JPS59201494A - Transparent electromagnetic shielding member - Google Patents
Transparent electromagnetic shielding memberInfo
- Publication number
- JPS59201494A JPS59201494A JP58075919A JP7591983A JPS59201494A JP S59201494 A JPS59201494 A JP S59201494A JP 58075919 A JP58075919 A JP 58075919A JP 7591983 A JP7591983 A JP 7591983A JP S59201494 A JPS59201494 A JP S59201494A
- Authority
- JP
- Japan
- Prior art keywords
- electromagnetic shielding
- transparent
- thin film
- shielding member
- electromagnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Laminated Bodies (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
本発明は電磁波を遮蔽し、電波障害を防止する透明部材
に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a transparent member that shields electromagnetic waves and prevents radio interference.
本発明の透明電磁遮蔽部材は、窓ガラス、あるいは９４
１音電波を発する電子機器のケース等に用いることがで
きる。例えば、自動車用窓ガラスに本発明の透明電磁遮
蔽部材を用いると、自動車に搭載されている各種電子機
器から発する雑音電波を効率よく遮蔽することができ、
電波障害の防止に有用である。The transparent electromagnetic shielding member of the present invention can be used for window glass or 94
It can be used for cases of electronic devices that emit single-tone radio waves. For example, when the transparent electromagnetic shielding member of the present invention is used in a car window glass, it is possible to efficiently block noise radio waves emitted from various electronic devices installed in the car.
Useful for preventing radio wave interference.
従来、透明な電ｆｉｋｎ蔽部拐としては、ガラス、プラ
スチック等の透明な透光体表面に［Ｔ Ｏ（インジウム
オキサイド（ＪｎｚＯ３）と二酸化錫（Ｓｎ Ｏ２）と
の固溶体）等の透明導電性＠膜を形成したものが用いら
れていた。しかし、従来川いられていた上記透明な電磁
遮蔽薄膜においては電磁遮蔽の効果をあげるためには、
ガラス等の表面に形成する透明導電性薄膜の膜厚を厚く
しな【プればならなかった。しかし、膜厚を厚くすると
可視光線透過率が低下したり、機械的化学的耐久性が低
下したり、あるいは又、生産性が低下する等の欠点があ
った。Conventionally, transparent conductive materials such as [TO (a solid solution of indium oxide (JnzO3) and tin dioxide (SnO2))] have been used as transparent electrically conductive materials on the surface of transparent materials such as glass and plastic. A film-formed material was used. However, in order to improve the electromagnetic shielding effect of the above-mentioned transparent electromagnetic shielding thin film, which has been considered difficult in the past, it is necessary to
The thickness of the transparent conductive thin film formed on the surface of glass etc. had to be increased. However, when the film thickness is increased, there are drawbacks such as a decrease in visible light transmittance, a decrease in mechanical and chemical durability, and a decrease in productivity.
本発明は以上のような欠点に鑑み案出されたものであり
、可視光透過率を低下させることなく可視光よりも長波
長の電磁波を効率良く遮断することのできる透明電磁遮
蔽部材を提供することを目的とする。The present invention has been devised in view of the above drawbacks, and provides a transparent electromagnetic shielding member that can efficiently block electromagnetic waves with wavelengths longer than visible light without reducing visible light transmittance. The purpose is to
本発明の透明電磁遮蔽部材は、透明基板と、該透明基板
上に形成された電磁遮蔽薄膜とから成り、該電磁遮蔽薄
膜は、透明導電性薄膜と、該透明導電性薄膜とは異なる
電磁気的特性を有する材料の透明薄膜とが交互に積層さ
れて成るものであることを特徴どするものである。The transparent electromagnetic shielding member of the present invention includes a transparent substrate and an electromagnetic shielding thin film formed on the transparent substrate, and the electromagnetic shielding thin film includes a transparent conductive thin film and an electromagnetic shielding member different from that of the transparent conductive thin film. It is characterized in that transparent thin films made of a material having specific properties are alternately laminated.
電磁波を成る部材によって遮蔽部るためには、電磁波を
核酸る部材によって反射もしくは吸収すれば良い。即ち
、核酸る部材による電磁波の損失Ｓは、Ｓ＝Ｒ＋△とし
て表わされる。ここに、Ｒは反射による損失、Ａは吸収
による損失である。In order to shield electromagnetic waves with a member that contains electromagnetic waves, the electromagnetic waves may be reflected or absorbed by a member that contains nucleic acid. That is, the electromagnetic wave loss S due to the nucleic acid member is expressed as S=R+Δ. Here, R is a loss due to reflection, and A is a loss due to absorption.
透明導電性薄膜をガラス等の透光体の表面上に形成して
いた従来の電磁遮蔽部材では、上記Ａを増大さ「にうと
すると可視光透過率の低下、生産性低下、耐久性の低下
等のような欠点が現われ、又、上記Ｒは透明導電性ｉｓ
が単層として形成されているために、該薄膜の形成材料
によって定まる成る値以上とづることはできなかった。Conventional electromagnetic shielding members, in which a transparent conductive thin film is formed on the surface of a transparent material such as glass, suffer from a decrease in visible light transmittance, a decrease in productivity, and a decrease in durability when the above A is increased. In addition, the above R is transparent conductive.
Since the thin film is formed as a single layer, it was not possible to obtain a value higher than the value determined by the material forming the thin film.
これに対し、本発明は電磁遮蔽薄膜を多層構造と覆るこ
とによって電磁波の多重反則を生ぜしめ、上記Ｒの値を
増大させるとともに該多層構造にＪ：り上記Ａをも増大
させたものである。In contrast, in the present invention, by covering the electromagnetic shielding thin film with a multilayer structure, multiple disturbances of electromagnetic waves are caused, and the value of R is increased, and the value of A is also increased due to the multilayer structure. .
上記したように本発明の透明電磁遮蔽部材は透明基板と
、電磁遮蔽薄膜とから成る。As described above, the transparent electromagnetic shielding member of the present invention comprises a transparent substrate and an electromagnetic shielding thin film.
透明基板としては通常用いられている透明な材料、例え
ばガラス、プラスチック等を用いることができる。As the transparent substrate, commonly used transparent materials such as glass and plastic can be used.
電磁遮蔽薄膜は電磁波を反射（多重反射を含む）、ある
いは吸収づることによって電磁波の遮断効果をあげる機
能を有づる。電磁遮蔽薄膜は、透明導電性簿膜と、該透
明導電性薄膜とは電磁気的特性が異なる材料とによる多
層構造として形成される。透明導電性薄膜としては、Ｉ
ＴＯ（インジウムオキザイド（Ｉｎ ２０３）と二酸化
錫（Ｓｎ Ｏ２）との固溶体）等を用いることができる
。透明導電性薄膜と異なる電磁気的特性を有する材料と
しては、例えば電気抵抗率が異なる材料、誘電率もしく
は誘電損失の異なる材料、透磁率もしくは磁気損失の異
なる材料等を用いることができる。Electromagnetic shielding thin films have the function of increasing the electromagnetic wave blocking effect by reflecting (including multiple reflections) or absorbing electromagnetic waves. The electromagnetic shielding thin film is formed as a multilayer structure including a transparent conductive thin film and a material having different electromagnetic properties from that of the transparent conductive thin film. As a transparent conductive thin film, I
TO (solid solution of indium oxide (In203) and tin dioxide (SnO2)), etc. can be used. As the material having electromagnetic properties different from those of the transparent conductive thin film, for example, materials with different electric resistivity, materials with different permittivity or dielectric loss, materials with different magnetic permeability or magnetic loss, etc. can be used.
電磁波が１の媒質から他の媒質に入射する場合、境界面
において一般に反射及び透過が生じる。反射は上記１の
媒質と上記他の媒質中における電磁波の波動インピーダ
ンスが異なる場合に生ずる。When electromagnetic waves are incident from one medium to another, reflection and transmission generally occur at the interface. Reflection occurs when the wave impedance of the electromagnetic waves in the first medium and the other medium are different.
従って、境界面において電磁波の反射を生ぜしめたい場
合には、境界面の前後における電磁波の波動インピーダ
ンスを異ならせれば良い。電磁波の波動インピーダンス
は誘電率ε、透磁率μ、及び導電率にの関数として与え
られる。従って、上記１の媒質と、上記他の媒質との境
界面における電磁波の反射を生ぜしめたい場合には両媒
質中における誘電率ε、あるいは透磁率μ、あるいは導
電率にを異なるようにすれば良い。Therefore, if it is desired to cause reflection of electromagnetic waves at the boundary surface, it is sufficient to make the wave impedance of the electromagnetic waves different before and after the boundary surface. The wave impedance of electromagnetic waves is given as a function of dielectric constant ε, magnetic permeability μ, and conductivity. Therefore, if you want to cause reflection of electromagnetic waves at the interface between medium 1 and the other medium, you can make the permittivity ε, magnetic permeability μ, or conductivity different in both media. good.
本発明はかかる原理に基づくものである。又、本発明に
おいて電磁波の遮蔽効果を一層あげるためには電磁遮蔽
薄膜中における電磁波の吸収損失を大きくすればよい。The present invention is based on this principle. Further, in the present invention, in order to further improve the electromagnetic wave shielding effect, the electromagnetic wave absorption loss in the electromagnetic shielding thin film may be increased.
このためには、例えば誘電損失、磁気損失等を大きくす
れば良い。For this purpose, for example, dielectric loss, magnetic loss, etc. may be increased.
本発明の電磁遮蔽部材は透明であることを有づるため、
電磁遮蔽薄膜の膜厚は１０００Ａ〜数μｍの範囲とし可
視光の波長域の電磁波は透過するように構成する必要が
ある。又、本発明の透明電磁遮蔽部材では電磁遮蔽薄膜
を保護するために該電磁遮蔽薄膜の最表層に二酸化珪素
（ＳｉＯｚ）の薄膜を形成すると良い。この場合、二酸
化珪素の薄膜によって可視光の反射率を低減するという
副次的効果を期待することもできる。Since the electromagnetic shielding member of the present invention is transparent,
The thickness of the electromagnetic shielding thin film must be in the range of 1000 Å to several μm, and must be constructed so that electromagnetic waves in the visible wavelength range are transmitted. Further, in the transparent electromagnetic shielding member of the present invention, a thin film of silicon dioxide (SiOz) is preferably formed on the outermost layer of the electromagnetic shielding thin film in order to protect the electromagnetic shielding thin film. In this case, the secondary effect of reducing the reflectance of visible light by the silicon dioxide thin film can also be expected.
以上、述べた様に本発明の透明電磁遮蔽部材は可視光を
選択的に透過し、長波長の電磁波を遮断するバイパスフ
ィルターとして機能Ｊるものである。As described above, the transparent electromagnetic shielding member of the present invention functions as a bypass filter that selectively transmits visible light and blocks long wavelength electromagnetic waves.
本発明の透明電磁遮蔽部材によると、電子機器等から発
する雑音電波を効率良く遮断することができる。又電磁
遮蔽薄膜を多層構造としているために機械的、化学的耐
久性も優れ、又生産性も優れている。According to the transparent electromagnetic shielding member of the present invention, it is possible to efficiently block noise radio waves emitted from electronic devices and the like. Furthermore, since the electromagnetic shielding thin film has a multilayer structure, it has excellent mechanical and chemical durability and is also excellent in productivity.
以下、本発明の詳細な説明する。The present invention will be explained in detail below.
第１図は本発明の実施例である電磁遮蔽ガラスの断面を
模式的に示した図であり、第２図及び第３図は本実施例
の電磁遮蔽ガラスによる電磁遮蔽効果を示すグラフであ
る。第１図に示すように本実施例の電磁遮蔽ガラスはガ
ラス基板１０上に積層されたＩＴＯ膜２０と二酸化珪素
膜３０とから成る。ＩＴＯＩＩ＊２０は三層から成り、
それぞれの膜厚は３０００大である。二酸化珪素膜３０
はＩＴＯ膜２０に挾まれた位置にあり、その膜厚はそれ
ぞれ１５００人である。FIG. 1 is a diagram schematically showing a cross section of an electromagnetic shielding glass according to an embodiment of the present invention, and FIGS. 2 and 3 are graphs showing the electromagnetic shielding effect of the electromagnetic shielding glass according to this embodiment. . As shown in FIG. 1, the electromagnetic shielding glass of this embodiment consists of an ITO film 20 and a silicon dioxide film 30 laminated on a glass substrate 10. ITOII*20 consists of three layers,
The thickness of each film is 3000 mm. Silicon dioxide film 30
are located between the ITO films 20, each having a thickness of 1500 mm.
本実施例の電磁遮蔽ガラスはカラス基板１ｏ上にｆＴｏ
膜２０及び二酸化珪素膜３ｏをそれぞれＲＦマグネトロ
ンスパッタリング法によって成膜させることによって製
造した。成膜後３５０℃に９０分間保つ熱処理を施した
。The electromagnetic shielding glass of this example has fTo on the glass substrate 1o.
The film 20 and the silicon dioxide film 3o were each manufactured by forming them by RF magnetron sputtering. After film formation, heat treatment was performed at 350° C. for 90 minutes.
本実施例におりる電磁遮蔽薄膜の抵抗率は１゜５Ｘ１０
−３Ωｃｍ、可視光透過率は最高８７％、波長１５００
ｎｍにお（ブる透過率は２５％であった。The resistivity of the electromagnetic shielding thin film used in this example is 1°5×10
-3Ωcm, maximum visible light transmittance is 87%, wavelength 1500
The transmittance at nm was 25%.
比較のために従来の電１遮蔽部材である透明導電性薄膜
をカラス上に形成した電磁遮蔽部材を製造した。透明導
電性薄膜としてはＩＴＯを用い、その膜厚は９０００人
とした。ここに膜厚９．０００人は前記実施例のＩＴＯ
の総膜厚９０００人と等しくするためのものである。比
較８１（石の抵抗率は１．５Ｘ１０−３Ωｃｍ、可視光
透過ｔａ ハｚ４高８３％、又波長１５００ｎｍにおけ
る透過率は１１％であり、ＩＴＯＨｍ自体の特性は基本
的に前記実施例とほぼ等しいものであった。しかし、電
磁波の遮蔽効果に関しては、第２図及び第３図に示りＪ
、うに前記実施例の電磁遮蔽ガラスは従来の電磁遮蔽部
材に比較し、非常に優れていた。第２図、第３図にその
結果を示す。なお電磁遮蔽効果の測定は、シールド箱の
中において点火プラグを放電させ、これを雑音発生鯨と
し、前記シールド箱に設けた一開口面を電磁遮蔽板で塞
ぎ、オープンフィールドにおいて広帯域受信アンテナに
よって、前記点火プラグより放出された雑音電波の電界
強度を測ったものである。第２図は水平偏波を、又第３
図は垂直偏波の雑音電界強度をそれぞれ示す。図におい
て全開とはシールド箱の前記開口面を鉄板で覆った場合
、開放とは該開口面を開いた場合である。又、本実施例
とは、本実施例の電磁遮蔽ガラスを前記開口面に用いた
場合であり、比較サンプルとは従来の電ｆ１１ａ敵部材
で前記開口面を塞いだ場合を示す。第２図および第３図
より本実施例の電磁遮蔽ガラスは従来の電磁遮蔽部材に
比較して電磁遮蔽効果が優れていることがわかる。又、
前記したように可視光透過率も優れている。For comparison, an electromagnetic shielding member, which is a conventional electromagnetic shielding member, was manufactured by forming a transparent conductive thin film on a glass. ITO was used as the transparent conductive thin film, and its thickness was 9000. Here, the film thickness of 9,000 is the ITO of the above example.
This is to make the total film thickness equal to 9,000 people. Comparison 81 (The resistivity of the stone is 1.5 x 10-3 Ωcm, the visible light transmission is 83%, and the transmittance at a wavelength of 1500 nm is 11%, and the characteristics of ITOHm itself are basically almost the same as those in the example above. However, regarding the electromagnetic wave shielding effect, as shown in Figures 2 and 3,
The electromagnetic shielding glass of the above example was extremely superior to conventional electromagnetic shielding members. The results are shown in FIGS. 2 and 3. The electromagnetic shielding effect was measured by discharging a spark plug in a shield box, using it as a noise generating whale, blocking one opening provided in the shield box with an electromagnetic shielding plate, and using a broadband receiving antenna in the open field. This is a measurement of the electric field strength of the noise radio waves emitted from the spark plug. Figure 2 shows the horizontal polarization, and
The figures show the noise electric field strength of vertically polarized waves. In the figure, fully open means that the opening surface of the shield box is covered with a steel plate, and open means that the opening surface is opened. Further, the present example is a case where the electromagnetic shielding glass of the present example is used for the opening surface, and the comparative sample is a case where the opening surface is closed with a conventional electric f11a material. It can be seen from FIGS. 2 and 3 that the electromagnetic shielding glass of this example has a superior electromagnetic shielding effect compared to conventional electromagnetic shielding members. or,
As mentioned above, the visible light transmittance is also excellent.
以上、要するに本発明の透明電磁遮蔽部材は、透明基板
上に電磁遮蔽薄膜を積層するものであり、該電磁遮蔽薄
膜を透明導電性薄膜と、該透明導電性薄膜とは電磁気的
特性の異なる材料との多層構造としたことを特徴とする
ものである。In summary, the transparent electromagnetic shielding member of the present invention has an electromagnetic shielding thin film laminated on a transparent substrate. It is characterized by having a multilayer structure.
実施例に詳述したように、本発明の透明電磁遮蔽部材は
電磁遮蔽効果が優れ、又多層構造としているため機械的
化学的耐久性にも優れている。As described in detail in the Examples, the transparent electromagnetic shielding member of the present invention has an excellent electromagnetic shielding effect, and has a multilayer structure, so it also has excellent mechanical and chemical durability.
第１図は本発明の実施例である電磁遮蔽カラスの断面模
式図である。第２図および第３図は上記実施例及び従来
の電磁遮蔽部材の電磁遮蔽効果を比較づるグラフであり
、第２図は水平偏波の電界強度を表わし、第３図は垂直
偏波の電界強度を表わす。
特許出願人 トヨタ自動車株式会社
同 株式会社豊田中央研究所
代理人 弁理士 大川 宏
同 弁理士 藤谷 修
同 弁理士 丸山明夫
第３図
周３厭（ＭＨｚ）FIG. 1 is a schematic cross-sectional view of an electromagnetic shielding crow according to an embodiment of the present invention. Figures 2 and 3 are graphs comparing the electromagnetic shielding effects of the above embodiment and the conventional electromagnetic shielding member. Figure 2 shows the electric field strength of horizontally polarized waves, and Figure 3 shows the electric field strength of vertically polarized waves. Represents strength. Patent applicant Toyota Motor Corporation Toyota Central Research Institute Co., Ltd. Agent Patent attorney Hirodo Okawa Patent attorney Shudo Fujitani Patent attorney Akio Maruyama Figure 3 3cm (MHz)
Claims (6)
薄膜とから成り、 該電磁遮蔽薄膜は、透明導電性薄膜と、該透明導電性薄
膜とは異なる電磁気的特性を有する材料の透明薄朕とが
交互に積層されて成るものであることを特徴とづる透明
電磁遮蔽部材。(1) It consists of a transparent substrate and an electromagnetic shielding thin film formed on the transparent substrate, and the electromagnetic shielding thin film is made of a transparent conductive thin film and a transparent material having electromagnetic properties different from those of the transparent conductive thin film. 1. A transparent electromagnetic shielding member, characterized in that the transparent electromagnetic shielding member is formed by alternately laminating thin and thin layers.
の範囲第１項記載の透明電磁遮蔽部材。(2) The transparent electromagnetic shielding member according to claim 1, wherein the electromagnetic property is electrical resistivity.
る特許請求の範囲第１項記載の透明電磁遮蔽部材。(3) The transparent electromagnetic shielding member according to claim 1, wherein the electromagnetic property is a dielectric constant or a dielectric loss.
る特許請求の範囲第１項記載の透明電磁遮蔽部材。(4) The transparent electromagnetic shielding member according to claim 1, wherein the electromagnetic property is magnetic permeability or magnetic loss.
μｍの範囲である特許請求の範囲第１項記載の透明電磁
遮蔽部材。(5) The transparent electromagnetic shielding member according to claim 1, wherein the electromagnetic shielding thin film has a thickness in the range of 1000 to several μm.
ジウムオキサイド（ｉｎｚｏ３）と二酸化錫（８１１０
２＞との固溶体）である特許請求の範囲第１項記載の透
明電磁遮蔽部材。(6) The transparent conductive thin film is made of ITO (indium oxide (inzo3)) and tin dioxide (8110
The transparent electromagnetic shielding member according to claim 1, which is a solid solution with 2>.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58075919A JPS59201494A (en) | 1983-04-28 | 1983-04-28 | Transparent electromagnetic shielding member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58075919A JPS59201494A (en) | 1983-04-28 | 1983-04-28 | Transparent electromagnetic shielding member |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59201494A true JPS59201494A (en) | 1984-11-15 |
| JPH0563960B2 JPH0563960B2 (en) | 1993-09-13 |
Family
ID=13590201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58075919A Granted JPS59201494A (en) | 1983-04-28 | 1983-04-28 | Transparent electromagnetic shielding member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59201494A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59191795U (en) * | 1983-06-07 | 1984-12-19 | 帝人株式会社 | Transparent electromagnetic shield plate |
| JPS62147799A (en) * | 1985-12-23 | 1987-07-01 | 東レ株式会社 | Light transmitting plate with electromagnetic wave shieldingproperties |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5215580A (en) * | 1975-07-26 | 1977-02-05 | Matsushita Electric Ind Co Ltd | Transparent adherent film |
| JPS57154898A (en) * | 1981-02-23 | 1982-09-24 | Optical Coating Laboratory Inc | Transparent electromagnetic shield and method of producing same |
| JPS5867441A (en) * | 1981-10-19 | 1983-04-22 | 帝人株式会社 | Laminate |
-
1983
- 1983-04-28 JP JP58075919A patent/JPS59201494A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5215580A (en) * | 1975-07-26 | 1977-02-05 | Matsushita Electric Ind Co Ltd | Transparent adherent film |
| JPS57154898A (en) * | 1981-02-23 | 1982-09-24 | Optical Coating Laboratory Inc | Transparent electromagnetic shield and method of producing same |
| JPS5867441A (en) * | 1981-10-19 | 1983-04-22 | 帝人株式会社 | Laminate |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59191795U (en) * | 1983-06-07 | 1984-12-19 | 帝人株式会社 | Transparent electromagnetic shield plate |
| JPH0231837Y2 (en) * | 1983-06-07 | 1990-08-28 | ||
| JPS62147799A (en) * | 1985-12-23 | 1987-07-01 | 東レ株式会社 | Light transmitting plate with electromagnetic wave shieldingproperties |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0563960B2 (en) | 1993-09-13 |
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