JPS59169349U - 蒸着装置用の覗き窓 - Google Patents

蒸着装置用の覗き窓

Info

Publication number
JPS59169349U
JPS59169349U JP6350683U JP6350683U JPS59169349U JP S59169349 U JPS59169349 U JP S59169349U JP 6350683 U JP6350683 U JP 6350683U JP 6350683 U JP6350683 U JP 6350683U JP S59169349 U JPS59169349 U JP S59169349U
Authority
JP
Japan
Prior art keywords
vapor deposition
peephole
deposition equipment
permanent magnet
deposition apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6350683U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0210119Y2 (enrdf_load_stackoverflow
Inventor
実 長田
千代倉　守成
Original Assignee
日立コンデンサ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立コンデンサ株式会社 filed Critical 日立コンデンサ株式会社
Priority to JP6350683U priority Critical patent/JPS59169349U/ja
Publication of JPS59169349U publication Critical patent/JPS59169349U/ja
Application granted granted Critical
Publication of JPH0210119Y2 publication Critical patent/JPH0210119Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6350683U 1983-04-27 1983-04-27 蒸着装置用の覗き窓 Granted JPS59169349U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6350683U JPS59169349U (ja) 1983-04-27 1983-04-27 蒸着装置用の覗き窓

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6350683U JPS59169349U (ja) 1983-04-27 1983-04-27 蒸着装置用の覗き窓

Publications (2)

Publication Number Publication Date
JPS59169349U true JPS59169349U (ja) 1984-11-13
JPH0210119Y2 JPH0210119Y2 (enrdf_load_stackoverflow) 1990-03-13

Family

ID=30193692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6350683U Granted JPS59169349U (ja) 1983-04-27 1983-04-27 蒸着装置用の覗き窓

Country Status (1)

Country Link
JP (1) JPS59169349U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0210119Y2 (enrdf_load_stackoverflow) 1990-03-13

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