JPS59162283A - Washing device - Google Patents

Abstract

PURPOSE:To improve the effect of washing etched products, etc. by connecting organically a liquid feed tank, washing tank, recovering tank and discharging section via valves and segmenting the inside of the washing tank to a plurality thereby making the recovery of treated liquid and the water exchange in the washing tank automatic. CONSTITUTION:An etching liquid, etc. are primarily recovered in a washing tank 7 in the stage of cleaning a material subjected to the formation, removal, etc. of a film. The recovered liquid is detected with a detector 38 and water is fed from a feed tank to the tank 7. Air is discharged through the through-holes 16a provided on an inside wall 16 and the feed speed of the water is increased. The amt. of the water to be fed is so set that the water is maintained at the level lower than a partition wall 21, thereby preventing the contamination of the water from spreading. A stop valve 28 is opened upon the washing to discharge the water to a discharging tank 30. The discharge is detected with the detector 38 and again the water in the feed tank is fed to the tank 7 and the washing is performed again. The washing is thus accomplished always with fresh water by which the effect of washing is improved.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a cleaning device for post-processes such as film formation and removal using chemical solutions.

Conventional structure and problems Conventional cleaning involves immersing the film in a chemical solution necessary for film formation or removal, and then immersing it in a water tank for a short time to collect most of the chemical solution (
(This is called primary recovery.) Thereafter, as shown in FIG. 1, the sample is immersed in a washing tank 1. Clean water (referred to as pure water) 2 is supplied from a pipe 3, and the supply amount is controlled by a valve to overflow the partition wall 6 by an appropriate amount. That is,
By constantly supplying pure water and allowing the chemical solution dissolved in the water to overflow, it is sequentially diluted and washed with water. In some cases, a separate water washing tank is prepared and the material is immersed again for washing.

However, such a method requires two or more tanks, which increases the size of the equipment when automated.Also, since the chemical solution is removed by overflowing, the chemical solution does not spread out into the washing tank 1, making it difficult to completely remove it. It is difficult to clean, takes a long time to wash with water, and there are problems in terms of washing effectiveness.

OBJECT OF THE INVENTION The present invention solves the above-mentioned drawbacks of the conventional technology, and is aimed at solving the above-mentioned conventional drawbacks.
In addition to making it possible to automatically perform the primary collection of chemical solution and washing with water in a single washing tank, the water in the tank is replaced as many times as necessary and washing is performed with new pure water to improve the washing effect. It is something.

Structure of the Invention The present invention provides a cleaning tank having a volume necessary for immersion of the cleaning items, two discharge ports provided at the bottom of the cleaning tank, a stop valve for opening and closing the discharge ports, and a stop valve for opening and closing the discharge ports. It consists of at least three chambers provided through the inner wall, and the chamber of the inner cylinder 1 of the three chambers is provided with a penetration part of a predetermined height on the inner wall in contact with the cleaning tank, and Room 3 is
An inlet through which the liquid passes and a small through hole above the liquid level of the cleaning tank are provided at the lower part of the inner wall in contact with the cleaning tank, and a height greater than the liquid level of the cleaning tank is provided between the inner wall and the outer wall forming the chamber. It has two liquid supply ports with a partition wall and a liquid supply mouthpiece located at the bottom between the outer wall of the two supply ports and the @ wall, making it possible to downsize the automation equipment for the cleaning process. Furthermore, the washing water can be changed in a short time, improving the washing effect.

DESCRIPTION OF THE EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 2 to 6. Note that the liquid in this example is water. Figure 2 shows the supply tank 6.
It has an internal volume to store the amount of water necessary to supply to the cleaning tank 7 shown in FIG. 3, and is connected to the cleaning tank 7 via a valve 8 and a pipe 9 at the bottom of the supply tank 6. Reference numeral 10 denotes a valve, and water is supplied to the supply tank 6 through this valve 10. Further, a float-type detector 11 for detecting the water surface is provided on the side wall of the supply tank 6. Reference numeral 12 denotes a float, and a photoelectric tube 13. ．． Detected at 14. Pipe 9 is liquid supply port 1
It is connected to the supply mouthpiece 15a on the bottom surface of 5. The first liquid supply port 15 is partitioned by the cleaning tank 7 and the inner coating 6, and a through hole 16a is provided at the upper part of the inner wall 16 at a position above the liquid level of the cleaning tank. It makes up one room.

In the middle of the first liquid supply port 15, a partition wall 21 rises from the bottom surface 2o of the cleaning tank 7 higher than the water surface in the cleaning tank, and forms a gap with the ceiling plate 19 through which water can pass. Matashikiri '4
An overflow portion 22 for collecting overflow water from the cleaning tank via 17118 and a second liquid supply port 23 having the same structure as the first tL supply port 15 are provided. The overflow part 22 is partitioned from the cleaning tank 7 by an inner wall 24, and the height of the inner wall 24 is set lower than the tank wall 25 of the cleaning tank 7, so that the water surface height of the cleaning tank 7 is kept constant. Further, two water outlets 26 and 27 are provided on the bottom surface 2o of the cleaning tank 7. The water passes through these discharge ports 26 and 27 and passes through stop valves 28 and 29 to a discharge tank 30 and a recovery tank 31 installed below the cleaning tank 7.
flowing down.

The overflow part 22 communicates with a recovery tank 31 through a pipe 32, and a discharge port is provided at the bottom of the recovery tank 31, and one side is connected to an external processing tank through a valve 33 with a pipe 34.
The other side passes through the pump 35 to the supply mouthpiece 3 of the liquid supply port 23.
It is piped to 6.

The discharge tank 30 is connected to an external regenerator 37a through a pipe 37.
The recycled water is supplied to the supply tank 6. The cleaning tank 7 and the recovery tank 31 are equipped with a float-type detector 3 for detecting the water surface height in the tank. ．． 8.39 is set.

In the cleaning tank configured as described above, the water stored in the cleaning tank 7 is used to first recover the etching solution, and then the stop valve 21 is opened. The water is collected in a collection tank 31 as shown in Figure 4.
will be collected. A detector 38 in the cleaning tank 7 detects that the primary recovered water in the cleaning tank 7 has been collected. After the detection, the valve 8 of the supply tank 6 is immediately opened to supply the stored water to the cleaning tank 7.

Water passes through the valve 8, the pipe 9, and the liquid supply port 15 and is poured into the cleaning tank 7 within a short time. At this time, air is discharged through the through hole 16a provided in the inner wall 16, thereby increasing the water supply speed. For water supply, the float 12 of the supply tank 6 is connected to the photocell 1.
The supply valve 8 is closed and stopped by shielding the supply valve 4 from light. This state is shown in La) and (b) of FIG.

By setting the amount of water supplied to the cleaning tank 7 to be lower than the partition wall 21 as shown in Fig. 5, the first
At the supply port 15, the water in the cleaning tank 7 and the water in the supply tank are separated by the partition wall 21, thereby preventing the spread of contamination of the water. Washing is performed for a certain period of time with the water in the washing tank 7 in this state.

Thereafter, when the stop valve 28 is opened, the water in the cleaning tank 7 is discharged into the discharge tank 30 in a few seconds.

This state is shown in FIG. 6(c). The valve 8 and stop valves 28 and 29 are of large diameter to shorten the water supply and discharge time. The detector 38 indicates the completion of discharge from the cleaning tank 7.
is detected, and the stop valve 28 is closed. At the same time, the valve 8 opens again and water from the supply tank 6 is supplied again in a few seconds, and the washing is performed again.

By repeating this operation as many times as necessary, you can always wash with fresh water. When the water washing is completed, the stop valve 28 is opened as shown in FIG. 6(C), the dirty water is discharged into the discharge tank 30, and the stop valve 28 is closed. Then collection tank 3
The first recovered water is supplied to the cleaning tank 7 through the second supply port 23 by the pump 36. The supply amount is determined by the detector 3 in the cleaning tank 7.
Controlled by B. With the above steps, the cleaning process can be started again. The supply tank 6 is supplied by opening the valve 1o while the supply valve 8 is closed.

As described above, the primary recovery for recovering the etching solution of the product after etching and the water washing can be automatically and continuously operated. Further, the water in the washing tank 7 can be replaced as much as necessary and in a short time, making the washing effect even higher.

Effect of the invention As described above, a liquid supply tank, a cleaning tank 2 and a recovery tank.

By providing a discharge tank and organically connecting the two with valves and pumps, the primary recovery of the treated liquid from the previous process and complete water exchange of the water in the cleaning tank are automatically performed in one process, producing new pure water. You can perform washing with water as many times as necessary, improving the washing effect.

Also, by separating the tank into two tanks, a collection tank and a discharge tank, the water in the collection tank is used repeatedly and discarded depending on the degree of contamination. The water in the discharge tank has less dirt because most of the dirt from the liquid from the previous process is removed in the primary recovery, and the water is circulated to the supply tank via the pure water regenerating device, which reduces the processing cost.

Providing a liquid supply port with a partition wall in the water supply port of the cleaning tank itself has the effect of separating the water in the cleaning tank from the supplied water and preventing the spread of dirt in the water.

[Brief Description of the Drawings] Fig. 1 is a sectional view of a conventional washing tank, Fig. 2 is a perspective view of a liquid supply tank according to an embodiment of the present invention, and Fig. 3 is a partially broken part of the same washing tank and Figure 4 is a schematic diagram of the cleaning tank showing the discharge of water to the recovery tank, Figures 5 (a) and (b)
), Is') are explanatory diagrams showing the state of water supply and water exchange to the cleaning tank. 6... Supply tank, 7... Cleaning tank, 8...
...Supply valve, 15...First supply port, 2
2... Overflow part, 23... Second
Supply port, 28° 29...fist...stop valve, 31
...0...Recovery tank, 32...Discharge tank.

Claims (2)

[Claims] (1) A cleaning tank with a volume necessary for immersion of the cleaning items, two discharge ports provided at the bottom of the cleaning tank, a stop valve for opening and closing these discharge ports, and a It consists of at least three rooms provided with
The interior phase 1 of the two rooms has a penetration part of a predetermined height on the inner wall in contact with the cleaning tank, and the second and third rooms have an inlet through which liquid passes through the lower part of the inner wall in contact with the cleaning tank. A small through hole is provided above the liquid level of the cleaning tank, and a partition wall with a height equal to or higher than the liquid level of the cleaning tank is provided between the inner wall and the outer wall forming the chamber. A cleaning device having a liquid supply mouthpiece provided at the bottom between the outer wall of the supply port and the partition wall. (2) providing a recovery tank with one side connected to the first discharge port of the cleaning tank and the other side connected to the liquid supply port of the second chamber;
The cleaning device according to claim 1, further comprising a discharge tank, one of which is connected to the second discharge port of the cleaning tank, and the other of which is connected to a regenerating device for regenerating the liquid.