JPS59179397U - Ｘ−ｙ送り装置 - Google Patents

Ｘ−ｙ送り装置

Info

Publication number
JPS59179397U
JPS59179397U JP7321283U JP7321283U JPS59179397U JP S59179397 U JPS59179397 U JP S59179397U JP 7321283 U JP7321283 U JP 7321283U JP 7321283 U JP7321283 U JP 7321283U JP S59179397 U JPS59179397 U JP S59179397U
Authority
JP
Japan
Prior art keywords
stators
feeder
stator
movable element
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7321283U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0350477Y2 (OSRAM
Inventor
健 岸本
森　則人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7321283U priority Critical patent/JPS59179397U/ja
Publication of JPS59179397U publication Critical patent/JPS59179397U/ja
Application granted granted Critical
Publication of JPH0350477Y2 publication Critical patent/JPH0350477Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Units (AREA)
JP7321283U 1983-05-17 1983-05-17 Ｘ−ｙ送り装置 Granted JPS59179397U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7321283U JPS59179397U (ja) 1983-05-17 1983-05-17 Ｘ−ｙ送り装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7321283U JPS59179397U (ja) 1983-05-17 1983-05-17 Ｘ−ｙ送り装置

Publications (2)

Publication Number Publication Date
JPS59179397U true JPS59179397U (ja) 1984-11-30
JPH0350477Y2 JPH0350477Y2 (OSRAM) 1991-10-28

Family

ID=30203341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7321283U Granted JPS59179397U (ja) 1983-05-17 1983-05-17 Ｘ−ｙ送り装置

Country Status (1)

Country Link
JP (1) JPS59179397U (OSRAM)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5397859A (en) * 1977-02-08 1978-08-26 Fujitsu Ltd Plane positioning shifter

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5397859A (en) * 1977-02-08 1978-08-26 Fujitsu Ltd Plane positioning shifter

Also Published As

Publication number Publication date
JPH0350477Y2 (OSRAM) 1991-10-28

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