JPS59188511A - 光学測定装置 - Google Patents

光学測定装置

Info

Publication number
JPS59188511A
JPS59188511A JP58062444A JP6244483A JPS59188511A JP S59188511 A JPS59188511 A JP S59188511A JP 58062444 A JP58062444 A JP 58062444A JP 6244483 A JP6244483 A JP 6244483A JP S59188511 A JPS59188511 A JP S59188511A
Authority
JP
Japan
Prior art keywords
light
measured
objective lens
measurement
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58062444A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0326765B2 (cs
Inventor
Keiichi Yoshizumi
恵一 吉住
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58062444A priority Critical patent/JPS59188511A/ja
Publication of JPS59188511A publication Critical patent/JPS59188511A/ja
Publication of JPH0326765B2 publication Critical patent/JPH0326765B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP58062444A 1983-04-08 1983-04-08 光学測定装置 Granted JPS59188511A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58062444A JPS59188511A (ja) 1983-04-08 1983-04-08 光学測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58062444A JPS59188511A (ja) 1983-04-08 1983-04-08 光学測定装置

Publications (2)

Publication Number Publication Date
JPS59188511A true JPS59188511A (ja) 1984-10-25
JPH0326765B2 JPH0326765B2 (cs) 1991-04-11

Family

ID=13200381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58062444A Granted JPS59188511A (ja) 1983-04-08 1983-04-08 光学測定装置

Country Status (1)

Country Link
JP (1) JPS59188511A (cs)

Also Published As

Publication number Publication date
JPH0326765B2 (cs) 1991-04-11

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