JPS5916134U - Etching device - Google Patents
Etching deviceInfo
- Publication number
- JPS5916134U JPS5916134U JP11100682U JP11100682U JPS5916134U JP S5916134 U JPS5916134 U JP S5916134U JP 11100682 U JP11100682 U JP 11100682U JP 11100682 U JP11100682 U JP 11100682U JP S5916134 U JPS5916134 U JP S5916134U
- Authority
- JP
- Japan
- Prior art keywords
- gas pressure
- etching
- etching device
- emission spectrum
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 title claims description 5
- 238000012544 monitoring process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 238000000295 emission spectrum Methods 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図はすべて本考案の実施例の図面で、第１図はドライエ
ツチングのブロック図、第２図はマイクロ波プラズマエ
ツチング装置のブロック図、第３図は発光スペクトルお
よびガス圧力の時間変化図、第４図、第５図、第６図は
発光スペクトルおよびガス圧力の時間変化図、第７図は
発光スペクトルおよびガス圧力信号強度説明図、第８図
はモニタ信号の交流信号化のためのブロック図、第９図
は平行平板型ドライエツチング装置におけるモニター
ヘッドのとり付は図である。
１・・・・・・エツチング室、２・・・・・・ガス流量
制御器、３・・・・・・高周波電源、４・・・・・・ガ
ス圧力測定端子、５・・・・・・ガス圧力測定器、６・
・・・・・試料、７・・・・・・光透過窓、８・・・・
・・発光スペクトル検知器、９・・・・・・試料台、１
０・・・・・・プラズマ発生領域、１１・・・・・・検
知器、１２・・・・・・容量コンデンサー、１３・・・
・・・増幅器、１４・・・・・・記録計、１５・・・・
・・信号処理器、１６・曲・発振電源、１７・・・・・
・検知器、１８・・・・・・上部電極、１９・・・・・
・下部電極、２０・・・・・・容器、２１・・・・・・
窓、２２・・・・・・モニタヘット部。The figures are all drawings of the embodiments of the present invention, and Fig. 1 is a block diagram of dry etching, Fig. 2 is a block diagram of a microwave plasma etching apparatus, Fig. 3 is a time change diagram of the emission spectrum and gas pressure, and Fig. Fig. 4, Fig. 5, and Fig. 6 are time change diagrams of the emission spectrum and gas pressure, Fig. 7 is an explanatory diagram of the emission spectrum and gas pressure signal intensity, and Fig. 8 is a block diagram for converting the monitor signal into an AC signal. , Figure 9 shows a monitor in a parallel plate type dry etching device.
The attachment of the head is shown in the figure. 1... Etching chamber, 2... Gas flow rate controller, 3... High frequency power supply, 4... Gas pressure measurement terminal, 5...・Gas pressure measuring device, 6・
...Sample, 7...Light transmission window, 8...
... Emission spectrum detector, 9 ... Sample stage, 1
0...Plasma generation area, 11...Detector, 12...Capacitance capacitor, 13...
...Amplifier, 14...Recorder, 15...
・・Signal processor, 16・Song・Oscillation power supply, 17・・・・
・Detector, 18... Upper electrode, 19...
・Lower electrode, 20... Container, 21...
Window, 22...Monitor head section.
Claims (1)
の時間変化によりエツチングの進行状況およびエツチン
グの終点をモニターするためのガス圧力測定器を設けた
ことを特徴とするエツチング装置。What is claimed is: 1. An etching apparatus that uses plasma and is equipped with a gas pressure measuring device for monitoring the progress of etching and the end point of etching based on changes in gas pressure over time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11100682U JPS5916134U (en) | 1982-07-23 | 1982-07-23 | Etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11100682U JPS5916134U (en) | 1982-07-23 | 1982-07-23 | Etching device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5916134U true JPS5916134U (en) | 1984-01-31 |
Family
ID=30257935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11100682U Pending JPS5916134U (en) | 1982-07-23 | 1982-07-23 | Etching device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5916134U (en) |
-
1982
- 1982-07-23 JP JP11100682U patent/JPS5916134U/en active Pending
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