JPS59177101A - Apparatus for supplying sublimable substance - Google Patents

Abstract

PURPOSE:The titled apparatus capable of rapidly changing the generating amount of a sublimable subsance corresponding to the variation of demand, constituted so as to control the flow control valves arranged to the outlets of a plurality of sublimable substance receiving containers in parallel to each other by detecting the pressure of the supply side of the sublimable substance. CONSTITUTION:In an apparatus wherein sublimable substance receiving containers 3a, 3b are heated in heating tanks 2a, 2b through a heating apparatus consisting of heat exchangers 1a-1, 1b-a and air recirculating fans 1a-2, 1b-2 by a heating medium flowing in a constant amount at a constant temp. and a predetermined sublimable substance is generated to be supplied to a treating process, the flow control valves 12a, 12b arranged to the above mentioned receiving containers 3a, 3b are controlled so as to make the pressure detected by the pressure gauge 8-1 provided on the buffer tank 9-1 connected to a header 10 constant to allow the generating amount of the sublimable substance in the side of the receiving containers 3a, 3b to rapidly change corresponding to the variation of demand on the side of the treating process 11.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in a sublimable substance supply device.

To explain a conventional sublimable substance supply device with reference to FIG. 1, (la-1) (lb-i) is a heating heat exchanger, (l
a-z) (lb-2) is the air circulation fan, (2a) (
2b) is a heating tank, (3a) (3b) is a sublimable substance storage container, (4aX4b) is a heat medium flow control valve, (5a) (5b)
) is the pressure gauge, (6a) and (6b) are the thermometers, (force is the sublimable substance flow rate control valve, (8) is the pressure gauge, (9) is the buffer tank, (10) is the header, and (11) is the processing In the process
The storage container (3aX3b) containing the sublimable substance is placed in the heating tank (2a) (2b), and the heating heat exchanger (la-1
) (lb-1) and air circulation fan (la-2) (l
b-2) by heating the storage containers (3a) and (3b),
The sublimable substance in it is gasified and this is used as a header (10).
→The sublimable substance is supplied to the treatment process (11) via a flow control valve (car buffer (9)).At this time, the pressure difference between the pressure in the header (10) and the set pressure is measured by a pressure meter. (5a) (5b), and the temperature difference between the set temperature set by this pressure difference and the temperature in the heating tank (2a) (2b) is measured with thermometers (6a) (6b), and the result is The heat medium flow control valves (4a) and (4b) are controlled based on the temperature in the heating tank (2aX2b) to the set temperature, and the pressure of the sublimable substance flowing in the header (10) is maintained constant. In addition, the pressure inside the buffer tank (9) is measured with a pressure gauge (8), and based on the result, the pressure inside the buffer tank (9) is maintained at the set pressure by controlling the force of the sublimable substance flow rate control valve. It is supposed to be done.

In the sublimable substance supply device, the heating tank (2a,) (2
The amount of sublimable substances generated from b) is expressed as the amount of heat medium supplied (
Since the heat medium flow rate is controlled by the heat medium flow control valve (4a-X4b), even if the demand in the treatment process changes,
Unable to respond quickly, heating tanks (2a) (2b)
A time delay occurs in making the amount generated in correspond to the amount demanded by the treatment process (11). Also heating tanks (2a) (2b)
If an upper limit is set for the temperature inside the storage container (3
When the amount of sublimable substances in a) decreases, a constant amount of generation can be ensured, and the gas generated by heating is stored in the storage container (3b) on the side of the heating tank (2b) where there is a sufficient amount of sublimable substances. transformation,
At that point, the processing process (
If the demand for 11) suddenly decreases and the storage container (3a) on the heating tank (2a) side is sufficient to handle the demand, the two heating tanks (2a) and (2b) can be controlled separately. Therefore, there was a problem in that gasification and supply by heating continued even in the storage container (3b) on the side of the heating tank (2b).

The present invention addresses the above-mentioned problems, and includes a sublimable substance supply device that supplies a predetermined sublimable substance from a plurality of sublimable substance storage containers arranged in parallel. It is equipped with a heating device that heats with a heat medium at a constant flow rate and a constant temperature, a flow rate control valve disposed at the outlet of each sublimable substance storage container, and a pressure detection device on the supply side that controls the flow rate control valve. The unique feature of the sublimable substance supply device is to quickly change the amount of sublimable substance generated in the storage container in response to fluctuations in the amount demanded by the treatment process. An object of the present invention is to provide an improved sublimable substance supplying device that is capable of providing a sublimable substance.

Next, the sublimable substance supplying apparatus of the present invention will be explained using an embodiment shown in FIG. 2. (la 1) (la-2) (1
b-1) (1b-2) (2a) (2b) (3a) (
3b) (7) (11) are the same parts as above, and the heating heat exchanger (Ia-t) (lb-t) does not have a heat medium flow control valve ((4aX4b) in Figure 1). , isothermal heat exchanger (
Ia-1) (Ib-1) heats the sublimable substance storage containers (3a) (3b) in the heating tanks (2a) (2b) with a constant temperature and a constant flow rate of the heating medium. Also (12a) (
], 2b) is a sublimable substance flow rate control valve provided on the outlet side of the sublimable substance storage container (3a) (3b), and (8-1) is a supply side that controls the same flow rate control valve (12a) (12b). This is a pressure gauge.

(9-1) (9-2) are buffer tanks, (8-2
) are pressure levels 1 and (13) on the same buffer tank (9-2) side.
a) (13b) + yo M position needle.

Next, the operation of the sublimable substance supply device will be explained. Heat exchanger (LA-1) (LB-1,) and air circulation fan (
la-2) (xb-2) and heating h! (2a)
+zb) heats the sublimable substance in the storage containers (3a) and (3b) to gasify it. Figure 6 shows the state during steady occurrence (A
) and the state at the time of unsteady occurrence. In addition, TI in Fig. 6 is the temperature inside the heating tank, T2 is the sublimation temperature of the sublimable substance,
P is sublimation property at sublimation temperature T2! The pressure of the substance, G is the amount generated, W is the 7A amount of the sublimable substance (subscripts a and b correspond to the heating tank (2aX2b)), Go is the flow rate to the treatment system, and Vo is the conditions of the treatment process. The set pressure of the pressure gauge (8-1) determined by Δt is the steady generation period.

(I) First, the state (A) at the time of steady occurrence will be explained. When a sufficient amount of the sublimable substance remains in the storage container (3a) and a constant flow rate G (→a) can be generated steadily using only the heating tank (2a), the changes in various quantities in the heating tank (2a) will be as follows. It will look like (A) in the figure. The residual Wa of the sublimable substance decreases as it is generated, and the contact area (heat transfer area) between the sublimable substance and the storage container (3a) becomes smaller. Therefore, the temperature difference between the heating tank internal temperature T1 and the sublimation temperature T2 of the sublimable substance increases, and the sublimation temperature T2 decreases. Also, along with this, Pa
also decreases.

At this time, the flow rate control valve (12a) is connected to the buffer tank (
9-1) to maintain the pressure inside at the set pressure PO.

Controlled by a pressure gauge (8=1). At this time, since Pa is decreasing, the opening degree of the flow rate control valve (12a) gradually increases and becomes fully open when moving from the steady state (A) to the unsteady state (B). Next, the state (B)K of unsteady occurrence will be explained. When Pa matches Po, Pa and T2a become constant from then on, and as shown in Fig. 6)
Ga decreases as follows. Therefore, the shortfall (G-Ga)
must be replenished from the heating tank (2b). At this time, the flow rate control valve (12a) is fully open, and the flow rate control valve (12b) replenishes (G-Ga) to keep the pressure in the buffer tank (,9-1) constant. is controlled by the pressure gauge (8-1) (see Gb in Figure 6).
. Next, the selection method of the flow rate control valves (12a) (12b) will be explained. The selection of each flow control valve is made using a weighing scale (13
a) Measure the weight of the heating tanks (2a) and (2b) according to (13b), and determine whether the storage container that holds a large amount of sublimable substance is (
3b), the flow control valve (12b) on the outlet side
). On the other hand, during unsteady occurrence, the processing process (
When the demand at 11) decreases, the pressure gauge (8-1)
'), the flow control valve (12b) on the outlet side of the heavier heating tank (2b) is closed, and the heating tank (2b) is closed.
2b) Decrease the amount of supply from. Furthermore, when the flow rate control valve (12b) is fully open, if the supply amount is still large, the flow rate control valve (12a) is gradually closed from the fully open position to meet the demand in the treatment process (11). let At this time, the pressure inside the storage container (3) increases,
Since T2 also increases accordingly, the amount of sublimable substances generated within the storage container (3) decreases. In addition, the storage container (3
a) When the container is empty, place a new storage container (3a) containing enough sublimable substance into the heating tank (2a) before the other storage container (3b) reaches a state of unsteady generation. Insert and then continue feeding. Also, the buffer tank (9-
2) The pressure inside is kept constant by the pressure gauge (8-2>) and the flow rate regulating valve (force) controlled by it.

However, if the pressure inside the buffer tank (9-1) is stable, the above equipment (power (8-2) (9-2) can be omitted. If the flow rate and pressure of the buffer tank (9-1) are stable,
is omitted, and the pressure inside the header (10) is measured using a pressure gauge (8-1).
) may be used for detection.

The sublimable substance supply device of the present invention is configured as described above, and each heating device (heating tank (2a) (2b) and heating heat exchanger (la-1) (lb-1)) is heated. The flow rate control valve (12a) (12b) on the outlet side of each heating device is used to maintain a constant flow rate and constant temperature of the heating medium without controlling it.
) is controlled by a pressure detection device (pressure gauge (8-1)) on the supply side, and the gasified sublimable substance is transferred to the treatment process (11).
), it is possible to quickly change the amount of the sublimable substance generated in the storage containers (3a) and (3b) in accordance with changes in demand on the treatment process side.

Although the present invention has been described above with reference to embodiments, it goes without saying that the present invention is not limited to such embodiments, and that various design modifications can be made without departing from the spirit of the present invention. .

[Brief explanation of drawings]

Fig. 1 is a system diagram showing a conventional sublimable substance supply device, Fig. 2 is a system diagram showing an embodiment of the sublimation substance supply device according to the present invention, and Fig. 6 is an explanatory diagram of its operation. . (Ia-1) (2a, ) and (Ib-1) (2b)・-
- Heating device, (3a,) (3b)...Sublimable substance storage container, (8-1)...Pressure detection device, (1,2a) (12b)...Flow control valve. Sub-agents: 2 patent attorneys and non-Kaimoto important literary figures

Claims (1)

[Claims] In a sublimable substance supply device that supplies a predetermined sublimable substance from a plurality of sublimable substance storage containers arranged in parallel, a heating device that heats each of the sublimable substance storage containers with a heating medium at a constant flow rate and a constant temperature. A sublimable substance supply device comprising: a flow rate control valve disposed at the outlet of each sublimable substance storage container; and a pressure detection device on the supply side that controls the flow rate control valve.