JPS59165616A - Method of boring rectilinear minute deep hole of 0.1 mm or more to ceramic - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in the method of drilling fine linear deep holes in ceramics with a hole diameter of 0.1 mm or more and a depth of 3III11 or more.

Ceramics are used in all technical fields today, and although they have excellent hardness and wear resistance, it is common knowledge that ceramics are difficult to machine, not just for drilling. For example, in a ceramic vacuum chuck plate, 0.1ml1 is used for reasons such as clogging prevention.
It is necessary to drill fine deep holes with a diameter of 31III1 or more and a depth of 31III1 or more, but conventionally, the holes were drilled with a drill or laser of 0.1 mm or more in the ceramic molded body before and after firing. Although light beams are used to deal with the problem, in the case of drills, although the target ceramic molded body is extremely hard, the drill itself lacks hardness and strength, or the removed powder generated during drilling is deeper than 3n+m. If this occurs, the drilling depth may be limited because the drill bit itself may break due to the drill remaining in the hole without being removed. On the other hand, in the case of laser beams, there is a similar problem that not only is there a limit to the perforation depth, but also the processing cost is significantly increased.

The present invention was developed in view of the above-mentioned conventional circumstances, and its purpose is to provide a low-cost method for easily and easily forming deep linear micropores with a diameter of 0.1 ml or more in ceramics. We aim to provide the following.

Its basic structure consists of a process in which it is shaped by casting, extrusion, roll forming, or tape forming, and a needle-like object of 0, im mm or more is rotated inside the shaped ceramic body, which can be plastically deformed. In this method, the steps of entering the molded body while heating and firing it to obtain a ceramic molded body are sequentially performed.

The present invention will be explained below based on embodiments.

The present invention will be explained using a casting method for a plate (1B) in a vacuum chuck plate (B), which is an example of its implementation. First, in (A), when the upper and lower molds (A') (A') of the plaster mold are matched, there is a casting space (3) for forming the plate (1B) inside.
〉 and the bottom surface of the plate (1B) to form a sealed chamber (5). A'
) (A') is filled with ceramic slurry (1) by casting from the pouring port (8).

The ceramic slurry (1) is prepared in the form of a slurry by blending ceramic powder such as alumina with clay, an organic binder, water, etc. as a plasticizer.

Next, the slurry (1) is poured into the casting mold (A), which is then left for a certain period of time and then removed from the mold to form a plastically deformable green ceramic body (1A).

This ceramic body (1A) has a thickness of 3 mm to 5Qml, which corresponds to the thickness of the plate (1B) that will eventually be obtained, and SKS, SKH with a diameter of 0.1ml1 to 5II1m.
, A hard needle-like object (2) made of cemented carbide or the like is introduced while rotating to make a linear deep micropore (C) through it.At this time, naturally, the ceramic body (1A) is inserted into the green substrate. Since it is a stage and has deformability, the needle-like object (2) can enter without resistance, and the exclusion matrix that is supposed to be removed is the needle-like object (2).
2) Since the material is pushed away around the holes, the holes can be easily and easily drilled without any removed matter remaining in the holes as in the case of ceramic molded bodies after drying and firing. In addition, needle-like objects (
The drilling method according to 2) is performed using a milling machine and a jig (9).
Various methods can be considered, such as mounting it on a drilling machine or the like.

Next, this ceramic body (1A) is fired to obtain a ceramic molded body (2Δ) (a plate (IB) having linear micropores (C)).

This plate (1B) connects the backing material (6) with the set screw (7).
Screw the workpiece (D>) onto the upper surface.
Use as a vacuum chuck plate (B).

The present invention is not intended only for the plate (1B) of the vacuum chuck plate (B) for cutting and polishing flat objects, but also for connecting the nib of a mechanical pencil or the like, or optical fibers together. 7 for optical connectors
Ceramic components with micro holes such as errules, nozzles, and micro wire guides are also targeted.

The present invention is applicable to casting molding, extrusion molding, roll molding,
Shaping process by either tape molding, shaped plastically deformable ceramic two 5-
-IJ The process of rotating a needle-shaped object of 0.1 mm or more into the cube body and the process of firing it to obtain a ceramic molded body are carried out in sequence, making it easy and simple to 0.1 mm or more.
Linear fine deep holes with a hole diameter of 1111111 mm or more can be formed in ceramics, and the processing cost is extremely low.

Therefore, the intended purpose can be achieved.

[Brief explanation of drawings]

Fig. 1 is a longitudinal cross-sectional view showing the state of filling the casting mold in the hole-opening method of the present invention, Fig. 2 is a longitudinal cross-sectional view showing the state in which the kugiakimono is rotated and entered after demolding, and Fig. 3 is FIG. 4 is a longitudinal cross-sectional view of a state in which a workpiece is attracted to a vacuum chuck plate, and FIG. 4 is a plan view thereof. In addition, in the figure (A>... Casting mold (1)... Slime (1A)... Ceramic body (2)... Needle-shaped object (2A)... Ceramic molded body ≧--6 1 (C)... Linear fine hole patent applicant Toto Kiki Co., Ltd. 71 Procedural amendment (to the Patent Office Examiner) 1. Indication of the case 1982 Patent Application No. 31928 2. Name of the invention Ceramic Manufacturing method of molded object 3, relationship with the case of the person making the amendment Patent applicant name (name)
(AO8) Toto Kiki Co., Ltd. 4, Agent address: 5-14-7-5, Hakusan, Bunkyo-ku, Tokyo, Date of amendment order (voluntary amendment) Showa year, month, day, 6, Subject of amendment 7, Contents of amendment Amendment (1) The title of the invention in the description is amended to "method for manufacturing ceramic molded bodies" as attached. (2) Amend the claims of the specification as shown in the attached sheet. (3) Page 1, line 15 to line 17 of the specification r This invention... is related. " is amended to "The present invention relates to a method for manufacturing a ceramic molded body." (4) "Cast molding..." on page 3, line 2 to line 8 of page 3 of the specification shall be amended as follows. ``A needle-like object with a diameter of 0.1 mm or more and 5 mm or less is inserted while rotating into a plastically deformable ceramic body that has been shaped by casting, extrusion, roll forming, or tape forming. (5) Specification, page 6, line 1 to line 2 of the same page r 0
, 1111111...process"ro, 1mm or more,
The process has been corrected to ``a step in which a needle-shaped object with a diameter of 5 mm or less is introduced while rotating to drill a linear narrow beam hole with a diameter of 3 mm or more''. (6) Change the “method of drilling” on page 6, line 9 of the specification to “
"Manufacturing method". Patent applicant: Totokiki Co., Ltd. Manufacturing method as claimed in the patent. 2- Procedural amendment April 27, 1982 1. Indication of the case 1982 Patent Application No. 31928 2. Name of the invention Method for manufacturing ceramic molded bodies 3. Person making the amendment Relationship with the case Patent application Name of person (AO8) Totokiki Co., Ltd. 4, Agent 5, Date of amendment order (voluntary amendment) Showa year, month, day 6, Subject of amendment (1) Column for title of invention in specification (2) Claims column of the specification (3) Detailed explanation of the invention column of the specification (4) Brief explanation of drawings column of the specification 7, contents of the amendment As per attached sheet 3 - Amendment (1) ) The title of the invention in the specification is amended to "method for manufacturing a ceramic molded body." (2) Amend the claims of the specification as shown in the attached sheet. (3) "The present invention relates to..." in lines 15 to 17 of page 1 of the specification is replaced with "The present invention relates to a method for manufacturing a ceramic molded body." ”. (4) "Cast molding..." on page 3, line 2 to line 8 of page 3 of the specification shall be amended as follows. "A needle-like object with a diameter of 0.1 mm or more. A linear hole with a size of 3# or more is drilled, and then dried and fired.'' 1-(5) Specification, page 6, line 1 to line 2 of the same page, r0 ．．
1 mm = process" is corrected to IQ, "process of drilling a linear, narrow hole of 3 # or more by rotating a needle-shaped object with a diameter of 1 # or more and 5 mm or less. (6) Change the “method of drilling” on page 6, line 9 of the specification to “
"Manufacturing method". Patent applicant: Totokiki Co., Ltd. Scope of patent claims

Claims (1)

[Claims] A process in which a needle-like object of 0.1 mm or more is rotated and inserted into a plastically deformable ceramic body shaped by casting, extrusion, roll forming, or tape forming, followed by drying and firing to form a ceramic body. 0.0. l
A method of drilling a linear fine deep hole with a hole diameter of 1 m or more and a depth of 3 mm or more.