JPS59154895U - タ−ボ分子ポンプの潤滑装置 - Google Patents

タ−ボ分子ポンプの潤滑装置

Info

Publication number
JPS59154895U
JPS59154895U JP4881583U JP4881583U JPS59154895U JP S59154895 U JPS59154895 U JP S59154895U JP 4881583 U JP4881583 U JP 4881583U JP 4881583 U JP4881583 U JP 4881583U JP S59154895 U JPS59154895 U JP S59154895U
Authority
JP
Japan
Prior art keywords
molecular pump
turbo molecular
lubrication system
pump lubrication
turbo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4881583U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6335198Y2 (enrdf_load_stackoverflow
Inventor
秀人 西川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP4881583U priority Critical patent/JPS59154895U/ja
Publication of JPS59154895U publication Critical patent/JPS59154895U/ja
Application granted granted Critical
Publication of JPS6335198Y2 publication Critical patent/JPS6335198Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP4881583U 1983-03-31 1983-03-31 タ−ボ分子ポンプの潤滑装置 Granted JPS59154895U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4881583U JPS59154895U (ja) 1983-03-31 1983-03-31 タ−ボ分子ポンプの潤滑装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4881583U JPS59154895U (ja) 1983-03-31 1983-03-31 タ−ボ分子ポンプの潤滑装置

Publications (2)

Publication Number Publication Date
JPS59154895U true JPS59154895U (ja) 1984-10-17
JPS6335198Y2 JPS6335198Y2 (enrdf_load_stackoverflow) 1988-09-19

Family

ID=30179337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4881583U Granted JPS59154895U (ja) 1983-03-31 1983-03-31 タ−ボ分子ポンプの潤滑装置

Country Status (1)

Country Link
JP (1) JPS59154895U (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5025408A (enrdf_load_stackoverflow) * 1973-02-26 1975-03-18
JPS515042U (enrdf_load_stackoverflow) * 1974-06-28 1976-01-14
JPS5225497A (en) * 1975-08-01 1977-02-25 Takeo Komamura Device for fixing uterus and vagina

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5025408A (enrdf_load_stackoverflow) * 1973-02-26 1975-03-18
JPS515042U (enrdf_load_stackoverflow) * 1974-06-28 1976-01-14
JPS5225497A (en) * 1975-08-01 1977-02-25 Takeo Komamura Device for fixing uterus and vagina

Also Published As

Publication number Publication date
JPS6335198Y2 (enrdf_load_stackoverflow) 1988-09-19

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