JPS59154602U - Film thickness measuring device - Google Patents
Film thickness measuring deviceInfo
- Publication number
- JPS59154602U JPS59154602U JP4950983U JP4950983U JPS59154602U JP S59154602 U JPS59154602 U JP S59154602U JP 4950983 U JP4950983 U JP 4950983U JP 4950983 U JP4950983 U JP 4950983U JP S59154602 U JPS59154602 U JP S59154602U
- Authority
- JP
- Japan
- Prior art keywords
- irradiation
- light
- film thickness
- measuring device
- thickness measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は光学膜厚（又は位相差）に対する反射率の変化
の一例を示すグラフである。第２図は本考案の実施例の
膜厚測定装置を真空装置に組み込んだ様子を示す模式図
である。第３図は上記膜厚測定装置の照射部及び受光部
を基板上方で移動させる様子を示す説明図である。第４
図は反射率の場所的な変化を示すグラフである。FIG. 1 is a graph showing an example of a change in reflectance with respect to optical film thickness (or phase difference). FIG. 2 is a schematic diagram showing how the film thickness measuring device according to the embodiment of the present invention is incorporated into a vacuum device. FIG. 3 is an explanatory diagram showing how the irradiating section and the light receiving section of the film thickness measuring device are moved above the substrate. Fourth
The figure is a graph showing local changes in reflectance.
Claims (1)
束伝送手段と、該光束伝送手段の他端に接続された照射
部と、 該照射部から照射され試料によって変化される光束を受
光する受光部と、該受光部に一端を接続された可撓性を
有する光束伝送手段と、該光束伝送手段の他端に接続さ
れた検出器と、 前記照射部と前記受光部とを可動に支持する支持部材と
、 前記検出器により検出される変化後の光束の強度の、前
記照射部より照射される照射光の強度に対する比である
変化率を計算する計算手段とを有することを特徴とする
膜厚測定装置。[Scope of Claim for Utility Model Registration] A spectroscope, a flexible light beam transmission means connected at one end to the spectrometer, an irradiation section connected to the other end of the light beam transmission means, and irradiation from the irradiation section. a light receiving section that receives a light flux changed by the sample; a flexible light beam transmitting means connected at one end to the light receiving section; a detector connected to the other end of the light transmitting means; a support member movably supporting the part and the light receiving part, and calculating a rate of change that is a ratio of the intensity of the changed luminous flux detected by the detector to the intensity of the irradiation light irradiated from the irradiation part. 1. A film thickness measuring device comprising calculation means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4950983U JPS59154602U (en) | 1983-04-01 | 1983-04-01 | Film thickness measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4950983U JPS59154602U (en) | 1983-04-01 | 1983-04-01 | Film thickness measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59154602U true JPS59154602U (en) | 1984-10-17 |
Family
ID=30180013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4950983U Pending JPS59154602U (en) | 1983-04-01 | 1983-04-01 | Film thickness measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59154602U (en) |
-
1983
- 1983-04-01 JP JP4950983U patent/JPS59154602U/en active Pending
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