JPS59173231A - Formation of compound ultra-conductive substance - Google Patents
Formation of compound ultra-conductive substanceInfo
- Publication number
- JPS59173231A JPS59173231A JP58031969A JP3196983A JPS59173231A JP S59173231 A JPS59173231 A JP S59173231A JP 58031969 A JP58031969 A JP 58031969A JP 3196983 A JP3196983 A JP 3196983A JP S59173231 A JPS59173231 A JP S59173231A
- Authority
- JP
- Japan
- Prior art keywords
- compound
- bcx
- conductive substance
- formation
- ultra
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Silicon Compounds (AREA)
- Physical Vapour Deposition (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
Description
【発明の詳細な説明】 4、、発明は、化合物超伝導体の形成方法(=関する。[Detailed description of the invention] 4. The invention relates to a method for forming a compound superconductor.
この種超云凄体は、たとえば超高冴コンピューター用絢
理紫子のジョセフソン5g子の笑用化C二は不可欠であ
る。This kind of super amazing body is indispensable, for example, the comical C2 of Ayari Shiko's Josephson 5g child for super high-performance computers.
丁なわち、ジョセフソン素子の実用化(=あって:ま暦
〆伝導臥界iM K ”cの筒いものが要求されるから
−Cある0
現在、最高のW Fm ’916%界7#A Ni ’
I’(はNbgGeで22.5Kか得られる。In other words, the practical application of the Josephson element (= because it requires a cylinder of conduction field iM K "c" is presently the highest W Fm '916% field 7 # A Ni'
I'( can be obtained at 22.5K with NbgGe.
一般に超伝導金属単体より、その化合物超広導体の方が
より尚いT。を有している。In general, compound superconductors have a higher T than superconducting metals alone. have.
そこで、より乱いTcを有する2元素化合物超伝導体(
Nb xAI 、 Nb i (jeなど)を形成する
ため(−各4″1Hの方法が試みられている。Therefore, a binary compound superconductor with a more disordered Tc (
To form Nb x AI , Nb i (je, etc.) (-each 4″1H method has been tried.
しかし、これらの化合物は多くの場合、結晶格子の不安
定性が原因で、その形式は井帛(1豪しい。However, these compounds are often difficult to form due to crystal lattice instability.
すなわち、記@A、 B、Cをそれぞれ元素記号とした
とき、2元素化合物rm云導体は多くの場合、A、Hの
化学式で示され、そこで従来はAaBを形成するため4
二元累Aと元g Eとを反応してしまた力・、A、 B
は通常不安定相のため、例えば安定相であるAB2゜A
B、A、Bなどが形成されてしまい、望まれるA:g+
医う!ネ性のA、B相の形成は非′帛゛(二困姐であ
ったのである。In other words, when A, B, and C are the element symbols, two-element compound rm conductors are often represented by the chemical formulas A and H, and conventionally, 4 is used to form AaB.
By reacting the binary sum A and the element g E, the force ・, A, B
is usually an unstable phase, so for example, AB2゜A which is a stable phase
B, A, B, etc. are formed, and the desired A:g+
Doctor! The formation of the natural A and B phases was non-structural.
ただ、わずか(=8iOz上(−■を蒸b−後熱処理し
、同相反応(=よってV、Siを得るようにしたものは
+tit究されている。However, a method in which V and Si are obtained by heat-treating slightly (=8 iOz) after steaming b-■ to obtain an in-phase reaction (=+tit) has been investigated.
不発明は、上記の不t、15合(1婚み、製作1錘であ
るA3Bの2フC濤比合竹超云導体を、S 1(J2を
用いたV、S i(−限らず一組的な年感と順化物、水
化吻又はtvft化Ij、+)、との間の同相反応によ
って容易に得ることのできる化合I勿超云導体の形成方
法を提供しようとするものである。The non-inventive method is to convert the above-mentioned non-t, 15-gou (1 marriage, 1 production spindle) A3B 2-fu C Tohiai bamboo superconductor to S1 (V using J2, Si (- not limited to It is an object of the present invention to provide a method for the formation of a compound I superconductor that can be easily obtained by an in-phase reaction between a set of complexes and an acclimate, hydrated or tvfted Ij, +). be.
以下不発明なん6明J−る〇
コニウム著の元素Aとシリコン・ゲルマ0つJ″′穿ヌ
ズ、アルミニウム、ガリウム寺の元糸B及びr;※系、
憾索、(べ;黄培の戊応性の強い元素Cを含む(e8
@BCxとの固相成心(二よって2元素化合物相伝導悸
A、B(BOXとしてSiO□を用いたV3Siを除く
)を形成することを特徴とするものである。The following is uninvented: Element A, silicon german, aluminum, gallium, element A, silicon german, aluminum, gallium, element B and r; *system,
Contains element C with strong reactivity of Huang Pei (e8
It is characterized by forming solid phase centration (therefore two-element compound phase conduction waves A and B (excluding V3Si using SiO□ as BOX) with @BCx).
これらの実施の態様としては第1図の組合せの2元素化
合物超伝導体が得られる。In these embodiments, a two-element compound superconductor having the combination shown in FIG. 1 can be obtained.
本発明は、上述の如き方法であるから、元素Aが化合物
13Cx中の元素Cと反応すると同時に、BCxを分解
する結果としてAyBが形成されるのである。Since the present invention is a method as described above, AyB is formed as a result of decomposing BCx at the same time as element A reacts with element C in compound 13Cx.
コ;h−二ヨツーcAllz、AB、4B トyz ラ
f cmTWiノA、B 力s形成される。ko; h-2yotsu cAllz, AB, 4B toyz la f cmTWi no A, B force s is formed.
しかもこの場合(二は、BCxを分解しない限りBは供
給されないので、Bの供給4,4がttiiJ限された
状況で反応が進イテする結果、yは1以上の値をとり・
多くのり、″8合3となる。Moreover, in this case (2), since B is not supplied unless BCx is decomposed, the reaction proceeds in a situation where the supply of B is limited, and as a result, y takes a value of 1 or more.
If there is a lot of glue, it will be 8 pieces and 3 pieces.
従って、容易1−A8Bか形成される。Therefore, 1-A8B is easily formed.
更に、BCxを基板として用いた場合(二は、語根との
反応の結果として価めて膏血性の良好なA、Bか形成さ
れる。Furthermore, when BCx is used as a substrate (2), A and B with good adhesive properties are formed as a result of the reaction with the root of the word.
また更(二、基板として単結晶のBCxを用いること(
二より、形成されるAa Bを配向形成することかでき
る。Furthermore, (2) using single crystal BCx as the substrate (
Secondly, the formed Aa and B can be oriented.
実施例1
元素A・・・Nb
反応式
%式%)(
酸化膜(SiOり伯シリコンウェハ端(反(二Nbヲ3
00 OAスパッタ魚粕し、その後、真空[5X 10
Torr以下で900℃から1200℃、2時間の
J−1,全熱処理によりti′ii相反応させた。Example 1 Element A...Nb Reaction formula % Formula %) (Oxide film (SiO)
00 OA sputter fish cake, then vacuum [5X 10
A ti'ii phase reaction was carried out by total heat treatment at 900° C. to 1200° C. for 2 hours at a temperature below Torr.
N1)ヌバンタ膜のX線回折パターンを弔21図(−示
す。N1) The X-ray diffraction pattern of the Nuvanta film is shown in Figure 21 (-).
[・°n図中、斜線で示すように1100 Cの;・パ
処理堝度では明らか(二N1)6Slをボすビ〜りが確
認できる。As shown by the diagonal lines in the figure, clear (2N1) 6Sl loss can be seen in the 1100 C;-Pa treatment brittleness.
また、この試料の超伝専臨界渦度は13゜Kであった。Moreover, the superelectric critical vorticity of this sample was 13°K.
実施例2
元素B・・・A’ V+Al2O,→VaAl+V
Ox元素C・・・0
結 果
アルミナ(AI 20m )磁器基板にVを300OA
スパツタ蒸ねし、その後、具引す×10′↓’orr以
下で600℃から900℃、2時1t1〕の真空熱処理
により11iIl相反応させた■ヌパツタ)匣のX線回
折パターンを鉛3区1;二示す。Example 2 Element B...A' V+Al2O, → VaAl+V
Ox element C...0 Result V 300OA on alumina (AI 20m) ceramic substrate
The X-ray diffraction pattern of the 11iIl phase was reacted by steaming the spatsuta, and then vacuum heat treatment at 600°C to 900°C, 2 hours, 1t1] at a temperature of less than 10'↓'orr. 1; Show 2.
同図中、斜線で不すよう(−1700℃から900℃の
熱処理温度では、明らか4二V、AIを示すピークが確
約でさる。In the same figure, as indicated by diagonal lines (at a heat treatment temperature of -1700° C. to 900° C., a peak clearly showing 42 V and AI is clearly visible.
また、これらの試料の超云導臨界砒度は5.2°Kから
5.4°にであった。In addition, the superconductive critical arsenicity of these samples was from 5.2°K to 5.4°.
実施例3
元’ B” ’ ” ” Nb +511(J2−
→N1)S(1+へ’box元素C・・・0
結 果
仙英カラス基板ζ二Snを具空介貸名し、これを熱1χ
、1化し゛(5n02膜をjし敗し、さらし、この上(
−200OAのNbYスパッタ蒸看し、その仮1,00
0℃、2時間の只空熱処理(二より固相反応させたNb
スパッタ膜のX線回折パターンを第4図(=示す。Example 3 Element 'B''''' Nb +511 (J2-
→N1) S (to 1+'box element C...0 Result Sen'ei crow board ζ2Sn is lent by Gukusuke, and it is heated to 1χ
, unify the 5n02 film, expose it, and then (
-200OA NbY sputtering, the temporary 1,000
Air heat treatment at 0°C for 2 hours (Nb subjected to solid phase reaction)
The X-ray diffraction pattern of the sputtered film is shown in FIG.
同凶中料線を示すよう(二、明らか(二Nb口Snを示
すピークが(+’ll−詔できる。As shown in the same line, it is clear that there is a peak indicating the Sn (+'ll-).
また、この試料のパ、ず4医導臨界温度は18゜Kであ
った。Furthermore, the critical temperature of this sample was 18°K.
実施例4
元素B” ” ’ SIV 十5iBJ+、 −+ V
3Si +vl’Jx九素C・・・N
結果
シリコンウェハ基&(11μmの5iaN4ヲスパツタ
蒸着し、さら(=、この上(=200OAの■をヌパツ
タhA aし、その後、600℃から1100℃、2時
間の界空熱処理(二より同相反応させた■スパッタ膜の
X iJ回併パターンを第5図(=示す。Example 4 Element B""' SIV 15iBJ+, -+ V
3Si +vl'Jx Nine elements C...N Result Silicon wafer base & Figure 5 shows the X iJ recirculation pattern of the sputtered film subjected to field heat treatment (2) and in-phase reaction.
同図中、1,1線で不すよう(−1800°Cの1ンh
処理瀝没で)ま、明らかにV、8iを示すヒーク力置面
−をできる。In the same figure, the line 1 and 1 indicate the temperature difference (-1800°C 1 h
After processing, a heak force surface clearly showing V,8i can be obtained.
また、この試料の超云導臨界濡反は14°にであった。Further, the superconductive critical wetting of this sample was 14°.
沈1図は2元系化貨物超伝導体のに11合せ11414
椋ト!、第2図はNl)、Si形成のX線回折パターン
図、第3b It4 ViAI )し成のX線1州折パ
ターンN、第4因はNbaSn形成のX線(ロ)折パタ
ーン図、桐・5図ハVasi3’t 成ノX ?a回折
パターン図である。
昭和58年2月28日
出j帖大 津 端 −部
同 山 下 努同 反
町 熱 夫
]&仰
19.り4
〕t/−麹
フゲ相Figure 1 shows 11414 binary cargo superconductors.
Mukuto! , Fig. 2 is an X-ray diffraction pattern diagram of Si formation, Fig. 3b is an X-ray diffraction pattern diagram of Si formation (It4 ViAI), and the fourth factor is an X-ray diffraction pattern diagram of NbaSn formation.・Figure 5 Ha Vasi3't Narino X? It is a diffraction pattern diagram. Published on February 28, 1981. ri4 〕t/-Koji fuge phase
Claims (1)
ム等の元素人と、シリコン、ゲルマニウム。 スズ、アル?ニウム、ガリウム等の元gB及びは紫、屋
素、硫黄等の反応性の強い元素Cを含む化合物BC,+
との固相反応によって2元素化合物超伝導体AyB (
BCxとしてS i02を用いたV、8iを除く)を形
成することを4¥徴と−づ°る化合物超伝導体のjし成
方法。[Claims] Elements such as vanadium, niobium, titanium, hafnium, and zirconium, as well as silicon and germanium. Tin, Al? Element gB such as Ni, Gallium, etc. and compound BC, + containing highly reactive element C such as violet, nitrogen, sulfur, etc.
The two-element compound superconductor AyB (
A method for forming a compound superconductor in which the formation of V (excluding V, 8i) using Si02 as BCx is the 4th characteristic.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58031969A JPS59173231A (en) | 1983-02-28 | 1983-02-28 | Formation of compound ultra-conductive substance |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58031969A JPS59173231A (en) | 1983-02-28 | 1983-02-28 | Formation of compound ultra-conductive substance |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59173231A true JPS59173231A (en) | 1984-10-01 |
JPS646257B2 JPS646257B2 (en) | 1989-02-02 |
Family
ID=12345777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58031969A Granted JPS59173231A (en) | 1983-02-28 | 1983-02-28 | Formation of compound ultra-conductive substance |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59173231A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0365177U (en) * | 1989-10-30 | 1991-06-25 |
-
1983
- 1983-02-28 JP JP58031969A patent/JPS59173231A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0365177U (en) * | 1989-10-30 | 1991-06-25 |
Also Published As
Publication number | Publication date |
---|---|
JPS646257B2 (en) | 1989-02-02 |
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