JPS59170761A - Directional vacuum gauge using laminate cone type collimator - Google Patents

Abstract

PURPOSE:To obtain a vacuum gauge which senses gaseous molecules flying from a specific direction b laminating plural truncated conical umbrellia-form bodies on the gaseous molecule flow intake side of the vacuum gauge. CONSTITUTION:Plural truncated conical umbrella-form bodies 3 are laminated on the side of the gaseous molecule flow intake 1a of the vacuum gauge 1. The umbrella-form bodies 3 may be fixed in one body to a cylinder 2 incorporating the vacuum gauge 1 directly or through a coupling member, etc., but those umbrella-form bodies 3 are arranged preferably at proper intervals while spread part sides face the gaseous molecule flow intake 1a. When incidence directions of gaseous molecules are indicated by (a)-(e), molecules incident in the directions (c) and (d) are reflected by umbrella-form bodies 3 to be radiated out of the cylinder 2, so none of the molecules enters the vacuum gauge 1; and molecules which can enter it are limited to those in the directions (a) and (b), so intense directivity is obtained. Further, there are molecules incident in a direction (c), but the number of them is small enough to ignore as compared with the molecules in the directions (a) and (b).

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a 1. This paper relates to directional constant page reduction using an I-meter.

We are currently conducting electron bombardment inside the container and investigating the gas ψ sound emitted from the material. Are there vacuum leaks in each of the 19 large vessels such as the Tocask-type nuclear MILJ combination and the space simulator? When discovering from a vacuum, a highly sensitive pointing device that is highly sensitive to molecules coming from a fixed direction is used.
, beef oil is a must. -7 By the way, the directional vacuum gauge that has been used conventionally is, as shown in Figure 3, a thermal polarization vacuum gauge with a full pressure layer of sensitivity, and a ionization vacuum gauge that has a full cylindrical shape. Put it in your body (B) and put a long pipe (C) at the end of it.
It was constructed so that it would be sensitive to molecules entering through the pipe.

In some cases, molecules that enter through this long and thin pipe (C) enter the cylinder (B) straight, as in A, but after being reflected inside the pipe (C), as in B. Sometimes they can invade.

Therefore, in order to strengthen the directivity of molecules, the pipe (c) must be made thin and long. However, if the pipe (c) is made thinner and longer, the resistance to inflow of molecules increases, resulting in a decrease in the amount of inflow of molecules and a decrease in the sensitivity of the sensor. In order to compensate for this drawback, for example, we can increase the amount of molecules flowing into a pipe by bundling a large number of stainless steel thin tubes, or we can strengthen the directivity by eliminating the inflow of reflective molecules even with a thicker pipe. In order to eliminate molecules, a system called a cryocollimator is also being considered in which the pipe itself is cooled with liquid helium and all the gas is condensed on the surface of the pipe. However, not only do these types of devices tend to have complicated structures and are not easy to handle, but the latter type (cryocollimator) requires a cryogen and is not equipped with a vacuum device. New inconveniences have arisen, such as the difficulty of freely moving the contents.

The present invention was made based on the above-mentioned circumstances, and
The purpose of this is to create a directional vacuum gauge that senses only gas molecules coming from a specific direction in a vacuum container, and to use a truncated cone-shaped umbrella on the inlet side of the vacuum gauge. By attaching multiple layers in a layered manner, the structure is extremely simple, the directivity can be significantly strengthened, and handling is simple. Moreover, the present invention aims to provide a directional vacuum gauge using a laminated cone-type collimator that is easy to manufacture, small and lightweight, and has a high degree of freedom when used in vacuum production.

To explain the +19 configuration of the present invention with reference to an embodiment shown in the drawings, in FIG. 1, 1 is an ionization vacuum gauge, and 2
is a cylinder that houses the vacuum gauge 1.

Reference numeral 3 denotes a truncated cone-shaped umbrella-shaped body formed as a metal-gold phase, and a plurality of umbrella-shaped bodies 3 are laminated in the gas molecule inlet 1alil of the vacuum gauge 1 as shown in the figure. iron] h
1. The umbrella-like body 3 Ii may be fixed directly to the cylindrical body 2Vc or integrally fixed via a connecting member, etc. The former enlarged portion side is placed directly opposite the gas molecule inlet 1a.

In the configuration as shown in the paper, if the direction of incidence of gas molecules is, for example, a - e, then molecules directly incident on the virtual wall 4 shown by broken lines in the C direction, d direction, etc. are reflected by the umbrella-shaped body 3 and are directed to the cylindrical body. Since it is emitted to the outside of the ionization vacuum gauge 1, which is a sensor, it cannot be entered. Therefore, molecules 1. which can be incident on the sensor. Since it is limited to only those that pass between Ia and b, it can have strong directivity.

Molecules entering from the direction e are also considered, but when used as directionality, molecules in the a and b directions are considered, so they are so small that they can be ignored.

By mounting a plurality of truncated cone-shaped umbrella bodies 3 in a stacked manner on the gas molecule inlet Ia side of the vacuum gauge 1 in this way,
The umbrella-shaped body 3 can exhibit an extremely excellent molecular rectification effect as a molecular rectification device # (collimator) in a directional vacuum gauge.

By the way, since a directional vacuum gauge is a vacuum gauge that senses what passes through a collimator, an ionization vacuum gauge in which ions are generated coaxially with the collimator is more advantageous in terms of insulation. FIG. 2 shows an embodiment in which the ionization vacuum gauge (A') of this type is combined with a private cone-type collimator consisting of the above-mentioned truncated cone-shaped bob-shaped body 3. is a hemispherical anode,
6 is a lump filament, 7 (-trumpet-shaped electron reflector), 18 is an ion collector, 9V'i is an insulated terminal.

By supplying oxygen in this manner, it is possible to obtain a directional vacuum gauge that is small and light, has a simple structure, and is easy to handle.

Furthermore, when used in ultra-high vacuum areas, all molecules that pass through the collimator and enter the sensor side are absorbed by the pumping action of the gauge, which reduces the background of the sensor. (If the ions detected in the sensor become neutral molecules and are ionized again by the sensor, the background will increase), so it is better to use this method. Therefore, the ionization vacuum gauge (I'
) is made of a highly active metal such as titanium metal, and the cylindrical body 100 is made of highly active metal such as titanium metal, and the cylindrical body 100 is degassed (heated by electron impact from the filament) of the gauge body at the same time as the gauge body is degassed (heated by electron impact from the filament) before being used as a directional vacuum gauge. If the titanium is degassed, the adsorption of the titanium metal and the pumping effect of the diffusion inside the titanium will bring the ideal state closer to the ideal state without the use of a cryocollimator or the like.

As described above, the present invention provides a vacuum gauge that senses directivity only for gas molecules flying from a specific direction in a vacuum container, and provides a truncated cone-shaped umbrella-shaped vacuum gauge on the gas molecule inlet side of the vacuum gauge. Since multiple bodies are attached in a laminated manner, the structure is extremely simple and can be manufactured at low cost, while the directivity can be significantly strengthened and handling is simple. In addition, since it is possible to completely eliminate the need for cryogens, etc., the degree of freedom in using it in a vacuum system can be increased, and this brings about extremely useful new intellectual effects.

[Brief explanation of the drawing]

Fig. 71 is a longitudinal sectional front view explaining the overall structure and operation of the present invention, Fig. 2 is a longitudinal sectional front view showing another embodiment, Fig. 3 is an explanatory view of the operation of the conventional example, and Figs. 4 and 5. 2A and 2B are longitudinal sectional front views showing structures of conventional examples, respectively. In the figure, 1 is a vacuum gauge, 1a is a gas molecule inlet, 3 is an umbrella-shaped body, and A' is a t-radius gauge. Ward C Riho Ward Shizuku f ~ Law) Mouth Ward 1) Rough Lr) To " + Continued Sodome Ministry (1-1 shot) Bean paste 1wa 58 cm April 20th special old work Naga Towakane 'zu Kazuo-dono l Table of events 4 Sho-Ol + 1958 *; i Patent No. 4 □ i 817 2 Name of the invention Laminated cone-type collimator Directional vacuum gauge using metal 3 Glazed Nagisa 4th generation j〕 Person 〒110 5th amendment Shiri target (1) Meikei 1 book and i wound surface (2, 1 of the multiple sleeves. -366-

Claims (1)

[Claims] In a vacuum gauge with directivity that senses the gas molecules flying from the special 1 side [fco1] in a vacuum vessel, a truncated cone-shaped umbrella-shaped body is placed on the gas molecule inlet side of the arrangement A gauge. A directional vacuum gauge using a laminated cone-type collimator characterized by multiple laminated cone collimators.