located at the point W. Tie statue 5.

図において、fはR,F間の距離で焦点距離を示し、d
はF、W間の距離を示し1発散距離である。
In the figure, f indicates the focal length as the distance between R and F, and d
represents the distance between F and W and is one divergence distance.

第2図は第1図の光源からの直径りの光ビーム1のエネ
ルギー強度分布を示す線図で2図示のように。
FIG. 2 is a diagram showing the energy intensity distribution of the light beam 1 of the diameter from the light source of FIG. 1, as shown in FIG.

該エネルギー分布は一般にガウス分布をしている。The energy distribution generally has a Gaussian distribution.

さて1元の光ビーム1を絞り機構2でその周辺部を削除
する結果、第3図の縦線でハツチした部分で示すような
鋭い分布となっている。此のレーザ光ビームをレンズ3
で絞って被加工物4に投射してスポット像5を被加工物
4の表面に形成し、該スポット像5の被加工物1を熔融
して溶接する訳である。
Now, as a result of removing the peripheral portion of the one-dimensional light beam 1 using the aperture mechanism 2, a sharp distribution is obtained as shown by the hatched area with vertical lines in FIG. This laser beam is passed through lens 3.
A spot image 5 is formed on the surface of the workpiece 4 by converging the beam and projecting it onto the workpiece 4, and the workpiece 1 of the spot image 5 is melted and welded.

しかる時は、溶接点の直径は0.2〜0.3 mmと相
当小さくとることが出来るけれども、該スポット像5内
とその周辺のエネルギー分布が急過ぎて、被加工物4の
溶接点に惣峻な温度分布を形成する結果、該被加工物4
の物体材料内の膨張差が甚だしくなり。
In such cases, although the diameter of the welding point can be made quite small, such as 0.2 to 0.3 mm, the energy distribution in and around the spot image 5 is too steep and the welding point on the workpiece 4 is As a result of forming a sharp temperature distribution, the workpiece 4
The difference in expansion within the material of the object becomes enormous.

所謂熱応力が残留する。この応力が原因で当該溶接点内
、またはその周辺で、亀裂が起こったり、たまたま該溶
接点が薬品に接する時は、残留応力のために異常な腐食
が進行する等の種々の問題を引き起すことがある。さら
に悪いことには、上記の残留応力による破壊は溶接直後
でなくである時間を経過した後に発生することも屡あり
、検査工程で排除することも難しく、マイクロ溶接の信
頼性にも大きな問題を残しており、各方面でその対策が
急がれている。
So-called thermal stress remains. This stress can cause cracks to occur in or around the welding point, and if the welding point happens to come into contact with chemicals, the residual stress can cause various problems such as abnormal corrosion. Sometimes. To make matters worse, the above-mentioned fractures due to residual stress often occur not immediately after welding but after a certain period of time has passed, making it difficult to eliminate in the inspection process and causing major problems in the reliability of micro welding. countermeasures are urgently needed in all areas.

(dl  発明の目的 本発明は前述の点に鑑みなされたもので、マイクロ溶接
時の溶接点近傍での亀裂破壊等の発生の少ない溶接方法
を提供しようとするものである。
(dl) Purpose of the Invention The present invention has been made in view of the above-mentioned points, and it is an object to provide a welding method that reduces the occurrence of cracks, etc. in the vicinity of the welding point during micro welding.

fe)  発明の構成 上記の発明の目的は、レンズ系と絞り機構より構成され
た光学系により光ビームを収斂させて微小点に該光ビー
ムを集中し、そのエネルギーで物体の溶接を行うマイク
ロ溶接方法において、前記光ビームを部分的に透過させ
る絞り孔周縁部ををする絞り機構を使用することにより
容易に達成される。
fe) Structure of the Invention The object of the above invention is to provide micro welding in which a light beam is converged by an optical system composed of a lens system and an aperture mechanism, the light beam is concentrated on a minute point, and an object is welded using the energy of the light beam. This is easily achieved by using an aperture mechanism that has a periphery of the aperture that partially transmits the light beam.

+f)  発明の実施例 以下本発明の実施例につき図面を参照して説明する。第
2図はレーザ光線によるマイクロ溶接において本発明に
基づく光学系の絞り機構の一実施例を示す平面図である
+f) Embodiments of the Invention Below, embodiments of the present invention will be described with reference to the drawings. FIG. 2 is a plan view showing an embodiment of an aperture mechanism of an optical system according to the present invention in microwelding using a laser beam.

第1図に示した絞り機構2の従来の絞り孔直径をDoと
し、第4図ta+に示すように、前記Doよりもやや小
さい直径doの絞り孔と、前記doより大きい直径d1
内で図示のような菊花状の切り欠は部6aを形成する。
The diameter of the conventional aperture hole of the aperture mechanism 2 shown in FIG. 1 is Do, and as shown in FIG.
A chrysanthemum-shaped cutout as shown in the figure forms a portion 6a.

しかる時は直径d1内のレーザ光ビームのエネルギー分
布は若し絞り機構68がなければ第5図の曲線aに示す
ようになるが、前記切り欠は部6aで直径doと直径d
1との間にあるレーザ光線のエネルギーは一部は遮断さ
れる。従って第4図(alに示す絞り機構2aによる被
加工物4の表面のスポット像5でのレーザ光線のエネル
ギー分布は第5図の縦線でハツチした分布となっている
。図で明らかなように、スポット像5周辺のエネルギー
分布(図のAの部分)はかなり緩和されているので、従
来のような溶接点周縁部の温度分布はなだらかになり、
従来より問題になっている残留応力を減少させることが
出来る。
In that case, the energy distribution of the laser beam within the diameter d1 would be as shown by the curve a in FIG.
Part of the energy of the laser beam between the two is blocked. Therefore, the energy distribution of the laser beam at the spot image 5 on the surface of the workpiece 4 produced by the aperture mechanism 2a shown in FIG. 4 (al) is the distribution hatched by the vertical lines in FIG. In addition, the energy distribution around the spot image 5 (portion A in the figure) is considerably relaxed, so the temperature distribution around the welding point becomes gentler than in the conventional case.
Residual stress, which has been a problem in the past, can be reduced.

上述のように、絞り機構2の周縁部に部分的にレーザ光
線を遮断する領域を設けれはよいのであるから、前記絞
り機構2aの外に、第3図(blに示す絞り機構2bの
ように、小孔群6bを開口部の周縁に有するものも本発
明に基づくマイクロ溶接方法の別の実施例である。゛ さらに第3図(C1に示すように、ハーフミラ−のよう
な半透明材料で形成した絞り機構20も本発明の一実施
例である。
As mentioned above, it is good to provide a region on the peripheral edge of the diaphragm mechanism 2 that partially blocks the laser beam, so a region such as the diaphragm mechanism 2b shown in FIG. Another embodiment of the micro welding method according to the present invention is one having a group of small holes 6b on the periphery of the opening. Further, as shown in FIG. 3 (C1), a translucent material such as a half mirror The aperture mechanism 20 formed by the above is also an embodiment of the present invention.

なお、上述の絞り機構2はいずれも、レーザ光線が未だ
収斂していない時に該レーザ光線にi露するので、特に
その温度が上昇すると言う問題はないが。
Incidentally, since the aperture mechanism 2 described above is exposed to the laser beam when the laser beam is not yet converged, there is no particular problem that the temperature thereof increases.

通常銅等の金属薄板からパンチングやエツチング。Usually punching or etching from a thin metal sheet such as copper.

あるいはレーザ加工等の方法で製作される。Alternatively, it is manufactured by a method such as laser processing.

(gl  発明の効果 以上の説明から明らかなように5本発明に基づくマイク
ロ溶接方法によれば、溶接点の近傍で亀裂が発生したり
、溶接の肉盛りが悪くて小孔を残したりする問題を解消
し、マイクロ溶接法の信頼性を向上することが出来る。
(gl Effects of the Invention As is clear from the above explanation, the micro welding method based on the present invention has problems such as cracks occurring near the welding point and small holes remaining due to poor weld build-up. It is possible to solve this problem and improve the reliability of the micro welding method.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はレーザ光線を利用したマイクロ溶接方法の光学
系を示す説明図、第2図は光源からのレーザ光線内のエ
ネルギー分布図、第3図は第1図に示したマイクロ溶接
法における光ビームのスポット像内のエネルギー分布図
、第4図は本発明に基づくマイクロ溶接法の光学系の絞
り機構の種々の実施例を示す平面図、第5図は同じく溶
接点のスポット像内のエネルギー分布を示す線図である
。 図において、1はレーザ光ビーム、2は絞り機構。 3はレンズ、4は被加工物、5はスポット像、6は本発
明による絞り機構の周縁部の実施例をそれぞれ示す。 第1図 第4図     第5図
Figure 1 is an explanatory diagram showing the optical system of the micro welding method using a laser beam, Figure 2 is an energy distribution diagram within the laser beam from the light source, and Figure 3 is the light beam used in the micro welding method shown in Figure 1. FIG. 4 is a plan view showing various embodiments of the aperture mechanism of the optical system of the micro welding method based on the present invention; FIG. 5 is a diagram showing the energy distribution in the spot image of the welding point. It is a line diagram showing distribution. In the figure, 1 is a laser beam and 2 is an aperture mechanism. 3 is a lens, 4 is a workpiece, 5 is a spot image, and 6 is an embodiment of the periphery of the aperture mechanism according to the present invention. Figure 1 Figure 4 Figure 5

Claims (1)

【特許請求の範囲】 レンズ系と絞り機構より構成された光学系により光ビー
ムを収斂させて微小点に該光ビームを集中し。 そのエネルギーで物体の溶接を行うマイクロ溶接方法で
あって、前記光ビームを部分的に透過させる絞り孔周縁
部ををする絞り機構を使用したことを特徴とするマイク
ロ溶接方法。
[Claims] An optical system comprising a lens system and an aperture mechanism converges a light beam and concentrates the light beam on a minute point. 1. A micro welding method for welding objects using the energy, characterized in that the micro welding method uses a diaphragm mechanism that forms a periphery of a diaphragm hole that partially transmits the light beam.
JP58075730A 1983-04-28 1983-04-28 Micro-welding method Pending JPS59202194A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58075730A JPS59202194A (en) 1983-04-28 1983-04-28 Micro-welding method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58075730A JPS59202194A (en) 1983-04-28 1983-04-28 Micro-welding method

Publications (1)

Publication Number Publication Date
JPS59202194A true JPS59202194A (en) 1984-11-15

Family

ID=13584675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58075730A Pending JPS59202194A (en) 1983-04-28 1983-04-28 Micro-welding method

Country Status (1)

Country Link
JP (1) JPS59202194A (en)

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