JPS59182216A - 多結晶シリコンウエハの製造用皿 - Google Patents
多結晶シリコンウエハの製造用皿Info
- Publication number
- JPS59182216A JPS59182216A JP5445483A JP5445483A JPS59182216A JP S59182216 A JPS59182216 A JP S59182216A JP 5445483 A JP5445483 A JP 5445483A JP 5445483 A JP5445483 A JP 5445483A JP S59182216 A JPS59182216 A JP S59182216A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- melt
- turntable
- forming
- dish
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 15
- 239000010703 silicon Substances 0.000 title claims abstract description 15
- 239000000155 melt Substances 0.000 claims abstract description 27
- 239000000463 material Substances 0.000 claims abstract description 11
- 235000012431 wafers Nutrition 0.000 claims description 60
- 238000004519 manufacturing process Methods 0.000 claims description 30
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 8
- 241000257465 Echinoidea Species 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 22
- 230000005484 gravity Effects 0.000 abstract description 4
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 238000002844 melting Methods 0.000 abstract description 4
- 230000008018 melting Effects 0.000 abstract description 4
- 239000010409 thin film Substances 0.000 abstract 2
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 238000005266 casting Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005119 centrifugation Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 229940095676 wafer product Drugs 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/044—Internal reflections (echoes), e.g. on walls or defects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/048—Transmission, i.e. analysed material between transmitter and receiver
Landscapes
- Silicon Compounds (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5445483A JPS59182216A (ja) | 1983-03-30 | 1983-03-30 | 多結晶シリコンウエハの製造用皿 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5445483A JPS59182216A (ja) | 1983-03-30 | 1983-03-30 | 多結晶シリコンウエハの製造用皿 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59182216A true JPS59182216A (ja) | 1984-10-17 |
| JPH0314766B2 JPH0314766B2 (enrdf_load_stackoverflow) | 1991-02-27 |
Family
ID=12971124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5445483A Granted JPS59182216A (ja) | 1983-03-30 | 1983-03-30 | 多結晶シリコンウエハの製造用皿 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59182216A (enrdf_load_stackoverflow) |
-
1983
- 1983-03-30 JP JP5445483A patent/JPS59182216A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0314766B2 (enrdf_load_stackoverflow) | 1991-02-27 |