JPS59159949U - susceptor - Google Patents
susceptorInfo
- Publication number
- JPS59159949U JPS59159949U JP5517883U JP5517883U JPS59159949U JP S59159949 U JPS59159949 U JP S59159949U JP 5517883 U JP5517883 U JP 5517883U JP 5517883 U JP5517883 U JP 5517883U JP S59159949 U JPS59159949 U JP S59159949U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- wafer
- recess
- abstract
- characteristic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は横型エピタキシャル成長装置の概略断面図であ
る。第２図は従来のサセプタの凹部とウェーハの関係を
示す平面図である。第３図は従来のサセプタの欠点を説
明するための要部平面図である。第４図はこの考案の一
実施例のサセプタの 。
凹部およびウェーハの平面図である。
３・・・・・・サセプタ、３ａ・・・・・・凹部、４・
・・・・・ウェーハ、５・・・・・・隙間、７・・・・
・・突起部。
−第３図。
第４図FIG. 1 is a schematic cross-sectional view of a horizontal epitaxial growth apparatus. FIG. 2 is a plan view showing the relationship between a concave portion of a conventional susceptor and a wafer. FIG. 3 is a plan view of essential parts for explaining the drawbacks of the conventional susceptor. FIG. 4 shows a susceptor according to an embodiment of this invention. FIG. 3 is a plan view of a recess and a wafer. 3...Susceptor, 3a...Recess, 4.
...Wafer, 5...Gap, 7...
··protrusion. -Figure 3. Figure 4
Claims (1)
なるサセプタにおいて、 前記凹部の周辺に中心部に向う複数個のウェーハ位置決
め用突起部を形成したことを特徴とするサセプタ。[Claims for Utility Model Registration] A susceptor in which a recess with a diameter larger than the wafer is formed in the wafer placement part, in which a plurality of wafer positioning protrusions are formed around the recess toward the center. Characteristic susceptor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5517883U JPS59159949U (en) | 1983-04-12 | 1983-04-12 | susceptor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5517883U JPS59159949U (en) | 1983-04-12 | 1983-04-12 | susceptor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59159949U true JPS59159949U (en) | 1984-10-26 |
Family
ID=30185503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5517883U Pending JPS59159949U (en) | 1983-04-12 | 1983-04-12 | susceptor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59159949U (en) |
-
1983
- 1983-04-12 JP JP5517883U patent/JPS59159949U/en active Pending
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