JPS59178010A - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JPS59178010A JPS59178010A JP5340883A JP5340883A JPS59178010A JP S59178010 A JPS59178010 A JP S59178010A JP 5340883 A JP5340883 A JP 5340883A JP 5340883 A JP5340883 A JP 5340883A JP S59178010 A JPS59178010 A JP S59178010A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- vibrating
- vibrator
- vibrating element
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims abstract description 9
- 229910012463 LiTaO3 Inorganic materials 0.000 abstract description 5
- 230000001629 suppression Effects 0.000 abstract description 2
- 230000005855 radiation Effects 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
- H03H9/02031—Characteristics of piezoelectric layers, e.g. cutting angles consisting of ceramic
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
発明の技術分野
本発明は、Ｌ ｉ Ｔ ａ Ｏ３からなる圧電単結晶を
用いたストリップ型圧電振動子の改良に関する。DETAILED DESCRIPTION OF THE INVENTION Technical Field of the Invention The present invention relates to an improvement in a strip-type piezoelectric vibrator using a piezoelectric single crystal made of L i T a O3.
従来技術と問題点
一般に、ＬｉＴａＯ３からなる圧電単結晶は、その電気
−機械結合係数が大きいことから、水晶では不可能とさ
れていオこ分野への適用をめざし多くの開発、研究かな
されている。Conventional Technology and Problems In general, piezoelectric single crystals made of LiTaO3 have a large electro-mechanical coupling coefficient, so it is considered impossible to do so with quartz crystals, and much development and research has been carried out with the aim of applying them to the oscilloscope field. .
例えば、温度特性が比較的良好であることに基づいてな
された実用化に関する報告く飯田等「放送技術」昭和４
９年６月号 ４４９、或いは、宇野［通研月報Ｊｖｏ１
２４．Ｎｏ、７． ］９７５） 、結晶方位の選択
に依り頂点温度を室温とすることを可能にした報告（宇
野「超音波研究会資料」１１ｓ７６−８ １．９７６
５）、振動子をストリップ化することに依り単一モード
の発振を得ると同時に素子の小型化を図る報告（中村等
「超音波研究会資料Ｊ ｕｓ６９−２１ １９６９−１
０）等か知られている。For example, there is a report on practical application based on relatively good temperature characteristics, ``Broadcasting Technology'' by Iida et al.
June 9th issue 449, or Uno [Tsuken monthly report Jvo1
24. No, 7. ]975), a report that made it possible to set the apex temperature to room temperature by selecting the crystal orientation (Uno "Ultrasonic Study Group Materials" 11s76-8 1.976
5), a report on obtaining single mode oscillation and at the same time miniaturizing the element by stripping the transducer (Nakamura et al., "Ultrasonic Research Group Materials J us69-21 1969-1
0) etc. is known.
然し乍ら、ストリップ型圧電振動子に於けるスプリアス
の抑制及びＱの向上に関しては未だ充分な解明がなされ
ていないし、また、小型化に関しても充分とはいい難い
状態にある。However, the suppression of spurious and the improvement of Q in strip-type piezoelectric vibrators have not yet been fully elucidated, and miniaturization is still far from satisfactory.
発明の目的
本発明は、Ｌ ｉ Ｔ ａ ０．１からなる圧電単結晶
を用いたストリップ型圧電振動子に於いて、その１．り
動素板の寸法を通期に選択することに依り、スプリアス
の抑制及びＱの向上を可能にすると共に小型化を回るも
のである。OBJECTS OF THE INVENTION The present invention provides a strip type piezoelectric vibrator using a piezoelectric single crystal having L i T a of 0.1. By selecting the dimensions of the moving base plate throughout the period, it is possible to suppress spurious waves and improve the Q factor, as well as to achieve miniaturization.
発明の構成 第１図はこの種の振動子を表わす要部斜面図である。Composition of the invention FIG. 1 is a perspective view of the main parts of this type of vibrator.
図に於いて、１はＬ ｉ Ｔ ａ Ｏ３からなる振動素
板、２は振動素板１の表裏に例えは金（Ａｕ）の蒸着膜
を形成してそれをパクーニングして作製した電極、３は
例えは８１（Ａｇ）ペーストを用いて印刷法に依り形成
した端子電極、ｌ−１は振動素板１の厚み、Ｌは振動素
板１の長さ、Ｗば振動素板１の幅をそれぞれ示している
。尚、この振動子の長手方向は、結晶のＹ軸から時計方
向に４８”＋４゜の範囲にあるようにカットすることを
前提にしてあり、このようにすることがスプリアス抑制
及びＱの向上に不可欠である。In the figure, 1 is a vibrating plate made of LiTaO3, 2 is an electrode made by forming, for example, a vapor deposited film of gold (Au) on the front and back of the vibrating plate 1 and paqueuning it, and 3 For example, is a terminal electrode formed by a printing method using 81 (Ag) paste, l-1 is the thickness of the vibrating blank plate 1, L is the length of the vibrating blank plate 1, and W is the width of the vibrating blank plate 1. are shown respectively. It is assumed that the longitudinal direction of this oscillator is cut within a range of 48" + 4 degrees clockwise from the Y axis of the crystal, and doing so will suppress spurious and improve Q. It is essential.
この振動子では、電極２が振動素板１の幅方向全体に存
在し、その電極２か形成されている振動素板１の厚み振
動を主振動として用いるようにするものであり、このよ
うな振動子をストリップ型圧電振動子と呼んでいる。In this vibrator, the electrode 2 is present in the entire width direction of the vibrating plate 1, and the thickness vibration of the vibrating plate 1 on which the electrode 2 is formed is used as the main vibration. The vibrator is called a strip type piezoelectric vibrator.
一般Ｇこ、ストリップ型圧電振動子では、大きなウェハ
からチップ化する際、慎重に行なわないとエノンに欠落
を生ずる虜かあり、若し、そのようになると高周波特性
は劣化するので、この点、電極２か振動素板１の周囲よ
り内側に存在するエネルギ閉し込め型圧電振動子の方が
有利であると考えられるか、エネルギ閉じ込め型圧電振
動子の場合は、とうしても大型化することか避けられな
い旨の欠点がある。In general, with strip-type piezoelectric vibrators, when converting a large wafer into chips, if you are not careful, there is a risk of chipping, and if this happens, the high frequency characteristics will deteriorate. It is thought that an energy confinement type piezoelectric vibrator that exists inside the periphery of the electrode 2 or the vibrating plate 1 is more advantageous, or in the case of an energy confinement type piezoelectric vibrator, it is inevitably large. There are drawbacks that cannot be avoided.
さて、このストリップ型圧電振動子では前記主振動と同
時に振動素板１に於ける幅方向の振動も励起され、この
幅方向の振動は不要振動、所謂、スプリアスとなるもの
である。Now, in this strip type piezoelectric vibrator, vibration in the width direction in the vibrating element 1 is also excited simultaneously with the main vibration, and this vibration in the width direction becomes unnecessary vibration, so-called spurious vibration.
本発明では、前記幅方向の振動は、幅Ｗの大きさ如何に
依り、その周波数を変化（移動）させることか可能であ
ることに着目し、主振動と幅振動とが結合しない領域に
振動素板１の幅Ｗを設定してスプリアスを抑制している
。The present invention focuses on the fact that the frequency of the vibration in the width direction can be changed (moved) depending on the size of the width W, and vibrates in a region where the main vibration and the width vibration are not coupled. The width W of the blank plate 1 is set to suppress spurious noise.
また、本発明では、前記振動子が、振動素板１の中央に
於いてその振動変位が最も大きくなり、中央から離れる
につれ振動変位は小さくなり、Ｌ／Ｈが９．５を越える
と振動変位は殆ど零になることに着目し、振動子の小型
化を図っている。Further, in the present invention, the vibration displacement of the vibrator is greatest at the center of the vibrating plate 1, and the vibration displacement decreases as it moves away from the center, and when L/H exceeds 9.5, the vibration displacement becomes the largest. Focusing on the fact that the oscillator becomes almost zero, efforts are being made to downsize the vibrator.
第２図は振動子のアトミクンス特性を表わす線図てあり
、紺軸に振幅（ｄＢ）を、横軸に周波数（Ｍ Ｈｚ ］
をそれぞれ採っである。Figure 2 is a diagram showing the atomic characteristics of the resonator, with the dark blue axis representing the amplitude (dB) and the horizontal axis representing the frequency (MHz).
are taken respectively.
図示のデータを得た振動子は、Ｗ＝１．７０５〔鰭）
、Ｗ／Ｈ＝３．４５であるか、スプリアスを抑制する為
の対策を採っていない為、主振動の近傍に不要振動が発
生している。The oscillator from which the data shown is obtained is W=1.705 (fin)
, W/H=3.45, or because no measures have been taken to suppress spurious vibrations, unnecessary vibrations occur near the main vibrations.
この不要振動は、前記したように、振動素板１の幅Ｗを
変化させることに依りその周波数が移動させることかで
き、この様子を第３図を参照しつつ説明する。As described above, the frequency of this unnecessary vibration can be shifted by changing the width W of the vibrating blank plate 1, and this will be explained with reference to FIG. 3.
第３図は不要振動（幅スプリアス）の周波数スペクトラ
ムを示すものであり、縦軸に周波数定数ＣＨｚ−ｍ’ｌ
を、横軸にＷ／Ｈをそれぞれ採っである。尚、周波数定
数か小さくなると周波数もイ氏くなる。Figure 3 shows the frequency spectrum of unnecessary vibrations (width spurious), with the frequency constant CHz-m'l on the vertical axis.
, and W/H is plotted on the horizontal axis. Note that as the frequency constant decreases, the frequency also decreases.
第３図に於いて、短い破線は計算値を、実線及び○と長
い破線及び×は実測値をそれぞれ示し、また、ｆ ｏ
＝ ４ ＣＭＩＩｚ）である。さて、主振動Ｇよｆｒで
あり、［ａとｆｒ−（ｆａ−ｆｒ）とで定められる範囲
に不要振動か存在しなければ実用上差支えない。In Figure 3, short dashed lines indicate calculated values, solid lines, ○, long dashed lines, and × indicate measured values, and f o
= 4CMIIz). Now, the main vibration G is fr, and there is no practical problem as long as there are no unnecessary vibrations in the range defined by [a and fr-(fa-fr).
図から判るように、Ｗ／Ｈ＝３の近傍及びＷ／Ｈ＝１．
５〜２ （図に「規格ｊとして指示しである）では主振
動と不要振動とが結合していなし′１ので好ましいが、
この規格で得られる振動子の寸法。As can be seen from the figure, in the vicinity of W/H=3 and in the vicinity of W/H=1.
5-2 (indicated as "Standard j" in the figure) is preferable because the main vibration and unnecessary vibration are not coupled '1.
Dimensions of the resonator obtained by this standard.
は、小さくすること及び大きくすることのいずれにも限
界がある。There are limits to both making it smaller and making it larger.
従って、現在の斯かる部品に関する趨勢である小型化の
要求に沿うようにする為には、前記規格の範囲では不可
能であって、同じく図から判るよウニ、Ｗ／Ｈを１．２
以下に採ることに依り、主振動と不要振動とが結合せす
、しかも、小型化された振動子を構成する為の一つの条
件が満足されるものである。Therefore, in order to meet the current trend of miniaturization of such parts, it is impossible within the range of the above standards, and as can be seen from the figure, the W/H must be 1.2.
By taking the following steps, one of the conditions for combining the main vibration and unnecessary vibration and constructing a miniaturized vibrator is satisfied.
第４図は縦軸に等個直列抵抗Ｒ５を、横軸にＬ／Ｈをそ
れぞれ採り、周波数を４． ＣＭ ＩＩＺ ）として前
記両者の関係を測定して（Ｍた線図である。尚、この種
振動子は、等個直列抵抗Ｉｚｓか大きいとスプリアスか
生じ、また、Ｑか低下するものと考えて良い。In FIG. 4, the vertical axis shows the equal number of series resistors R5, the horizontal axis shows L/H, and the frequency is 4. The relationship between the two is measured as (CMIIZ) (see the diagram below).It should be noted that in this type of resonator, if the equal series resistance Izs is large, spurious will occur, and the Q will be lowered. good.
図から判るように、Ｌ ／ Ｈか９．５以下及び１４以
上では等個直列抵抗Ｒ５か急激に増大するので、その領
域では、振動子の特性か悪くなることは明らかである。As can be seen from the figure, when L/H is less than 9.5 and greater than 14, the equal series resistance R5 increases rapidly, so it is clear that the characteristics of the vibrator deteriorate in that range.
従って、第１図に見られる構成の振動子に於いてはＬ／
Ｈ＝９．５〜１４に採ることが好ましい。Therefore, in the resonator with the configuration shown in Figure 1, L/
It is preferable that H=9.5 to 14.
第３図及び第４図に見られる測定データから得られる結
果として、第１図に見られるようなストリップ型圧電振
動子では、Ｌ／Ｈ＝９．５〜１４の範囲とし、且つ、Ｗ
、／）（＝１．２以下の範囲とすれば、スプリアスか少
なく、また、Ｑが高く、しかも、小型化された振動子を
作製し得ることが判るであろう。As a result obtained from the measurement data shown in FIGS. 3 and 4, in the strip type piezoelectric vibrator shown in FIG. 1, L/H is in the range of 9.5 to 14, and W
, /)(=1.2 or less, it will be understood that a vibrator with less spurious, high Q, and moreover, can be manufactured in a smaller size.
発明の実施例
本発明の一実施例として、Ｗ＝ ０ 、６０ ［：ｍｍ
）、Ｌ＝４．７５ １：ｍｍ） 、Ｈ＝５００ Ｃｌａ
ｍ） 、従ッて、Ｌ／Ｈ−９，５、Ｗ／Ｈ＝１．２であ
る振動子を作製し、周波数４ （Ｍ ）ｌｚ 〕として
動作させたところ、等個直列抵抗ＲＳとして充分に低い
値か得られ、そのアドミタンス特性は第５図に見られる
通りであった。Embodiment of the Invention As an embodiment of the present invention, W=0, 60 [:mm
), L=4.75 1:mm), H=500 Cla
m), Therefore, when a resonator with L/H-9.5 and W/H=1.2 was fabricated and operated at a frequency of 4 (M)lz], it was sufficient as an equal series resistor RS. A low value was obtained, and the admittance characteristics were as shown in FIG.
第５図では、紺軸に振幅ＣｄＢ）を、横軸に周波数・（
・Ｍ Ｈｚ ）をそれぞれ採っである。In Figure 5, the dark blue axis shows the amplitude CdB), and the horizontal axis shows the frequency (CdB).
・MHz) are taken respectively.
このデータから判るように、４ （Ｍ Ｈｚ ）近傍に
スプリアスは発生していなし、また、鋭いピーク特性を
示している。As can be seen from this data, there is no spurious generated near 4 (MHz), and sharp peak characteristics are exhibited.
発明の効果
本発明に依れば、ｌ、１Ｔａｏ３からなる振動素板を用
いたストリップ型圧電振動子に於いて、前記振動素板の
長手方向を結晶のＹ軸から時計方向に４８°±４°に選
択し、そして、厚みをＨ，長さをし、幅をＷとすると、
Ｌ／Ｈ＝９．５〜１４
に、また、
Ｗ／Ｈ＝１．２以下
に選択することに依り、該ストリップ型圧電振動子を小
型化することができ、且つ、スプリアスを充分に抑制す
ることができると共にＱを高くすることかできる。Effects of the Invention According to the present invention, in a strip type piezoelectric vibrator using a vibrating blank made of l,1Tao3, the longitudinal direction of the vibrating blank is set at 48°±4 clockwise from the Y axis of the crystal. If the thickness is H, the length is H, and the width is W, by selecting L/H = 9.5 to 14 and W/H = 1.2 or less, The strip type piezoelectric vibrator can be downsized, spurious components can be sufficiently suppressed, and Q can be increased.
第１図はストリップ型圧電振動子の要部斜面図、第２図
はスプリアス等に関して対策を施していない振動子に於
けるアドミタンス特性を表わす線図、第３図は不要振動
の周波数スペクトラムを表わす線図、第４図はＲ５対し
／ Ｈの関係を表わす線図、第５図は本発明一実施例
に於けるアドミタンス特性を表わす線図である。
図に於いて、１はＬｉＴａＯ３からなる振動素板、２は
振動素板１の表裏に例えばＡｕの蒸着膜を形成してそれ
をパターニングして作製した電極、３は例えばＡｇペー
ストを用いて印刷法にて形成した端子電極、Ｈは振動素
板１の厚み、Ｌは振動素板１の長さ、Ｗは振動素板１の
幅である。
−５：Figure 1 is a perspective view of the main parts of a strip-type piezoelectric vibrator, Figure 2 is a diagram showing the admittance characteristics of a vibrator without measures against spurious components, etc., and Figure 3 is a frequency spectrum of unnecessary vibrations. FIG. 4 is a diagram showing the relationship between R5 and /H, and FIG. 5 is a diagram showing the admittance characteristic in one embodiment of the present invention. In the figure, 1 is a vibration plate made of LiTaO3, 2 is an electrode made by forming, for example, a vapor-deposited film of Au on the front and back of the vibration plate 1 and patterning it, and 3 is printed using, for example, Ag paste. H is the thickness of the vibrating blank plate 1, L is the length of the vibrating blank plate 1, and W is the width of the vibrating blank plate 1. -5:
Claims (1)
プ型圧電振動子に於いて、前記振動素板の長手方向が結
晶のＹ軸から見て時計方向に４８° ±４゜に選択され
、且つ、厚みを１１、長さをし、幅をＷとしたとき、 Ｌ／Ｈ＝９．５〜１４ に、また、 Ｗ／）Ｉ＝１．２以下 にそれぞれ選択されてなることを特徴とする圧電振動子
。[Claims] In a strip type piezoelectric vibrator using a vibrating blank made of LiT a O3, the longitudinal direction of the vibrating blank is 48° ±4° clockwise when viewed from the Y axis of the crystal. , and when the thickness is 11, the length is W, and the width is W, L/H = 9.5 to 14, and W/) I = 1.2 or less. A piezoelectric vibrator characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5340883A JPS59178010A (en) | 1983-03-28 | 1983-03-28 | Piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5340883A JPS59178010A (en) | 1983-03-28 | 1983-03-28 | Piezoelectric vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59178010A true JPS59178010A (en) | 1984-10-09 |
Family
ID=12941993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5340883A Pending JPS59178010A (en) | 1983-03-28 | 1983-03-28 | Piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59178010A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62220012A (en) * | 1986-03-20 | 1987-09-28 | Fujitsu Ltd | Piezoelectric vibration element |
| JPS63190414A (en) * | 1987-02-02 | 1988-08-08 | Murata Mfg Co Ltd | Piezoelectric vibrator component |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5185688A (en) * | 1975-01-27 | 1976-07-27 | Kinsekisha Lab Ltd | KOKETSUGOATSUDENSHINDOSHI |
| JPS5683110A (en) * | 1979-12-10 | 1981-07-07 | Toshiba Corp | Thickness slip oscillator of litium tantalate |
-
1983
- 1983-03-28 JP JP5340883A patent/JPS59178010A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5185688A (en) * | 1975-01-27 | 1976-07-27 | Kinsekisha Lab Ltd | KOKETSUGOATSUDENSHINDOSHI |
| JPS5683110A (en) * | 1979-12-10 | 1981-07-07 | Toshiba Corp | Thickness slip oscillator of litium tantalate |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62220012A (en) * | 1986-03-20 | 1987-09-28 | Fujitsu Ltd | Piezoelectric vibration element |
| JPS63190414A (en) * | 1987-02-02 | 1988-08-08 | Murata Mfg Co Ltd | Piezoelectric vibrator component |
| JPH0575290B2 (en) * | 1987-02-02 | 1993-10-20 | Murata Manufacturing Co |
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