JPS59169370U - 液相エピタキシヤル膜成長用基板ホルダ - Google Patents

液相エピタキシヤル膜成長用基板ホルダ

Info

Publication number
JPS59169370U
JPS59169370U JP6318783U JP6318783U JPS59169370U JP S59169370 U JPS59169370 U JP S59169370U JP 6318783 U JP6318783 U JP 6318783U JP 6318783 U JP6318783 U JP 6318783U JP S59169370 U JPS59169370 U JP S59169370U
Authority
JP
Japan
Prior art keywords
substrate holder
liquid phase
epitaxial film
film growth
phase epitaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6318783U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6321577Y2 (enrdf_load_stackoverflow
Inventor
勝井　明憲
税男 上村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP6318783U priority Critical patent/JPS59169370U/ja
Publication of JPS59169370U publication Critical patent/JPS59169370U/ja
Application granted granted Critical
Publication of JPS6321577Y2 publication Critical patent/JPS6321577Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP6318783U 1983-04-27 1983-04-27 液相エピタキシヤル膜成長用基板ホルダ Granted JPS59169370U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6318783U JPS59169370U (ja) 1983-04-27 1983-04-27 液相エピタキシヤル膜成長用基板ホルダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6318783U JPS59169370U (ja) 1983-04-27 1983-04-27 液相エピタキシヤル膜成長用基板ホルダ

Publications (2)

Publication Number Publication Date
JPS59169370U true JPS59169370U (ja) 1984-11-13
JPS6321577Y2 JPS6321577Y2 (enrdf_load_stackoverflow) 1988-06-14

Family

ID=30193379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6318783U Granted JPS59169370U (ja) 1983-04-27 1983-04-27 液相エピタキシヤル膜成長用基板ホルダ

Country Status (1)

Country Link
JP (1) JPS59169370U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015198213A (ja) * 2014-04-03 2015-11-09 新日鐵住金株式会社 エピタキシャル炭化珪素ウェハの製造方法及びそれに用いる炭化珪素単結晶基板のホルダー

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5114051U (enrdf_load_stackoverflow) * 1974-07-18 1976-02-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5114051U (enrdf_load_stackoverflow) * 1974-07-18 1976-02-02

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015198213A (ja) * 2014-04-03 2015-11-09 新日鐵住金株式会社 エピタキシャル炭化珪素ウェハの製造方法及びそれに用いる炭化珪素単結晶基板のホルダー

Also Published As

Publication number Publication date
JPS6321577Y2 (enrdf_load_stackoverflow) 1988-06-14

Similar Documents

Publication Publication Date Title
JPS5845360U (ja) サブストレ−トの着脱装置
JPS59169370U (ja) 液相エピタキシヤル膜成長用基板ホルダ
JPS5856274U (ja) チユ−ブ類取付用インシユレ−タ
JPS58119962U (ja) 半田付け用治具
JPS6093418U (ja) ケ−ブル保持具
JPS59122932U (ja) インストルメントパツドの取付構造
JPS5977886U (ja) 魚釣り用横うき
JPS5844183U (ja) ホ−ス金具の装着装置
JPS6099181U (ja) 貼付装置
JPS59124240U (ja) 竪樋支持具
JPS5939937U (ja) 半導体ウエハ支持台
JPS5826442U (ja) 容器の支持具
JPS6042814U (ja) パネル体
JPS5834968U (ja) Ｌｐｅ膜成長用基板ホルダ
JPS5826839U (ja) エノキ葺栽培用具
JPS604911U (ja) 水平器付測量定規
JPS5813243U (ja) 哺乳瓶支持装置
JPS59131384U (ja) スク−タの長尺物キヤリア
JPS58111942U (ja) Ｌｐｅ膜成長用基板ホルダ
JPS5990304U (ja) 正逆両用型耕耘爪の取付装置
JPS58179472U (ja) リキツドタンク取付具
JPS59149147U (ja) スピンナ−塗布装置
JPS59107921U (ja) エキゾ−ストパイプの取付ブラケツト構造
JPS6068574U (ja) 正しい姿勢で書ける器具
JPS59114655U (ja) 受話器の保持具