JPS59155741A - Particle detecting apparatus - Google Patents
Particle detecting apparatusInfo
- Publication number
- JPS59155741A JPS59155741A JP58030086A JP3008683A JPS59155741A JP S59155741 A JPS59155741 A JP S59155741A JP 58030086 A JP58030086 A JP 58030086A JP 3008683 A JP3008683 A JP 3008683A JP S59155741 A JPS59155741 A JP S59155741A
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical fiber
- light receiving
- lights
- particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 title claims abstract description 48
- 239000013307 optical fiber Substances 0.000 claims abstract description 33
- 238000001514 detection method Methods 0.000 claims description 3
- 230000000644 propagated effect Effects 0.000 abstract description 4
- 230000002238 attenuated effect Effects 0.000 abstract description 3
- 230000003287 optical effect Effects 0.000 abstract description 2
- 230000003595 spectral effect Effects 0.000 abstract 1
- 238000001228 spectrum Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
- G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
- G01N21/534—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke by measuring transmission alone, i.e. determining opacity
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
有率や粒子径を測定する場合に用いるもので、その粒子
を検出する装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION This invention relates to a device for detecting particles, which is used to measure the particle size and particle size.
気体の流れ内に含まれる粒子の含有率や粒子径、たとえ
ば、水蒸気の流れの湿り度や水滴径を測定する場合、従
来第１図に示すような粒子検出装置を使用している。BACKGROUND ART When measuring the content and particle size of particles contained in a gas flow, for example, the wetness of a water vapor flow and the diameter of water droplets, a particle detection device as shown in FIG. 1 has conventionally been used.
０１は光源で、Ｘｅｎｏｎ−Ａｒｃランプのような連続
した波長スペクトル光０２を発振するものである。01 is a light source that oscillates continuous wavelength spectrum light 02 like a Xenon-Arc lamp.
発振された光０２は、反射鏡０３やレンズ０４で集めら
れ、干渉フィルタ０５を通り、レンズ０６で更に集光さ
れて光ファイバ０７へ導入される。干渉フィルタ０５は
、連続した波長スペクトルを有する光０２から所定の波
長のみを取り出すものである。The oscillated light 02 is collected by a reflecting mirror 03 and a lens 04, passes through an interference filter 05, is further collected by a lens 06, and is introduced into an optical fiber 07. The interference filter 05 extracts only a predetermined wavelength from the light 02 having a continuous wavelength spectrum.
粒子の含有率や径の測定には、理論上２種類の波長光で
十分なはずであるが、実用上４・５種類の波長が必要と
なる。そのため干渉フィルタ０５は、回転する円盤上に
特性の異なるフィルタを４・５個並べておき、それを回
すことによって光ファイバ０７へ導入する光０２の波長
を順次変化させている。Theoretically, two wavelengths of light should be sufficient to measure the content and diameter of particles, but in practice, four or five wavelengths are required. Therefore, in the interference filter 05, four or five filters with different characteristics are arranged on a rotating disk, and by rotating the disk, the wavelength of the light 02 introduced into the optical fiber 07 is sequentially changed.
光ファイバ０７の後端０７Ａは、粒子を含む気体の流れ
（以下、粒子流れという）Ａ中に位蓚１〜ており光０２
を照射する。受光素子０８は、粒子流れ八を挾み光ファ
イバ０７の後端０７Ａと対向し、照射された光０２をレ
ンズ０９、ピンホール０１０ヲ介して受けるものである
。光０２を受けた受光素イ０８は、光強度に応じた電気
信号を導線旧１に」：リアンプ０１．２へ出力するもの
である。The rear end 07A of the optical fiber 07 is placed in a gas flow (hereinafter referred to as particle flow) A containing particles and emits light 02.
irradiate. The light receiving element 08 faces the rear end 07A of the optical fiber 07 across the particle stream 8, and receives the irradiated light 02 through a lens 09 and a pinhole 010. The light receiving element I08 that receives the light 02 outputs an electric signal corresponding to the light intensity to the conductor 1 and the amplifier 01.2.
さて、光源ＯＩを点灯して光０２を発振させる。Now, light source OI is turned on to oscillate light 02.
干渉フィルタ０５の円盤を回転させると、夫々波長域帯
の異なる波長光が順次取り出され、光ファイバ０７へ入
射される。従って、光ファイバ０７の後端０７Ａより粒
子流れＡ内に対照される光０２の波長も順次変化する。When the disc of the interference filter 05 is rotated, light having different wavelengths is sequentially extracted and input into the optical fiber 07. Therefore, the wavelength of the light 02 that is directed into the particle flow A from the rear end 07A of the optical fiber 07 also changes sequentially.
受光素子０８は、粒子流れＡ中の粒子により散乱された
残シの光０２を受け、アンプ０１２へ光強度に応じた電
気信号を出力する。The light receiving element 08 receives the remaining light 02 scattered by the particles in the particle flow A, and outputs an electric signal to the amplifier 012 according to the light intensity.
なお、アンプ０１２で所定の電圧値に増幅されたアナロ
グ信号は、デジタル信号に変換された後電子計算機など
に入力されて、粒子流れ中の粒子含有率や粒子径などが
演算される。Note that the analog signal amplified to a predetermined voltage value by the amplifier 012 is converted into a digital signal and then input to a computer or the like to calculate the particle content rate, particle diameter, etc. in the particle flow.
しかし、従来の粒子検出装置でに１、次の様ｌｒ不具合
も生じていた。However, the following problems have also occurred in conventional particle detection devices.
（１）干渉フィルタ０５の問題
粒子流れＡ中に舎外れる粒子の含有率や粒径の甜測は、
Ｍｉｅの散乱理論に基づいて行われる。理論的には、２
種類の波長光に対して粒子流れＡを透過した光０２の強
度を求めＪｌげ十分である。しかし、実用上は４・５種
類の波長光を粒子流れＡ内に照射する必要がある。(1) Problem with interference filter 05 Measurement of the content rate and particle size of particles that escape in particle flow A is as follows:
This is done based on Mie's scattering theory. Theoretically, 2
It is sufficient to determine the intensity of light 02 transmitted through particle flow A for each type of wavelength light. However, in practice, it is necessary to irradiate the particle flow A with light of four or five different wavelengths.
そのため、円盤に特性の異なるフィルタを取り利け、こ
の円盤を回転させて数種の波長光を得るようにしている
。従って、円盤を回転させる駆動部が必要となり、また
、それゆえ機械的な振動が発生して精度良く調整された
光学系に狂いが生じる恐れがある。更には、粒子流れＡ
中に照射きれている光０２は干渉フィルタ０５の円盤の
回転によるものであり、受光素子０８で受光されている
光とを一対一に対応させるだめのシステムが必要となる
。Therefore, the disk is equipped with filters with different characteristics, and the disk is rotated to obtain light of several wavelengths. Therefore, a drive unit for rotating the disk is required, and there is a risk that mechanical vibrations will occur and the precisely adjusted optical system will be distorted. Furthermore, the particle flow A
The light 02 that has been completely irradiated inside is due to the rotation of the disc of the interference filter 05, and a system is required to provide a one-to-one correspondence between the light 02 and the light received by the light receiving element 08.
（２）受光素子０８の問題
受光素子０８は、十分保護されてはいるものの、蒸気流
、などの計測ではどうしても高温になる。このため温度
ドリフトを起こして計測用た光を粒子流れ中に導く送光
用光ファイバと、粒子流れを挾んで送光用光ファイバと
対向して配設さね粒子流れ内を通過してきた光を伝播す
る後端部が枚数に分割された受光用光ファイバと、この
受光用光ファイバの分割された後端に夫々配設され互い
に波長域の異なる光のみを通過させる複数の干渉フィル
タと、この干渉フィルタを通過した光を受けその光強度
に応じた電気信号を出力する受光素子とからなるもので
あるから、粒子流れに含壕れる粒子の含有率や粒子径を
測定するだめの電気信号を精度良く出力について説明す
る。(2) Problem with the light-receiving element 08 Although the light-receiving element 08 is sufficiently protected, it inevitably becomes hot when measuring steam flow or the like. For this reason, a light transmitting optical fiber that causes a temperature drift and guides the measurement light into the particle flow, and a light transmitting optical fiber sandwiching the particle flow and facing the light transmitting optical fiber are arranged. a light-receiving optical fiber whose rear end is divided into a number of pieces for propagating the light; a plurality of interference filters that are respectively disposed at the divided rear ends of the light-receiving optical fiber and allow only light in different wavelength ranges to pass therethrough; It consists of a light-receiving element that receives the light that has passed through this interference filter and outputs an electrical signal according to the intensity of the light, so the electrical signal is used to measure the content rate and particle diameter of particles contained in the particle flow. We will explain the output accurately.
１は光源で・ Ｘｅｎｏｎ−Ａｒｃランプのようなもの
を使用し、連続した波長スペクトル光２を発掘するもの
である。反射鏡３やレンズ４・６は、発振された光２を
集光して送光用光ファイバ７へ導入するものである。送
光用光ファイバ７の後端７Ａは粒子流れＡ内に置かれて
おり、受光用光ファイバ１１の先端１１Ａが粒子流れＡ
を挾みこれに対向している。この受光用光ファイバ１１
の後端部ＪＩＢは複数に分割されていて、伝播されてき
た光２を分光する。５は受光用光ファイバ１１の後端１
１Ｃに夫々取り付けられる干渉フィルタで、その透過特
性は互いに異なっていて、夫々異なる波長域の光のみを
通過させる。８は受光素子で、夫々の干渉フィルタ５を
通過した光を受け、その光強度に応じた電気信号をアン
プ１２へ出力する。なお、９は粒子流れＡ内を通過しだ
光２を集めるレンズ、１０はピンホールである。1 is a light source. A light source such as a Xenon-Arc lamp is used to extract light 2 with a continuous wavelength spectrum. The reflecting mirror 3 and lenses 4 and 6 condense the oscillated light 2 and introduce it into the light transmission optical fiber 7. The rear end 7A of the light transmitting optical fiber 7 is placed in the particle flow A, and the tip 11A of the light receiving optical fiber 11 is placed in the particle flow A.
I am facing this by holding it in between. This light receiving optical fiber 11
The rear end JIB is divided into a plurality of parts, and separates the propagated light 2. 5 is the rear end 1 of the light receiving optical fiber 11
The interference filters attached to each 1C have different transmission characteristics and allow only light in different wavelength ranges to pass through. A light receiving element 8 receives the light that has passed through each interference filter 5 and outputs an electric signal to the amplifier 12 according to the intensity of the light. Note that 9 is a lens that collects the light 2 passing through the particle flow A, and 10 is a pinhole.
さて、光源１を点灯すると光２は集光されて送光用光フ
ァイバ７へ入射される。この送光用光フアイバ７内を伝
播された光２は、その強度をほとんど減衰されることな
く粒子流れＡ内に照射される。粒子流れＡ内の粒子によ
シ光２は散乱・減衰され、対向して配設された受光用光
ファイバ１１の先端１１Ａに入る。光２は受光用光フア
イバ１１内をほとんど減衰されることなく伝播され、か
つ、その後端部１１Ｂで複数に分光されることになる。Now, when the light source 1 is turned on, the light 2 is condensed and enters the light transmission optical fiber 7. The light 2 propagated through the light transmitting optical fiber 7 is irradiated into the particle flow A with its intensity hardly attenuated. The light 2 emitted by the particles in the particle flow A is scattered and attenuated and enters the tip 11A of the light-receiving optical fiber 11 disposed opposite to it. The light 2 is propagated within the light receiving optical fiber 11 with almost no attenuation, and is split into a plurality of lights at the rear end 11B.
分光された光２も夫々光源１で発振されたものとほぼ等
しい連続した波長スペクトルを有しているが、受光用光
ファイバ１１の後端１１Ｃに配設された互いに特性の異
なる干渉フィルタ５を夫々通過することにより波長域の
狭い光になる。この光は夫々の受光素子８で受けられて
いて、受光素子８はその光強度に応じた電気信号をアン
プ１２へ出力する。Each of the separated lights 2 has a continuous wavelength spectrum that is almost the same as that oscillated by the light source 1, but an interference filter 5 with mutually different characteristics is disposed at the rear end 11C of the light receiving optical fiber 11. By passing through each of them, it becomes light with a narrow wavelength range. This light is received by each light receiving element 8, and the light receiving element 8 outputs an electric signal to the amplifier 12 according to the intensity of the light.
なお、アンプ１２は電気信号を増幅して、従来通り電子
泪算機へ出力するので、所定の演算が行われて粒子流れ
Ａ中の粒子含有率や粒子径が（７）′
求められる。Incidentally, since the amplifier 12 amplifies the electric signal and outputs it to the electronic multiplication machine as in the conventional case, predetermined calculations are performed to determine the particle content and particle diameter in the particle flow A (7)'.
上述したように、本実施例の装置では、（１）光源１か
ら発振された光２は、受光用光ファイバ】１で分光され
、分光された光から夫々波長の互いに異なるものを干渉
フィルタ・ ５で取り出すようにした。従って、従来の
装置のように、干渉フィルタ０５を切り換える必要がな
く、機械的な振動が発生しない。As described above, in the apparatus of this embodiment, (1) the light 2 oscillated from the light source 1 is separated by the light receiving optical fiber 1, and the separated lights having different wavelengths are separated from each other by an interference filter. I tried to take it out at 5. Therefore, unlike conventional devices, there is no need to switch the interference filter 05, and no mechanical vibration occurs.
また、夫々の干渉フィルタ５で互いに異なる波長域の光
にし、そのまま夫々の受光素子８で光強度を電気信号に
変換するようにしたので、電子計算機などへ入力される
信号の識別はなされており、従来のように円盤の回転を
チェックするような制御手段は不要となる。In addition, each interference filter 5 converts the light into different wavelength ranges, and each light receiving element 8 directly converts the light intensity into an electrical signal, so that the signals input to a computer etc. can be identified. , there is no need for conventional control means to check the rotation of the disk.
（２）粒子流れＡに照射された光２は受光用光ファイバ
１１で受けられ、しかる後受光素子８へ入射される。従
って、粒子流れＡと受光素子８とを離すことが可能とな
り、温度ド（８）
リフトなどの問題は生じない。(2) The light 2 irradiated onto the particle flow A is received by the light-receiving optical fiber 11, and then enters the light-receiving element 8. Therefore, it becomes possible to separate the particle flow A from the light receiving element 8, and problems such as temperature drift (8) do not occur.
などの効果を得ることができる。You can obtain effects such as
一実施例を示す装置の図である。FIG. 1 is a diagram of an apparatus illustrating an embodiment.
１：光源、２：光、５：干渉フィルタ、７：送光用光フ
ァイバ、８：受光素子、１１：受光用光ファイバ、Ａ：
粒子流れ
第１図
第２Ｖ1: light source, 2: light, 5: interference filter, 7: light transmitting optical fiber, 8: light receiving element, 11: light receiving optical fiber, A:
Particle flow Figure 1 Figure 2V
Claims (1)
ァイバと、粒子流れを挾んで送光用光ファイバと対向］
〜で配設され粒子流れ内を通過してきた光を伝播する後
端部が複数に分割された受光用光ファイバと、この受光
用光ファイバの分割された後端に夫々配設され互いに波
長域の異なる光のみを通過させる複数の干渉フィルタと
、この干渉フィルタを通過した光を受けその光強度に応
じた電気信号を出力する受光素子とからなることを特徴
とする粒子検出装置。A light source, a light transmitting optical fiber that guides the light emitted from the light source into the particle flow, and a light transmitting optical fiber that faces the light transmitting optical fiber across the particle flow]
A light-receiving optical fiber whose rear end is divided into a plurality of parts is arranged at ~ and propagates the light that has passed through the particle flow, and a light-receiving optical fiber is arranged at each of the divided rear ends of this light-receiving optical fiber and propagates the light that has passed through the particle flow. 1. A particle detection device comprising: a plurality of interference filters that allow only different types of light to pass; and a light receiving element that receives the light that has passed through the interference filters and outputs an electrical signal according to the intensity of the light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58030086A JPS59155741A (en) | 1983-02-24 | 1983-02-24 | Particle detecting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58030086A JPS59155741A (en) | 1983-02-24 | 1983-02-24 | Particle detecting apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59155741A true JPS59155741A (en) | 1984-09-04 |
Family
ID=12293980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58030086A Pending JPS59155741A (en) | 1983-02-24 | 1983-02-24 | Particle detecting apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59155741A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6222539U (en) * | 1985-07-05 | 1987-02-10 | ||
| US4755048A (en) * | 1986-10-23 | 1988-07-05 | Amoco Corporation | Optical analysis of impurity absorptions |
| JPS63118549U (en) * | 1987-01-23 | 1988-08-01 | ||
| JPS6465434A (en) * | 1987-09-04 | 1989-03-10 | Hitachi Ltd | Measuring instrument for particulate in fluid |
| CN103257110A (en) * | 2012-02-15 | 2013-08-21 | 江苏天瑞仪器股份有限公司 | Signal transmission method for laser online gas analysis and transmission device thereof |
-
1983
- 1983-02-24 JP JP58030086A patent/JPS59155741A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6222539U (en) * | 1985-07-05 | 1987-02-10 | ||
| JPH0348521Y2 (en) * | 1985-07-05 | 1991-10-16 | ||
| US4755048A (en) * | 1986-10-23 | 1988-07-05 | Amoco Corporation | Optical analysis of impurity absorptions |
| JPS63118549U (en) * | 1987-01-23 | 1988-08-01 | ||
| JPS6465434A (en) * | 1987-09-04 | 1989-03-10 | Hitachi Ltd | Measuring instrument for particulate in fluid |
| CN103257110A (en) * | 2012-02-15 | 2013-08-21 | 江苏天瑞仪器股份有限公司 | Signal transmission method for laser online gas analysis and transmission device thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0352133A2 (en) | Optical polarimeter | |
| EP0056239A1 (en) | Method of measuring Raman spectra and laser Raman spectrophotometry system | |
| JPS59206745A (en) | Infrared absorption gas detecting monitor head and detector | |
| US4801205A (en) | Particle size measuring apparatus | |
| CA2738820C (en) | An arrangement adapted for spectral analysis of high concentrations of gas | |
| WO2000003201A3 (en) | Scale factor stabilization of a broadband fiber source used in fiber optic gyroscopes in radiation environments | |
| JPH06508443A (en) | photometer | |
| US4518861A (en) | Method for the continuous measurement of the mass of aerosol particles in gaseous samples and a device for the implementation of the method | |
| KR102232785B1 (en) | Apparatus for measuring fine particles | |
| JPH0815122A (en) | Physical properties measuring apparatus for particle | |
| JPS59155741A (en) | Particle detecting apparatus | |
| SE439544B (en) | PROCEDURE AND DEVICE FOR DETERMINING A INGREDIENT IN A MEDIUM | |
| US2743646A (en) | Optical instrument having throughand-return light path | |
| JPS59176649A (en) | Particle analyzer | |
| JPS62106347A (en) | Method for correcting variation of light source of particle analyzer | |
| NL8003376A (en) | PHOTO-ELECTRIC GAS ANALYSIS DEVICE. | |
| JPH05118984A (en) | Infrared moisture meter | |
| JPS59154338A (en) | Detector for particle | |
| JPS60214238A (en) | Fine particle detector | |
| JPH08128941A (en) | Particle size distribution measuring equipment | |
| JP2876255B2 (en) | Particle size distribution analyzer | |
| JPH0266425A (en) | Measuring instrument for distribution of grain size | |
| JPH0718788B2 (en) | Optical particle measuring device | |
| SU962768A1 (en) | Apparatus for monitoring vibration parameters | |
| JPH05240782A (en) | Oil concentration measuring device |