JPS59174379U - クライオポンプの水除去装置 - Google Patents

クライオポンプの水除去装置

Info

Publication number
JPS59174379U
JPS59174379U JP6769983U JP6769983U JPS59174379U JP S59174379 U JPS59174379 U JP S59174379U JP 6769983 U JP6769983 U JP 6769983U JP 6769983 U JP6769983 U JP 6769983U JP S59174379 U JPS59174379 U JP S59174379U
Authority
JP
Japan
Prior art keywords
cryopump
removal device
water removal
bowl
drain hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6769983U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0343430Y2 (enExample
Inventor
秀敏 森本
Original Assignee
アルバツク・クライオ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アルバツク・クライオ株式会社 filed Critical アルバツク・クライオ株式会社
Priority to JP6769983U priority Critical patent/JPS59174379U/ja
Publication of JPS59174379U publication Critical patent/JPS59174379U/ja
Application granted granted Critical
Publication of JPH0343430Y2 publication Critical patent/JPH0343430Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP6769983U 1983-05-09 1983-05-09 クライオポンプの水除去装置 Granted JPS59174379U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6769983U JPS59174379U (ja) 1983-05-09 1983-05-09 クライオポンプの水除去装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6769983U JPS59174379U (ja) 1983-05-09 1983-05-09 クライオポンプの水除去装置

Publications (2)

Publication Number Publication Date
JPS59174379U true JPS59174379U (ja) 1984-11-21
JPH0343430Y2 JPH0343430Y2 (enExample) 1991-09-11

Family

ID=30197888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6769983U Granted JPS59174379U (ja) 1983-05-09 1983-05-09 クライオポンプの水除去装置

Country Status (1)

Country Link
JP (1) JPS59174379U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008101576A (ja) * 2006-10-20 2008-05-01 Toppan Printing Co Ltd クライオポンプ及びそれを用いた真空装置
WO2009013807A1 (ja) * 2007-07-23 2009-01-29 Sumitomo Heavy Industries, Ltd. クライオポンプ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5481784U (enExample) * 1977-11-17 1979-06-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5481784U (enExample) * 1977-11-17 1979-06-09

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008101576A (ja) * 2006-10-20 2008-05-01 Toppan Printing Co Ltd クライオポンプ及びそれを用いた真空装置
WO2009013807A1 (ja) * 2007-07-23 2009-01-29 Sumitomo Heavy Industries, Ltd. クライオポンプ

Also Published As

Publication number Publication date
JPH0343430Y2 (enExample) 1991-09-11

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