JPS59158437U - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPS59158437U
JPS59158437U JP5318683U JP5318683U JPS59158437U JP S59158437 U JPS59158437 U JP S59158437U JP 5318683 U JP5318683 U JP 5318683U JP 5318683 U JP5318683 U JP 5318683U JP S59158437 U JPS59158437 U JP S59158437U
Authority
JP
Japan
Prior art keywords
vapor phase
phase growth
growth equipment
heating coil
frequency heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5318683U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0116511Y2 (enrdf_load_stackoverflow
Inventor
喜美 塩谷
幹夫 高木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5318683U priority Critical patent/JPS59158437U/ja
Publication of JPS59158437U publication Critical patent/JPS59158437U/ja
Application granted granted Critical
Publication of JPH0116511Y2 publication Critical patent/JPH0116511Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP5318683U 1983-04-08 1983-04-08 気相成長装置 Granted JPS59158437U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5318683U JPS59158437U (ja) 1983-04-08 1983-04-08 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5318683U JPS59158437U (ja) 1983-04-08 1983-04-08 気相成長装置

Publications (2)

Publication Number Publication Date
JPS59158437U true JPS59158437U (ja) 1984-10-24
JPH0116511Y2 JPH0116511Y2 (enrdf_load_stackoverflow) 1989-05-16

Family

ID=30183530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5318683U Granted JPS59158437U (ja) 1983-04-08 1983-04-08 気相成長装置

Country Status (1)

Country Link
JP (1) JPS59158437U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50118861U (enrdf_load_stackoverflow) * 1974-03-14 1975-09-29
JPS5319181A (en) * 1976-08-06 1978-02-22 Hitachi Ltd Low pressure reaction apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50118861U (enrdf_load_stackoverflow) * 1974-03-14 1975-09-29
JPS5319181A (en) * 1976-08-06 1978-02-22 Hitachi Ltd Low pressure reaction apparatus

Also Published As

Publication number Publication date
JPH0116511Y2 (enrdf_load_stackoverflow) 1989-05-16

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