JPS5919386A - Gas circulation type gas laser - Google Patents

Abstract

PURPOSE:To improve the energy efficiency by disposing an evaporator of diffusion absorption type cooler which uses as a heat source a laser gas passed through a discharging unit in a circulation passage of the gas laser. CONSTITUTION:Laser gas sealed on a housing 1 is fed under pressure by blowers 2, 3 in a direction designated by an arrow, and discharging energy is received between discharging units 7 and 8 to perform laser oscillation. High temperature laser gas which is passed through the discharging units 7, 8 heats coolant gas generators 9, 10, and generated high temperature and high pressure gas is fed to a separator 12. Coolant gas from the separator 12 is fed through a condenser 14 to evaporators 4a, 4b, 4c, thereby cooling the laser gas. Since the cooler in which the high temperature laser gas is used as a heat source is used in this manner, the energy efficiency is improved.

Description

[Detailed description of the invention] The present invention relates to a gas circulation type gas laser device.

A gas circulation type gas laser device is configured to apply discharge energy to a laser gas in a discharge section to cause laser oscillation, and the laser gas that has completely passed through the discharge section is cooled by a heat exchanger and then transferred to the discharge section again. The output P is expressed as follows.

P OCT-'' where T is the temperature (absolute temperature; K) of the laser gas just before it is transferred to the discharge section.

As is clear from the above equation, in order to increase the efficiency of laser oscillation in the gas circulation type gas laser device, it is sufficient to lower the temperature T. Therefore, it is possible to use a heat exchanger with a large amount of heat exchange as the above heat exchanger.
This increases the power consumed by the heat exchanger, resulting in a disadvantage that the energy efficiency of the entire device decreases.

In view of this situation, an object of the present invention is to provide a gas circulation type gas laser device that can improve laser output without reducing the energy efficiency of the device as a whole.

In order to achieve this object, the present invention uses the thermal energy of the laser gas immediately after passing through the discharge section to cool the laser gas.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a conceptual diagram showing an embodiment of a gas circulation type gas laser device according to the present invention. In the figure, a housing 1 is filled with laser gas such as carbon dioxide gas, and the laser gas is forced in the direction of the arrow by blowers 2 and 3 provided at the bottom of the housing 1.

The vaporizers 4a, 4b, and 4c constitute the diffusion absorption type cooler 100 shown in FIG.

The guide plates 5 and 6 are for guiding the laser gas to the discharge electrodes 7 and 8, and are disposed facing each other in the vertical direction of the housing 1.

At the bottom of the guide plates 5 and 6, the refrigerant gas generators 9 and 10 of the diffusion absorption type cooler 100, which are formed by reciprocally bending tubes in the depth direction of the housing 1, are provided.

Figure 2 shows the diffusion absorption type cooler 1 applied to this embodiment.
00 is a conceptual diagram showing an example. Note that the configuration of this cooler is known. In the figure, a coolant solution made by dissolving a refrigerant such as ammonia gas in a solvent such as water is injected into the generator 9.10.

The laser gas sent between the discharge electrodes 7 and 8 by the blower 2.3 causes laser oscillation due to the discharge energy of the electrodes, and is simultaneously heated and becomes a high-temperature gas.

Therefore, the generator 9, 1o1i-h discharge unit 7
The refrigerant solution is heated by the high temperature laser gas that has passed through the temperature of 8°C and boils. As a result, high temperature and high pressure ammonia gas and water vapor are generated, and these ammonia gas and water vapor are led to the separator 12 via the conduit 11.

The separator 12 is for completely liquefying the water vapor and separating it from ammonia gas, and the water vapor is led to a condenser 14 through the entire separated ammonia gas method conduit 13.

The condenser 14 has a configuration in which a plurality of cooling blades are provided on a tube bent back and forth in the depth direction of the housing 1, and is disposed on the outer upper part of the housing 1.

The ammonia gas is cooled and liquefied in the condenser 14,
This liquefied ammonia gas is transferred to the capillary tube 15.
After being depressurized through i, it is introduced into the vaporizers 4a, 4b and 4c.

In the vaporizers 4m, 4b and 4c, the liquefied ammonia gas absorbs the heat of vaporization from the laser gas in contact with the vaporizers 4a, 4b and 4c and is vaporized. Therefore, the laser gas pumped above the housing 1 after heating the generators 9 and 10 is transferred to the vaporizers 4m and 4b.
and 4c, the guide plate 5.6
and is again sent to the discharge electrode 7.8.

After passing through the vaporizers 4a, 4b and 4c'z, the ammonia gas is led to the absorber 17 via the liquid receiving tank 16i. The water separated in the separator 12 flows into the absorber 17 via a conduit 18, so that in the absorber 17 the ammonia gas is added to the water by 8%.
do. A refrigerant solution is thereby stored in the receiving tank 16, and this refrigerant solution is supplied to the generator 9.10.

Then, the refrigerant liquid supplied to the generators 9 and 10 repeats the above cooling action again.

In addition, for setting the ammonia gas flow path as described above, a gas having a pressure sufficient to balance the pressure difference between the high pressure section, that is, the condenser 14, and the low pressure section, that is, the vaporizers 4m, 4b, and 46, such as hydrogen gas, is used. However, the above vaporizer 4m
, 4b and 4C, and connects the absorber 17 and the vaporizers 4m+4b and 4c, a pipe line 19 serves to circulate the hydrogen gas.

In the embodiment described above, the discharge electrode 7.8 is formed hollow and is used as part of the generator 9.10. In other words, part of the generators 9, 10 is used as the discharge electrode 7.8. In this way, the heating efficiency of the generators 9.10 can be further increased.

Furthermore, in the embodiments described above, the laser gas is cooled only by the diffusion absorption type cooler, but for example,
The present invention can also be practiced in an embodiment in which only the vaporizer 41 of the diffusion absorption type cooler is provided, and conventional heat exchangers are provided at the positions of the other vaporizers 4b and 4e.

As explained above, in the present invention, the high temperature laser gas after passing through the discharge electrode is used as the heat source of the generator in the diffusion absorption type cooler, and the laser gas transferred to the discharge electrode is cooled by the diffusion absorption type cooler. Therefore, energy for cooling the discharge electrode is not required and the laser gas can be efficiently cooled. Therefore, the laser gas cooling efficiency is higher than that of the conventional device, which has the advantage that the efficiency of the entire device can be completely improved.

[Brief explanation of drawings]

FIG. 1 is a conceptual diagram illustrating an embodiment of a gas circulation type gas laser device according to the present invention, and FIG. 2 is a conceptual diagram illustrating a diffusion absorption type cooler applied to the device shown in FIG. 1. 4m, 4b, 40-vaporizer, 9, 10...generator,
100... Diffusion absorption type cooler.

Claims (1)

[Claims] In a gas circulation type gas laser device in which the laser gas that has passed through the discharge section is cooled by a heat exchanger and then transferred to the discharge section again, a diffusion absorption type cooler is provided, and the laser gas that has passed through the discharge section is cooled by the diffusion absorption type cooler. A gas circulation type gas laser device, which is used as a heat source for a generator, and a vaporizer of the diffusion absorption type cooler is disposed in a circulation path of the laser gas.