JPS59184773A - Manufacture of silicon carbide sintered body - Google Patents
Manufacture of silicon carbide sintered bodyInfo
- Publication number
- JPS59184773A JPS59184773A JP58059096A JP5909683A JPS59184773A JP S59184773 A JPS59184773 A JP S59184773A JP 58059096 A JP58059096 A JP 58059096A JP 5909683 A JP5909683 A JP 5909683A JP S59184773 A JPS59184773 A JP S59184773A
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- sintered body
- molding
- carbide sintered
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 20
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000000843 powder Substances 0.000 claims description 15
- 239000011230 binding agent Substances 0.000 claims description 12
- 238000000465 moulding Methods 0.000 claims description 12
- 239000002994 raw material Substances 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 6
- 238000005245 sintering Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 7
- 239000007864 aqueous solution Substances 0.000 description 5
- 238000010304 firing Methods 0.000 description 5
- 238000005304 joining Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 229920000609 methyl cellulose Polymers 0.000 description 3
- 239000001923 methylcellulose Substances 0.000 description 3
- 235000010981 methylcellulose Nutrition 0.000 description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 238000007582 slurry-cast process Methods 0.000 description 2
- 229910052580 B4C Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 238000001272 pressureless sintering Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000001694 spray drying Methods 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
本発明は金型成形した複数個の成形体を接合し焼成して
なる主に複雑な形状を有する炭化ケイ素焼結体の製造方
法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing a silicon carbide sintered body mainly having a complicated shape, which is obtained by bonding and firing a plurality of molded bodies.
通常炭化ケイ素焼結体は炭化ケイ素原料粉末を金型成形
、ラバープレス成形、泥しよう鋳込み成形、射出成形な
どの成形方法を用いて所定形状に成形し、必要な場合に
は切削加工を行った後乾燥し焼成して製造される。そし
て形状が複雑な焼結体の場合には泥しよう鋳込み成形法
、射出成形法などを用いる必要があるが、この場合には
成形体に成形時に添加した多量の蒸発成分を含有するた
めに成形体が軟弱でLJI)取扱いが難しく、また乾燥
工程の長期化や寸法精度の低下などの欠点があり好まし
くなかった。またラバープレス成形法の場合には成形後
成形体の加工が必要で面倒である。Usually, silicon carbide sintered bodies are made by molding silicon carbide raw powder into a predetermined shape using molding methods such as die molding, rubber press molding, slurry casting molding, and injection molding, followed by cutting when necessary. It is manufactured by post-drying and firing. In the case of a sintered body with a complicated shape, it is necessary to use a slurry casting method, an injection molding method, etc.; It is difficult to handle due to its weak body (LJI), and has disadvantages such as a prolonged drying process and a decrease in dimensional accuracy, which is not desirable. Further, in the case of the rubber press molding method, processing of the molded body after molding is required, which is troublesome.
これらに対し金型成形法を用いる場合には蒸発成分が少
ないため成形体の強度が比較的太きくなり成形体の取扱
いが容易で好ましい方法ではめるが。On the other hand, when a molding method is used, the strength of the molded product is relatively large because there are few evaporated components, and the molded product is easy to handle, which is a preferable method.
現在のところ円筒状、板状などの比較的単純な形状のも
のしか成形ができない欠点がおる。Currently, there is a drawback that only relatively simple shapes such as cylindrical and plate shapes can be formed.
本発明は上記の問題点を解決すべくなされたものでメジ
、その目的とするところは複雑な形状の炭化ケイ素焼結
体の容易な製造方法を提供することにある。The present invention has been made to solve the above problems, and its main purpose is to provide an easy method for manufacturing a silicon carbide sintered body having a complicated shape.
本発明は炭化ケイ素原料粉末を金型により成形した成形
体の複数個相互を有機物あるいは有機物と上記原料粉末
からなる接合剤を塗付後接合し。In the present invention, a plurality of molded bodies formed by molding silicon carbide raw material powder using a mold are bonded together after applying an organic substance or a bonding agent consisting of an organic substance and the above-mentioned raw material powder.
次いで焼成する炭化ケイ素焼結体の製造方法に関する。The present invention relates to a method for producing a silicon carbide sintered body which is then fired.
本発明における成形体相互を接合するための結合剤とし
ての有機物としては接着力を有するものであればよく制
限はないが、焼結体内に異物を混入しない組成のものが
好ましく2通常有機質バインダーとして知られているP
VA (ポリビニールアルコール)、MC(メチルセル
ローズ)、CMC(カルボキシルメチルセルローズ)な
どがlされる。The organic material used as the binder for joining the molded bodies in the present invention is not limited as long as it has adhesive strength, but it is preferable to use a composition that does not mix foreign matter into the sintered body.2 Usually, as an organic binder, known P
VA (polyvinyl alcohol), MC (methyl cellulose), CMC (carboxyl methyl cellulose), etc. are used.
成形体相互の接合は上記のような有機物単体(通常は水
溶液として使用される)でも可能であり。It is also possible to bond the molded bodies together using a single organic substance (usually used as an aqueous solution) as described above.
焼成によシ接着強度を満足する焼結体をうろことはでき
るが、上記有機物にさらに成形体に使用した炭化ケイ素
の原料粉を適当量混合した結合剤の使用は焼結体の接着
強度を多少増大することができ好ましい。Although it is possible to obtain a sintered body that satisfies the adhesive strength by firing, the use of a binder made by mixing an appropriate amount of the raw material powder of silicon carbide used in the molded body with the above-mentioned organic substance will reduce the adhesive strength of the sintered body. It is preferable that it can be increased to some extent.
なお、成形体相互の接合に際しては接合面に上記の結合
剤を適当量塗付し5に97cm2程度の圧力で圧着すれ
ば強固に接合することができて好ましい。In addition, when joining the molded bodies to each other, it is preferable to apply an appropriate amount of the above-mentioned binder to the joint surfaces and press the molded bodies together with a pressure of about 97 cm<2> to ensure a strong joint.
本発明における炭化ケイ素原料粉末とはα型。The silicon carbide raw material powder in the present invention is α type.
β型等の炭化ケイ素微粉末に焼結助剤として作用する炭
素、ホウ素、ベリリウム、アルミニウムもしくはこれら
の化合物の粉末を加えた混合物またはこの混合物を成形
し易いように造粒した粉末のことでロシ、公知の手段に
より作成する。成形は例えば表面を硬化処理した金型を
使用する公知の圧縮加圧法による。接合後の成形体は、
公知のいわゆる無加圧焼結法により、真空中又は非酸化
性雰囲気中で2000〜2300℃の温度で焼成する。A mixture of β-type silicon carbide fine powder and powders of carbon, boron, beryllium, aluminum, or these compounds that act as sintering aids, or a powder made by granulating this mixture to make it easier to mold. , created by known means. The molding is performed, for example, by a known compression method using a mold whose surface has been hardened. The molded body after joining is
Sintering is performed at a temperature of 2,000 to 2,300° C. in vacuum or in a non-oxidizing atmosphere by a known so-called pressureless sintering method.
以下実施例により本発明を説明する。The present invention will be explained below with reference to Examples.
平均粒径が0.5μmのαSiC粉99粉量9重量部。9 parts by weight of αSiC powder 99 powder with an average particle size of 0.5 μm.
径5μmのB、C(炭化ホウ素)粉1重量部。1 part by weight of B, C (boron carbide) powder with a diameter of 5 μm.
ノボラック型フェノールレジン6重量部を混合後0.5
重量%のPVA水溶液150!量部を加えてスラリーと
し噴霧乾燥し造粒してなる炭化ケイ素の原料粉を別々の
金型(図示せず)で1000Kg/Cm2の圧力で圧縮
し、第1図に示す箱形の成形体1および第2図に示す角
形ブロック成形体2を形成した。0.5 after mixing 6 parts by weight of novolac type phenol resin
% by weight of PVA aqueous solution 150! The raw material powder of silicon carbide, which is obtained by adding a certain amount to a slurry, spray-drying it, and granulating it, is compressed with a pressure of 1000 kg/cm2 in separate molds (not shown) to form a box-shaped molded body as shown in Fig. 1. A rectangular block molded body 2 shown in FIGS. 1 and 2 was formed.
次にPVAまたはMCを10i量チ含む水溶液を作り、
これらの水溶液単体の結合剤3およびこれら水溶液に対
し30,50,70.90重量%の上記炭化ケイ素の原
料粉を含有はせた結合剤3を第1図に示す箱形成形体の
側面1aに塗付しこの塗付面上に第2図に示す角形フゞ
ロック成形体2のl1111面2aを4 Kg 7cm
2 (D 圧力で圧ML第3 図VC示f接合体4ff
:形成した。次に上記接合体4をバッチ炉に入れ1トー
ル以下の真空中で250’C/hの温度上昇で1200
’Cまで焼成し、さらにアルゴンガス雰囲気中で21
00’Cまで焼成し炭化ケイ素焼結体をえた。Next, make an aqueous solution containing 10i of PVA or MC,
These aqueous solutions of the binder 3 alone and the binder 3 containing the silicon carbide raw material powder in an amount of 30, 50, and 70.90% by weight relative to these aqueous solutions were applied to the side surface 1a of the box-forming body shown in FIG. On the coated surface, apply 4 kg 7 cm of l1111 side 2a of the rectangular block molded body 2 shown in Fig. 2.
2 (D Pressure ML Figure 3 VC shown f joined body 4ff
: Formed. Next, the above-mentioned joined body 4 was placed in a batch furnace and heated to 1200°C with a temperature increase of 250'C/h in a vacuum of 1 Torr or less.
'C, then fired in an argon gas atmosphere to 21
A silicon carbide sintered body was obtained by firing to 00'C.
各種結合剤を用いた場合の焼結体における接合面の曲げ
強度を第1表に示した。Table 1 shows the bending strength of the bonded surfaces of the sintered bodies using various binders.
第1表
第1表に示される曲げ強度の値はすべて実用上必要な値
でるる25にり7m2を上回っており、したがって何れ
の結合剤を用いてもよいが、原料粉含有量が70.9Q
重量襲の場合には曲げ強度が低下する傾向がみられる。Table 1 All of the values of bending strength shown in Table 1 exceed the practically necessary value of Ruru 25, 7 m2, so any binder may be used, but the raw material powder content is 70 m2. 9Q
In the case of heavy loads, there is a tendency for the bending strength to decrease.
これは上記結合剤は他の場合よシも粒状となりやすく、
このため接合面に一様に塗布することがやや困難となる
ためと考えられる。This is because the above-mentioned binders tend to become granular than in other cases.
This is thought to be because it is somewhat difficult to uniformly coat the bonding surface.
このように本発明によると、金型成形による複数個の炭
化ケイ素成形体相互を結合剤で接合し焼成することによ
り接合強度の十分な炭化ケイ素焼結体を形成することが
できるので、複雑な形状を有ししかも寸法精度の良好な
炭化ケイ素焼結体を容易にかつ安価に製造しうるなどの
効果がある。As described above, according to the present invention, a silicon carbide sintered body with sufficient bonding strength can be formed by bonding a plurality of silicon carbide molded bodies by molding with a binder and firing them. The present invention has the advantage that a silicon carbide sintered body having a good shape and good dimensional accuracy can be manufactured easily and at low cost.
第1図は炭化ケイ素の箱形成形体の斜視図、第2図は炭
化ケイ素の角形ブロック成形体の斜視図。
第3図は第1図と第2図の成形体を接合した接合体の斜
視図でるる。
符号の説明
1・・・箱形成形体 1a・・・側面2・・・
角形ブロック成形体 2a・・・側面3・・・結合剤
荀3 図FIG. 1 is a perspective view of a silicon carbide box-shaped body, and FIG. 2 is a perspective view of a silicon carbide square block molded body. FIG. 3 is a perspective view of a joined body obtained by joining the molded bodies of FIGS. 1 and 2. Explanation of symbols 1...Box-forming body 1a...Side surface 2...
Square block molded body 2a...Side surface 3...Binder 3 Figure
Claims (1)
複数個相互を有機物あるいは有機物と上記原料粉末から
なる結合剤を塗付後接合し9次いで焼成することを特徴
とする炭化ケイ素焼結体の製造方法。1. Silicon carbide sintering, characterized in that a plurality of molded bodies formed by molding silicon carbide raw powder in a mold are bonded together after applying an organic substance or a binder consisting of an organic substance and the above-mentioned raw material powder, and then sintered. Method for producing solids.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58059096A JPS59184773A (en) | 1983-04-04 | 1983-04-04 | Manufacture of silicon carbide sintered body |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58059096A JPS59184773A (en) | 1983-04-04 | 1983-04-04 | Manufacture of silicon carbide sintered body |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS59184773A true JPS59184773A (en) | 1984-10-20 |
Family
ID=13103455
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58059096A Pending JPS59184773A (en) | 1983-04-04 | 1983-04-04 | Manufacture of silicon carbide sintered body |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59184773A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6472971A (en) * | 1987-09-16 | 1989-03-17 | Tokai Konetsu Kogyo Kk | Method for joining sintered silicon carbide body |
JPH01130522A (en) * | 1987-11-17 | 1989-05-23 | Toshiba Ceramics Co Ltd | Manufacture of wafer boat |
JPH035381A (en) * | 1989-05-31 | 1991-01-11 | Ibiden Co Ltd | Adhesive for ceramic blank |
CN109020551A (en) * | 2018-08-28 | 2018-12-18 | 辽阳宏图碳化物有限公司 | The technique for producing high-density silicon carbide heater |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5650175A (en) * | 1979-09-26 | 1981-05-07 | Ngk Spark Plug Co | Manufacture of ceramic axial flow turbine rotor |
-
1983
- 1983-04-04 JP JP58059096A patent/JPS59184773A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5650175A (en) * | 1979-09-26 | 1981-05-07 | Ngk Spark Plug Co | Manufacture of ceramic axial flow turbine rotor |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6472971A (en) * | 1987-09-16 | 1989-03-17 | Tokai Konetsu Kogyo Kk | Method for joining sintered silicon carbide body |
JPH01130522A (en) * | 1987-11-17 | 1989-05-23 | Toshiba Ceramics Co Ltd | Manufacture of wafer boat |
JPH035381A (en) * | 1989-05-31 | 1991-01-11 | Ibiden Co Ltd | Adhesive for ceramic blank |
CN109020551A (en) * | 2018-08-28 | 2018-12-18 | 辽阳宏图碳化物有限公司 | The technique for producing high-density silicon carbide heater |
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