JPS5916123A - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPS5916123A JPS5916123A JP57124669A JP12466982A JPS5916123A JP S5916123 A JPS5916123 A JP S5916123A JP 57124669 A JP57124669 A JP 57124669A JP 12466982 A JP12466982 A JP 12466982A JP S5916123 A JPS5916123 A JP S5916123A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- track
- wires
- shield
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Measuring Magnetic Variables (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は薄膜磁気ヘッドに関するものであり、特に高ト
ラツク密度再生の可能な磁気抵抗効果型薄膜磁気ヘッド
(以下、磁気抵抗ヘッドという)を提供するものである
。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a thin film magnetic head, and particularly to a magnetoresistive thin film magnetic head (hereinafter referred to as a magnetoresistive head) capable of high track density reproduction.
PCM化された音楽信号などを磁気テープなどに記録再
生する手段として、トラックの高密度化が可能なことか
ら、薄膜磁気ヘッドが用いられるようになってきている
。特に再生ヘッドとしては、再生出力が記録媒体速度に
依存しないことなどの理由から、強磁性薄膜の磁気抵抗
効果を利用した磁気抵抗ヘッドが利用されている。この
磁気抵抗ヘッドは構造が簡単であるので高トラツク密度
化が容易という利点を有するが、ヘッド素子部に比して
信号線部は引廻し距離が長いので、高密度化が困難であ
り、ヘッドのトラック密度を制限する要因と々ると考え
られ、これに対して絶縁膜を介して配線を2層にするな
どの対策が施されてきている。Thin-film magnetic heads have come to be used as a means for recording and reproducing PCM music signals on magnetic tapes and the like because they enable higher track density. In particular, as a reproducing head, a magnetoresistive head that utilizes the magnetoresistive effect of a ferromagnetic thin film is used because the reproducing output does not depend on the speed of the recording medium. This magnetoresistive head has a simple structure and has the advantage of being easy to increase track density. However, the signal line section has a longer route than the head element section, so it is difficult to increase the track density. It is thought that there are a number of factors that limit the track density, and countermeasures have been taken to counter this, such as using two layers of wiring with an insulating film interposed therebetween.
従来使用されている磁気抵抗ヘッドの構造を第1図に示
す。同図(−)は正面図であり、同図(b)は側面図を
示す。図において、1はNi−Fe等の強磁性薄膜で、
長手方向に異方性がつけられており、無信号時にはTi
などからなるバイアス印加用の導電性薄膜2を流れ
る電流7a、7bの作る磁界により、磁化の方向は電流
の方向とほぼ45°をなす方向に向けられている。3,
5は再生電圧の波長特性を良好にするだめの強磁性材料
よりなるシールドであり、たとえばMn−Znフェライ
トよりなる基板3とNi −Fe よりなる高透磁率
薄膜5(第1図(a)では図示せず)である。信号検出
用電流は金薄膜などよりなるリード線6a、5Qに同極
性で印加され、接地されたリード線6bより流出する。FIG. 1 shows the structure of a conventionally used magnetoresistive head. The figure (-) is a front view, and the figure (b) is a side view. In the figure, 1 is a ferromagnetic thin film such as Ni-Fe,
It has anisotropy in the longitudinal direction, and when there is no signal, Ti
Due to the magnetic field created by the currents 7a and 7b flowing through the conductive thin film 2 for bias application, the direction of magnetization is directed at approximately 45 degrees to the direction of the current. 3,
Reference numeral 5 denotes a shield made of a ferromagnetic material to improve the wavelength characteristics of the reproduction voltage. (not shown). The signal detection current is applied to lead wires 6a and 5Q made of a thin gold film or the like with the same polarity, and flows out from the grounded lead wire 6b.
外部より信号磁界が印加されると強磁性薄膜1の磁化と
電流のなす角θが変化して、強磁性薄膜1の比抵抗が
ρ=ρO十ΔρmaxCO52θ
で示されるように変化して、信号磁界の変化を検出でき
る。ρ。は磁界の加わっていない場合の比抵抗である。When a signal magnetic field is applied from the outside, the angle θ between the magnetization of the ferromagnetic thin film 1 and the current changes, and the specific resistance of the ferromagnetic thin film 1 changes as shown by ρ=ρO+ΔρmaxCO52θ, and the signal magnetic field changes. can detect changes in ρ. is the specific resistance when no magnetic field is applied.
リード線6a 、6cより逆方向に電流を流すのは、磁
気抵抗変化の二乗特性により生じる二次高調波歪を打ち
消すためである。このだめ、各トラックには3本のリー
ド線が必要と々す、たとえばトラックピッチを100μ
m、トラック巾を80μmとした場合、リード線巾2Q
μm2間隔10μmというような非常に高密度の配線を
行なう必要が生じ、ヘッド部分より、配線部分によりト
ラック密度が制限される事態が生じる。なお、4は非磁
性絶縁体層、9は支持基板である。The reason why current flows in opposite directions from the lead wires 6a and 6c is to cancel out second harmonic distortion caused by the square characteristic of magnetic resistance change. However, each track requires three lead wires, for example, the track pitch is 100 μm.
m, if track width is 80 μm, lead wire width 2Q
It becomes necessary to perform extremely high-density wiring with a pitch of 10 .mu.m2, and the track density is more limited by the wiring portion than by the head portion. Note that 4 is a nonmagnetic insulating layer, and 9 is a support substrate.
本発明は、磁気抵抗薄膜のシールド部分を共通配線とし
て使用することにより、リード線の密度を低下させ、高
密度化を可能にするとともに、薄膜ヘッド製造時の歩留
りを上げようとするものである。The present invention aims to reduce the density of lead wires by using the shield portion of the magnetoresistive thin film as a common wiring, thereby making it possible to increase the density and increase the yield when manufacturing thin film heads. .
本発明の実施例について、図面を用いて説明する。Embodiments of the present invention will be described using the drawings.
実施例1
第2図(a)は本発明の薄膜磁気ヘッドの正面図であり
、同図(b)は側面図である。磁気抵抗素子1の中央部
に接続されたリード線8bは図に示すように非磁性絶縁
体層4に開けられた孔10を通してシールド薄膜5(第
2図(a)では図示せず)に接続されており、シールド
薄膜5を共通リード線として外部に取p出されている。Embodiment 1 FIG. 2(a) is a front view of a thin film magnetic head of the present invention, and FIG. 2(b) is a side view. The lead wire 8b connected to the center of the magnetoresistive element 1 is connected to the shield thin film 5 (not shown in FIG. 2(a)) through a hole 10 made in the nonmagnetic insulating layer 4, as shown in the figure. The shield thin film 5 is used as a common lead wire and is taken out to the outside.
なお、3はシールド板、9は支持基板である。Note that 3 is a shield plate and 9 is a support substrate.
この構造によれば、従来1トラック当り3本必要であっ
たリード線が2本ですみ、従来と同一の線l]と線間隔
であればトラックピッチをつめることができる。また、
従来通りのトラックピッチであれば線間隔を広くとれる
ので、ヘッド製造時のほこシなどによる線間の短絡など
が減少して歩留りを向上させることができる。According to this structure, the number of lead wires required per track is two instead of the conventional three, and the track pitch can be reduced with the same line and line spacing as in the past. Also,
If the track pitch is the same as in the past, the line spacing can be widened, so short circuits between lines due to dents during head manufacturing can be reduced, and yield can be improved.
実施例2
第3図(a)は本発明の薄膜磁気ヘッドの他の実施例の
正面図、同図(b)は側面図である。磁気抵抗素 ・
子1の一方の端に接続されたリード線10bは図に示す
ように非磁性絶縁体層4に開けられた孔を通して基板1
2上に形成されたシールド膜11に接続されており、シ
ールド膜11を共通リード線として外部に取り出されて
いる。Embodiment 2 FIG. 3(a) is a front view of another embodiment of the thin film magnetic head of the present invention, and FIG. 3(b) is a side view. Magnetoresistive element ・
The lead wire 10b connected to one end of the substrate 1 passes through a hole made in the non-magnetic insulating layer 4 as shown in the figure.
It is connected to a shield film 11 formed on 2, and taken out to the outside using the shield film 11 as a common lead wire.
この形状のヘッドでは、リード線は各トラック当り2本
であり実施例1のヘッドと比較して配線の本数は少なく
高密度化は容易であるが、本実施例に示すように、シー
ルド膜をリード線の一方の綜として利用すれば、リード
線は各トラック当り1本となりさらに高密度化が可能に
なる。In the head of this shape, there are two lead wires for each track, and compared to the head of Example 1, the number of wires is smaller and it is easier to increase the density. However, as shown in this example, the shielding film is If it is used as one helix of the lead wire, there will be one lead wire for each track, making it possible to achieve even higher density.
以上実施例で示したように、本発明によればシールド膜
を配線の一部として利用してリード線の本数を減らすこ
とができるので、トラックピッチを短くした場合に隣接
のリード配線が接近することにより起こる絶縁不良など
の間1題を大巾に減少させることができる。まだ配線を
2層にする場合と比較して線間の絶縁不良の問題もなく
、工程数の増加も少ない。As shown in the embodiments above, according to the present invention, the number of lead wires can be reduced by using the shield film as a part of the wiring, so that when the track pitch is shortened, adjacent lead wires become close to each other. Problems such as insulation defects caused by this can be greatly reduced. There is still no problem of poor insulation between lines, and there is less increase in the number of steps compared to the case where the wiring is in two layers.
第1図(a)は薄膜磁気ヘッドの従来例を示す正面図、
同図(b)はその断面図、第2図(a)は本発明の第1
の実施例の薄膜磁気ヘッドの正面図、同図(b)はその
断面図、第3図(−)は同じく第2図の実施例の正面図
、同図(b)はその断面図である。
1・・・・・・磁気抵抗素子素子、4・・・・・・非磁
性絶縁体層、5・・・・・・シールド薄膜、8.8a
、sb、8c。
10.10a、10b、10cm−−・−リード線、1
1・・・・・・シールド薄膜。
代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
図
(4)
Δa
第2図
((1)
ムFIG. 1(a) is a front view showing a conventional example of a thin film magnetic head;
FIG. 2(b) is a sectional view of the same, and FIG. 2(a) is the first embodiment of the present invention.
3(-) is a front view of the thin film magnetic head of the embodiment shown in FIG. 2, and FIG. 3(b) is a sectional view thereof. . 1... Magnetoresistive element element, 4... Nonmagnetic insulator layer, 5... Shield thin film, 8.8a
, sb, 8c. 10.10a, 10b, 10cm---Lead wire, 1
1... Shield thin film. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure (4) Δa Figure 2 ((1) Mu
Claims (1)
料を介して強磁性シールド部材が設置されておシ、かつ
信号検出用端子のうち一つを前記シールド部材の少なく
とも一方に接続したことを特徴とする薄膜磁気ヘッド。A ferromagnetic shield member is installed on both sides of a ferromagnetic thin film having a magnetoresistive effect via a non-magnetic insulating material, and one of the signal detection terminals is connected to at least one of the shield members. Features a thin film magnetic head.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57124669A JPS5916123A (en) | 1982-07-16 | 1982-07-16 | Thin film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57124669A JPS5916123A (en) | 1982-07-16 | 1982-07-16 | Thin film magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5916123A true JPS5916123A (en) | 1984-01-27 |
Family
ID=14891120
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57124669A Pending JPS5916123A (en) | 1982-07-16 | 1982-07-16 | Thin film magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5916123A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61201486A (en) * | 1985-03-05 | 1986-09-06 | Matsushita Electric Ind Co Ltd | Magnetic sensor |
WO1996017342A1 (en) * | 1994-11-30 | 1996-06-06 | International Business Machines Corporation | Direct access storage device with magneto-resistive transducing head apparatus |
-
1982
- 1982-07-16 JP JP57124669A patent/JPS5916123A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61201486A (en) * | 1985-03-05 | 1986-09-06 | Matsushita Electric Ind Co Ltd | Magnetic sensor |
WO1996017342A1 (en) * | 1994-11-30 | 1996-06-06 | International Business Machines Corporation | Direct access storage device with magneto-resistive transducing head apparatus |
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