JPS5916556B2 - Laser processing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION 5. The present invention relates to a laser processing apparatus, and particularly to a laser processing apparatus that moves a laser beam to process a side surface of a workpiece.

Conventionally, such a laser processing apparatus has used a relatively rough movement mechanism in the X and Y directions of only the main drive system, and a relatively precise vertical movement mechanism in the Z direction (up and down).

In addition, there are reflectors above and below the tube that forms the optical path in the z direction to change the irradiation direction of the laser beam from downward to lateral, but this upper reflector's angle with respect to the beam is adjusted by slight fluctuation j5. There is a device that changes the irradiation angle of the emitted laser beam. In such a device, the movement of the laser beam in the X3Y axis directions is rough, so the processing accuracy is not sufficient.

In addition, there is a limit to the angle change of the reflecting mirror, and
The shape and focal depth of the laser spot passing through the lens differ depending on the angle change of the upper reflector due to the difference in the incident position on the lens that condenses and irradiates the laser beam, which causes a decrease in processing quality. I was getting used to it. i5 An object of the present invention is to provide a laser processing apparatus that moves a laser beam and has good processing accuracy.

The key point of the present invention is to add a movement mechanism that allows fine movement in a small range for movement in the This allows it to rotate around the z-axis.

In this way, it becomes possible to precisely process the workpiece. FIG. 1 is a perspective view of a laser beam processing apparatus according to an embodiment of the present invention.

The laser beam emitted from the laser generator 1 passes through the protective cover 2, is bent horizontally at right angles by the reflector in the reflector mounting part 3, passes through the protective cover 2 in the Y direction, and is reflected by another beam. It is again bent in the X direction by the reflecting mirror in the mirror mounting part 3. This light passes through the protective cover 2 in the X' direction and is bent vertically downward in the Z direction by the reflector in the last reflector mounting part 3. A condensing lens and a lower reflecting mirror are installed inside the rotating cylinder 14, and the laser beam 15 is bent laterally by the reflecting mirror and is irradiated onto the workpiece 16. The laser beam is covered by the expandable protective cover 2 and the cover of the reflector mounting part 3 so that there is no risk of leakage to the outside. The reflector mounting part 3 where the laser beam from the laser generator 1 is first reflected is the saddle 1
0, and when the feed screw 9 is rotated by the motor 4, the saddle 10 moves in the x direction, and therefore the reflector mounting part 3 also moves in the x direction.

At this time, the crosshead 12 fixed perpendicularly to the saddle 10 also moves in the X direction. The other end of the crosshead 12 is designed to slide freely on a rail provided on the table loading platform 17, and when the feed screw 9 is rotated by the motor 5, the saddle 11 moves in the Y direction. Since the above-described mechanical system allows movement in the X and Y directions, a conventional laser beam machining device has a mechanism for moving in the Z-axis direction attached to the saddle 11. In the present invention, as shown in the embodiment shown in FIG.
It moves slightly in the ′ direction.

A motor 7 is provided on the side surface of this L-shaped table 19, and the table 13 is moved up and down in the Z direction by this motor.
A reflecting mirror mounting portion 3 is attached to the L-shaped table 19 and the saddle 11, and the laser beam up to this point passes on one plane. A rotating cylinder 14 rotated by a motor 8'VC is attached to the table 13 which moves up and down along the outer vertical surface of the L-shaped table 19.

Therefore, the laser beam 15 irradiates the workpiece 16 while rotating horizontally. In the conventional laser beam processing device, movement in the z direction was of course possible, but this movement required moving the side of the saddle 11 up and down and rotating its upper reflector, making the direction of the emitted laser beam unnatural. It was something to change. In the present invention, as in this embodiment, the laser beam 15 can be moved in the Z direction along with an L-shaped table 19 that can be moved slightly in the X direction, and the laser beam can be rotated in the horizontal direction by the rotary cylinder 14. It became possible.

Therefore, even if the surface of the plate-shaped workpiece 16 is uneven, irradiation processing can be performed perpendicularly to the surface. This, together with the addition of the fine movement machine in the X' direction, greatly improves the machining accuracy of the workpiece. FIG. 2 is a vertical sectional view taken along line V-5 in FIG. 1.

That is, this figure shows a cross section including the X' axis, and the motor 6 is attached to the saddle 11 that moves on the crosshead 12. When the motor 6 rotates, the fine-pitch feed screw 9 rotates, and the The L-shaped table 19 that is screw-fitted is moved in the X7 direction. A motor 7 is attached to the L-shaped table 19, and when the motor 7 rotates, a bevel gear attached to the shaft of the motor 7 is rotated to turn the feed screw 9. A portion of the table 13 is screwed into the feed screw 9, and its side surface is in contact with the side surface of a recess made in the vertical part of the L-shaped table 19, so when the feed screw 9 rotates, the table 13 moves up and down. Move to. A motor 8 shown in FIG. 1 is attached to the outer side of the table 13, and a worm gear 21 is meshed with a worm 20 attached to its rotating shaft. The shaft of this worm gear has a hole, and a rotating cylinder 14 is fixed to this shaft. The laser beam 15 passes through the shaft hole of the worm gear 21, is reflected by the prismatic right-angle mirror 22, and irradiates the workpiece 16. The condensing lens 23 condenses the laser beam into a small spot. In the above configuration, when the worm 20 is rotated by the motor 8 shown in FIG. 1, the rotating cylinder 14 rotates and the laser beam 15 is swung horizontally. When the workpiece 16 is in the relative position shown in FIG. 2, ie in the X/direction, it is possible to finely adjust the distance to the workpiece 16 by the motor 6. The above embodiment has the following effects.

If a fine movement mechanism in the 1X' direction is also used, the laser beam can be moved minutely and smoothly with respect to the surface of the workpiece, allowing precise processing.

Since the reflected light from the reflecting mirrors above and below the 2Z axis is always at right angles, the shape of the spot of the laser beam that irradiates the workpiece can be made circular and small without distortion.

3. Machining accuracy is improved because the laser beam can always be applied perpendicularly to curved workpieces.

As described above, the present invention has the effect of improving the processing accuracy of a laser processing apparatus that performs processing by moving a laser beam.

[Brief explanation of drawings]

FIG. 1 is a perspective view of a laser beam processing apparatus according to an embodiment of the present invention, and FIG. 2 is a vertical sectional view taken along line V-V' in FIG.

Claims (1)

[Claims] 1. In a laser processing device capable of processing a workpiece by moving a laser beam irradiation position in the X direction, Y direction, and Z direction that are orthogonal to each other, fine movement in the X direction is provided. and a mechanism for rotating the irradiation direction of the laser beam about the Z-direction axis. 2. The mechanism capable of finely moving in the X direction is configured such that the L-shaped table 19 is mounted on the saddle 11 that moves in the Y direction so as to be finely movable in the X direction, and the L-shaped table 19 is moved finely in the Z direction. 2. The laser processing apparatus according to claim 1, wherein the Z-direction moving mechanism is movably mounted. 3 The mechanism for horizontally rotating the irradiation direction of the laser beam about the Z-direction axis is the L-shaped table 19.
a worm 20 provided on the table 13 so as to be movable along the Z-direction plane; a worm gear 21 meshing with the worm 20 and having a hollow rotating shaft; and a rotating cylinder attached to the hollow rotating shaft of the worm gear 21. 14. A laser processing apparatus according to claim 1 or 2, comprising: