JPS59163546A - Sample moving device - Google Patents

Abstract

PURPOSE:To execute easily an operation of replacement of a sample, and to reduce a fault caused by gnawing of a driving system, etc. by driving an upper moving base by a chain, constituting it so that it can move freely on a lower moving base, and guiding all bearing parts by a rotary bearing using a rolling contact. CONSTITUTION:Total four pieces of plates 57 to which two bearings 56 are attached respectively are placed on a fixed base 55 in a vessel 51. This bearing 56 guides a lower moving base 58 in the direction as indicated with an arrow 59. The fixed base 55 is provided with four bearings 60, and guides the lower moving base 58 in the direction as indicated with an arrow 69. The lower moving base 58 moves in the forward and backward directions as indicated with an arrow 61 by an engagement of a pinion 79 and a rack 80 by driving of a rotation leading-in device 78. Also, a guide groove 82 is worked in the same direction as the moving direction, and in this groove, a bearing 63 attached to an upper moving base 62 moves in the direction as indicated with the arrow 61. Driving of this upper moving base 62 is executed by a chain 81 guided by a sprocket 65 whose both ends are supported by a rolling rotary bearing 64 on the lower moving base 58 and he fixed base 55.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to an improvement in a sample moving device used in an analysis device, a vapor deposition device, etc., which moves, receives, and transfers a sample under low vacuum pressure. .

[Background technology]

In order to obtain a high-quality thin film, it is essential to perform deposition in a low vacuum environment with extremely few impurities.Moreover, in order to observe the thin film, for example Auger analysis, which performs composition analysis4, and impurity In order to obtain a sample r without any deposition, there is a cleaning process in which the sample is sputter-etched before vapor deposition.

Auger analysis and sputter etching cannot be performed in the same vacuum chamber as vapor deposition due to contamination.
This vapor deposition apparatus requires an analysis chamber and a pretreatment chamber as well as a vapor deposition chamber. That is, in such a vapor deposition apparatus, a sample moving device for transporting the same sample phase to the vapor deposition chamber 5 for analysis and pretreatment chamber is essential.

In addition, for equipment that performs analysis at low vacuum pressure, in order to shorten the evacuation time and increase efficiency, the sample exchange station is attached to the analysis chamber via a valve so that the analysis chamber is not exposed to the full atmospheric pressure when replacing the sample. .

That is, when replacing the sample, the following procedure is followed.

(1) Close the valve. (11) Open the sample exchange chamber to the atmosphere and sample? Pay. 011) Evacuate the sample exchange chamber and apply vacuum pressure. (iv) Open the pulp r. (V) Sample from sample exchange room to analysis room? transport. IVD valve? close.

Therefore, even in this analyzer, a moving device for transporting the sample from the exchange room to the analysis room becomes indispensable.

Also, with these devices, as mentioned above, distillation 1 analysis can be performed at low vacuum pressure. What should I do? C gas released from the walls of the vacuum chamber and the surface of the moving device? Low vacuum pressure cannot be maintained unless the exhaust system is used constantly.

That is, since the capacity of the vacuum evacuation system is limited, it is necessary to reduce the amount of released gas as much as possible. Therefore, only limited materials such as stainless steel and oxygen-free copper, which emit less gas, can be used.

In addition, in order to release moisture adhering to the walls of the vacuum chamber, which is the main component of the released gas, in a short time, the entire vacuum chamber is heated at 150 to 200 C for several hours to force the moisture away from the walls. It is necessary to carry out a baking treatment to release it.

On the other hand, is the sample moving smoothly? If a lubricant is used on the entire guide surface in order to obtain a lubricant, a large amount of gas will be released from the lubricant over a long period of time, which will have an adverse effect on analytical deposition. give. Moreover, this gas becomes the above-mentioned released gas. Therefore, lubricants cannot be used in moving devices used within low vacuum pressures.

Unfortunately, the sample moving device used in such an apparatus has a low release gas and is not used for baking. It is required that there is no scratching in the contact area when the contact is made.

FIG. 1 shows a conventional sample moving device. Sample movement mechanism? The contained container 1 is housed in a low vacuum container 4 to which a sample stage 3 is fixed via a gate pulp 24.

A linear rolling bearing 27 is attached to the upper moving table 7 on two long guides 6 placed on the fixed table 5 in the container 1.
moves. That is, the upper moving table 7 moves in the direction of the arrow. This drive is carried out by the pinion 9 at the tip of the rotating introducer 8 attached to the container 1 and the rack 10 on the upper moving table 7.
It is done by interlocking. Furthermore, a guide surface 12 is machined in the upper moving table 7 in the same direction as the moving direction, and a bearing 14 attached to this inner metal upper moving table 13 is moved by rollers. A wire 15 is fixed to both ends of the upper moving table 13. This wire 15 is connected to the boot 9 on the upper moving table 7.
Direction at 16? Each of them is bent by 180 degrees and fixed to a fixed base 5. That is, as shown in FIG. 2 to illustrate the driving principle, when the upper moving table 33 is moved to the right by the distance indicated by the arrow 34 by the rack 31 and the pinion 32, the upper moving table 3
5 moves by exactly twice the distance that the upper moving table 33 moves as indicated by the arrow 36. That is, the upper movable table 13 moves by a short period of time 1, which is twice as long as the upper movable table 7 in FIG. At this time, a sample holder 18 that holds the sample 17 is placed on the upper moving table 13.

Here, the forward direction of the upper moving stage 13 as indicated by the arrow 11 is the point at which the 17 samples are exchanged with the sample stage 3. When replacing the sample, move the upper moving table 13 to the front and hook the 19 bottles on the sample holder 18 with the guide 20 on the sample table 3. conduct. At this time, since the guide 20 on the sample stand 3 catches the bottle 19t, the rotation mechanism 28 that rotates in the direction of the arrow 21 is also placed on the sample stand 3 and is counterfeited. Furthermore, for alignment during exchange, an X moving table 23 that moves in the direction of arrow 22 and a Z moving table that moves in the direction of arrow 24 are attached to the lower part of the sample stage 3. In order to ensure this replacement, the low vacuum container 4 is equipped with an observation glass window 2 for observing the inside.
6 is attached.

However, the above-mentioned device has the following drawbacks.

(1) A special rotational movement is required on the sample stage where the sample is to be exchanged in order to hook it onto the pin of the sample holder.

That is, since a rotational movement mechanism is required to introduce this movement from outside the vacuum, the apparatus is complicated and often malfunctions.

(2) When exchanging a sample, the rotating introducer r that drives both the rotational movement of the sample stage and the linear movement of the moving stage must be moved at the same time, making the operation complicated.

(3) Since the guide of the upper moving table is long and thin, the entire device becomes large and a large amount of gas is released. In addition, if the gap between the shaft and the bearing is increased to eliminate the thermal deformation that occurs in the guide during baking, (1) stress concentration will occur due to moment force between the ball in the bearing and the shaft; (11) Due to the gap in this part, the movement of the tree becomes worse.

(4) Since the pinion is supported on a cantilever, a large moment load is applied to the support portion during driving, so it cannot withstand long-term use.

For the above reasons, is it a full-fledged movement? The vacuum equipment equipped with
The sample exchange operation is complicated and takes a long time, resulting in poor reliability. Moreover, there are many failures due to galling of the drive system and guide, and the time required for evacuation is also long.

[Purpose of the invention]

Therefore, an object of the present invention has been made to address the above-mentioned drawbacks, and is to provide a vacuum apparatus such as the one described above, in which the sample exchange operation is easy and there are fewer failures due to galling of the drive system, etc. The goal is to provide mobile devices.

[Summary of the invention]

In order to achieve all of the above objects, the present invention employs a chain-driven structure for the upper moving table so that it can move freely on the upper moving table. Furthermore, all bearings are guided by rotary bearings that use rolling contact, have a low coefficient of friction, and are not rudded. In addition, the structure allows sample exchange to be performed only by moving the moving table in one direction, which has a positioning guide using a rod, which provides good operability during light exchange, and can be used in a low-vacuum environment with fewer failures. This is a device that can do this.

[Embodiments of the invention]

FIG. 3 is a diagram showing an embodiment in which the sample moving device according to the present invention is applied to an analysis device. In the figure, a container 51 containing a sample moving mechanism is attached to an analysis chamber 53 with a low vacuum pressure via a gate valve 52. A sample stage 54 is fixed in the analysis chamber 53. A total of four plates 57 each having two bearings 56 are arranged on a fixed stage 55 in the container 51.
The upper moving table 58 guides in the direction of arrow 59. still,
In addition, the fixed table 55 is provided with four bearings 60 for guiding the upper moving table 58 in the direction of the arrow 69. The upper moving table 58 is connected to a pinion 79 driven by a rotation introducer 78 attached to the outside of the container 51.
By engaging with the upper rack 80, it moves in the front and back direction of the arrow 610.

Further, a guide groove 82 is machined in the upper moving table 58 in the same direction as the moving direction. The bearing 63 attached to the upper moving table 62 moves in the direction of arrow 61. The upper moving table 62 is driven by a sprocket 6 supported by rolling bearings 64 at both ends on the upper moving table 58 and the fixed table 55.
This is done with a chain 81 guided by 5. FIG. 4 shows a diagram of the principle of this drive. The upper moving table 9 is placed on the upper moving table 91.
2 are attached one on top of the other, and a rack 93 provided on the upper moving table 91 is connected to a pinion 98 attached to a rotation introducer 94.
The upper moving table 91 moves by driving the upper moving table 91. At this time,
The upper moving table 92 of the above-mentioned plow is located exactly 2nd of the upper moving table 91.
Move twice as far. The upper moving table 92 also rotates the introducer 95 over the upper moving table 91 with chains 97 attached to both ends.
By rotating the sprocket 96 attached to the tip of the upper moving table 91, it is possible to move freely and without slipping independently of the movement of the upper moving table 91. A pawl 67 and a guide plate 68 are mounted on the upper movable table 62 shown in FIG. 3 by means of springs 66 and whose movement is restricted in the vertical direction indicated by arrow 59 and the horizontal direction indicated by arrow 69.

The guide plate 68 is placed in the receiving portion 83 of the sample holder 70 . Here, the bottle 71 that is attached to the sample holder 70 is engaged with the pawl 67. That is, the sample holder 70 is
It is fixed to the upper moving table 62. At this time, the upper moving table 62
moves in the direction shown by the arrow 72, and when the kite rod 73 attached to the upper moving stage 58 enters the guide hole 74 of the sample stage 54, the upper moving stage 62 approaches the sample stage 54, and the kite rod 73 attached to the upper moving stage 58 approaches the sample stage 54,
When the sample holder 70 enters the leaf spring 75 and hits the stopper 83, the rim 67 comes off the pin 71, and the sample holder 70 is transferred to the sample table 54. A viewing window 76 is installed in the analysis room for the purpose of observing this sample exchange.

〔Effect of the invention〕

By having the above structure, the present invention provides (i)
Sample exchange is possible with only one-axis linear feed of the sample moving mechanism, which simplifies operation and falsification of the entire device.

(2) Positioning when replacing the sample is possible with the movable stage guide (see) and the guide hole on the sample stage.The upper movable stage is driven by a chain, which prevents slipping, ensuring reliable replacement. I'll come.

(3) Since the movable table is mounted on a relatively small table, the entire apparatus becomes compact. Therefore, less gas is released from the surface of the component material, making the sample moving device suitable for low vacuum pressure devices.

(4) The rotating drive binions and sprocket bearings are all supported at both ends of rolling bearings.
Stable for long periods of time with high degree of topography due to less damage due to moment loads? Since it is possible to rotate at a constant angle of 1° or more, it has become possible to create a sample moving device that is easy to operate, has few failures, and is suitable for low vacuum pressure devices.

This sample moving device is particularly applicable to Auger electron spectrometers, ESCA devices, molecular beam evaporation devices, etc. that use low vacuum pressure. In addition, if you need to move a sample over a long distance, you can use multiple sample transfer racks to meet the above objectives. What can be achieved is clear.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of a conventional sample moving device, FIG. 2 is a schematic diagram of the principle of movement of a conventional sample moving device, FIG. 3 is a perspective view of a moving device according to the present invention, and FIG. 4 is a perspective view of a moving device according to the present invention. Schematic diagram?
show. 1... Container, 4... Vacuum container, 11... Arrow, 1
5... Wire, 20... Guide, 32... Binion, 52... Gate valve, 60... Bearing, 8
1... Chain, ■ 1 Figure 2

Claims (1)

[Claims] 1. The multiple rollers on the fixed base fixed inside the container under vacuum pressure are rotary bearings, and the guide surface is long in the direction of back and forth movement.
A rack that engages with a binion that connects to a rotating introducer on the outside of the pipe, and sprockets at both ends? A rolling bearing that supports an upper moving table and moves on the inner surface of the millet in the lower moving table? holding the sample, wrapping it around several sprockets on the upper moving table and the fixed table,
Furthermore, the sprocket that connects to the above-mentioned rotation introducer outside the pipe and the chain that engages with each other @? A sample moving device characterized by stacking fixed upper moving tables and using a 9-turn bearing for bearing rollers including guides.