JPS59153108A - Method for checking defects on surface of mirror body - Google Patents
Method for checking defects on surface of mirror bodyInfo
- Publication number
- JPS59153108A JPS59153108A JP2795083A JP2795083A JPS59153108A JP S59153108 A JPS59153108 A JP S59153108A JP 2795083 A JP2795083 A JP 2795083A JP 2795083 A JP2795083 A JP 2795083A JP S59153108 A JPS59153108 A JP S59153108A
- Authority
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- Japan
- Prior art keywords
- light
- color
- green
- inspected
- flaw
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、平面鏡や鏡面に近い被検査体の表面に存在す
る傷、異物等の欠陥を検査する方法に関するものである
。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for inspecting defects such as scratches and foreign matter existing on the surface of a plane mirror or an object to be inspected that is close to a mirror surface.
従来例の構成とその問題点
従来、平面鏡や、鏡面状の半導体基板等の被検査体表面
に存在する傷、異物等の欠陥を検査する方法としては、
被検査体表面に斜めから一般白色光線を当てて検査する
斜光目視検査や、螢光灯下での平滑性目視検査がある。Conventional configuration and its problems Conventionally, methods for inspecting defects such as scratches and foreign objects on the surface of objects to be inspected, such as plane mirrors and mirror-like semiconductor substrates, include:
There is an oblique light visual inspection in which the surface of the object to be inspected is inspected by shining a general white light beam at an angle, and a smoothness visual inspection under a fluorescent lamp.
これら目視検査は熟練者によって行なわれていたが検出
される欠陥には限度があると共に、検査者の個人差によ
り、検査結果にばらつきが有った斜光による検査の方法
を第１図に示す。被検査体１の表面に一般白色光源２よ
りの光３を斜めより照射する。この時、被検査体１の表
面が完全な平面であれば、図の様に光３は被検査体１０
表面により、反射光４のように正反射し、反射光４は受
光面６には照射されない。この時、被検査体１０表面と
光３は、正反射された光が、受光面に照射されないよう
な条件を満足する適当な角度を成している。しかし、被
検査体１の表面上に凹み（以下傷という。）６や、凸起
（以下異物という。）７があれば、光３は、この傷６や
、異物７によって散乱され、破線に示す様な散乱光線８
，８′となり、受光面５に照射され光の濃淡となって、
傷６．異物７の有無が判別される。今、被検査体１の表
面上に、第２図に示すような種々の方向性をもった傷９
，１０，１１．１２及び異物１３等力）あった場合にお
いて、例えば、傷９及び異物１３について考えてみる。Although these visual inspections were performed by skilled persons, there was a limit to the number of defects that could be detected, and the inspection results varied due to individual differences among the inspectors.A method of inspection using oblique light is shown in FIG. Light 3 from a general white light source 2 is irradiated obliquely onto the surface of an object to be inspected 1. At this time, if the surface of the object 1 to be inspected is completely flat, the light 3 will be transmitted to the object 10 as shown in the figure.
The surface specularly reflects the reflected light 4, and the reflected light 4 is not irradiated onto the light receiving surface 6. At this time, the surface of the object to be inspected 10 and the light 3 form an appropriate angle that satisfies the condition that the specularly reflected light is not irradiated onto the light receiving surface. However, if there are dents (hereinafter referred to as scratches) 6 or protrusions (hereinafter referred to as foreign objects) 7 on the surface of the object to be inspected 1, the light 3 will be scattered by the scratches 6 and foreign objects 7, and the light 3 will be scattered by the broken line. Scattered rays 8 as shown
, 8', and the light is irradiated onto the light receiving surface 5 and becomes light and dark,
Wound 6. The presence or absence of foreign matter 7 is determined. Now, on the surface of the object to be inspected 1, there are scratches 9 with various directions as shown in FIG.
, 10, 11, 12 and foreign object 13), consider, for example, scratch 9 and foreign object 13.
第３図は第２図において、傷９の所有している長平方向
に対してほぼ直角方向に一般白色光源２を設置し、光１
４を被検査体１の表面に照射した状態（第２図Ａの状態
）に対応した図であり、第４図は第２図において、傷９
０所有している長手方向に対し、第３図に示す以外の方
向に一般白色光源２’、２”を設置し、光１５．１６を
被検査体１の表面に照射した状態（第２図Ｂの状態）に
対応した図を示したものである。FIG. 3 shows that in FIG. 2, a general white light source 2 is installed in a direction almost perpendicular to the elongated direction of the scratch 9, and the light 1 is
4 is a diagram corresponding to the state in which the surface of the object to be inspected 1 is irradiated (the state shown in FIG. 2A).
A general white light source 2', 2'' is installed in a direction other than that shown in Figure 3 with respect to the longitudinal direction of the object 1, and the surface of the object to be inspected 1 is irradiated with light 15.16 (Figure 2). This figure shows a diagram corresponding to state B).
第２図・葎５３図に示すように、光１４は傷９の所有し
ている長手方向に対しほぼ直角方向から照射されている
ので、傷９によって、破線１７のように散乱されて受光
面δ上に照射されることにより、傷９の全体が受光面５
上に写し出される。しかし、第２図、第４図に示すよう
に、光１５ 、１６は、傷９の所有している長手方向に
対し、直角方向以外から照射されているので、傷９によ
って破線１８．１９のように散乱されても、受光面５上
には照射されないか、照射されても散乱光の一部のみで
あるので、傷９の全体が受光面５上に写し出されない。As shown in Figure 2 and Figure 53, the light 14 is irradiated from a direction almost perpendicular to the longitudinal direction of the flaw 9, so it is scattered by the flaw 9 as shown by the broken line 17 and is reflected on the light receiving surface. By irradiating onto δ, the entire scratch 9 is exposed to the light receiving surface 5.
imaged above. However, as shown in FIGS. 2 and 4, since the lights 15 and 16 are irradiated from a direction other than perpendicular to the longitudinal direction of the scratch 9, the broken lines 18 and 19 are Even if the light is scattered, the light receiving surface 5 is not irradiated, or even if it is irradiated, only a part of the scattered light is scattered, so that the entire scratch 9 is not reflected on the light receiving surface 5.
第２図に示すように、被検査体１の表面上に、傷９，１
０，１１．１２等が存在しているとすれば、一般白色光
源の設置した方向表向じ方向性を持った傷があった場合
、受光面６上には照射されないか、散乱光の一部分のみ
しか照射されないので、同じ方向性を持った傷を検出す
ることができない。この傷を検出しようとすれば、被検
査体１又は、一般白色光源２を動かさなければ傷を検出
することができない。ここで、被検査体１又は一般白色
光源２を動かすことにより、今丑で検出されていた傷が
見えなくなってしまう。As shown in FIG.
0, 11, 12, etc., and if there is a scratch with a directionality in the direction in which the general white light source is installed, the light receiving surface 6 will not be irradiated, or a portion of the scattered light will be lost. Since only the same direction is irradiated, it is not possible to detect flaws with the same directionality. If an attempt is made to detect this flaw, the flaw cannot be detected unless the object to be inspected 1 or the general white light source 2 is moved. Here, by moving the object to be inspected 1 or the general white light source 2, the flaws that were currently detected become invisible.
しかも、傷には、第２図でもわかる様に、種々の方向性
を持っているので、各々の傷の方向性を確認しようとし
ても、被検査体１又は、一般白色光源２を動かすことに
より、被検査体１表面のどの位置で、しかも、どの方向
性を持った傷かを確認することかできない。又、異物に
ついても、同様に、被検査体１表面のどの位置にある異
物かを確認することができず又、異物及び傷によって散
乱された散乱光は、同様に輝いて見えるだけであるので
、この散乱光だけでは、異物、傷の区別ができない。こ
こで受光面５を人間の目とすれば、斜光目視検査の方法
となる。Furthermore, as can be seen in Figure 2, scratches have various directions, so even if you try to confirm the directionality of each scratch, it is difficult to confirm by moving the object 1 or the general white light source 2. However, it is not possible to confirm the position and direction of the scratch on the surface of the object to be inspected. Similarly, regarding foreign objects, it is not possible to confirm where on the surface of the object to be inspected 1 the foreign object is located, and the scattered light scattered by foreign objects and scratches only appears to shine. , it is not possible to distinguish between foreign objects and scratches using this scattered light alone. Here, if the light-receiving surface 5 is a human eye, the method is an oblique light visual inspection.
発明の目的
本発明は、上記点に鑑みなされたもので、簡単な方法に
より、被検査体表面上の傷及び異物を検出し、しかも、
傷の方向性も同時に検知しなおかつ傷と異物との区別を
し、又、被検査体の全面を一度に観察可能にした鏡面体
の表面欠陥検査方法を提供するものである。Purpose of the Invention The present invention has been made in view of the above points, and detects flaws and foreign objects on the surface of an object to be inspected by a simple method, and furthermore,
The present invention provides a surface defect inspection method for a specular object that simultaneously detects the directionality of flaws, distinguishes between flaws and foreign matter, and allows the entire surface of the object to be observed at once.
発明の構成
本発明は、検査すべき被検査体表面と適宜の角度を持っ
て、すなわち、被検査体表面に対し斜めから平行光線を
被検査体表面に照射し、しかも、前記平行光線が、カラ
−３原色の緑色、青色、赤色のそれぞれ別々の色を所有
する３つの平行光線を、しかも、それぞれ別々の３つの
方向から、斜めに被検査体表面に照射することにより、
被検査体表面の傷、異物等の欠陥によって散乱した反射
光をカラーテレビカメラ・カラーテレビモニターで測定
することにより、被検査体表面の傷、異物等を検査する
ものである。Structure of the Invention The present invention irradiates the surface of an object to be inspected with a parallel beam of light at an appropriate angle to the surface of the object to be inspected, that is, obliquely to the surface of the object to be inspected, and furthermore, the parallel rays are By irradiating the surface of the object to be inspected obliquely with three parallel light beams of three different primary colors of green, blue, and red, each from three different directions,
This method inspects for scratches, foreign objects, etc. on the surface of the object to be inspected by measuring the reflected light scattered by defects such as scratches, foreign objects, etc. on the surface of the object to be inspected using a color television camera and color television monitor.
実施例の説明
以下、本発明の一実施例を図面を参照して説明する。第
５図は、本発明の方法を実施した検査装置要部側面図で
、第６図は、第５図の平面図である。第５図、第６図に
示す様に、カラ−３原色である緑色を所有する光源２ｏ
と、青色を所有する光源２１と、赤色を所有する光源２
２よりの緑色光線２３、青色光線２３、青色光線２４、
赤色光線２５を被検査体１０表面上に同時に照射し、被
検査体１表面によって、反射された散乱光を、カラーテ
レビカメラ２６に入力し、カラーテレビモニター２７上
に写し出す。今、第６図において、被検査体１の表面上
が鏡面であれば、カラーテレビカメラ２６、カラーテレ
ビモニタ２７には、何の変化も生じない。しかし、被検
査体１表面上に、傷２８、傷２９及び異物３ｏがあった
場合、緑色光線２３．青色光線２４．赤色光線２５のそ
れぞれの光線が、傷２８、傷２９、異物３０により散乱
されて、カラーテレビカメラ２６に散乱光が照射される
ので、カラーテレビモニタ２７上に変化が生しる。ここ
で傷２Ｂ、傷２９、異物３０について考えてみる。捷す
異物３０について説明する。DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 5 is a side view of the main part of an inspection apparatus that implements the method of the present invention, and FIG. 6 is a plan view of FIG. 5. As shown in Figures 5 and 6, the light source 2o has green, which is the third primary color.
, a light source 21 that owns blue color, and a light source 2 that owns red color.
2 green ray 23, blue ray 23, blue ray 24,
A red light beam 25 is simultaneously irradiated onto the surface of the object to be inspected 10, and the scattered light reflected by the surface of the object to be inspected 1 is inputted to a color television camera 26 and displayed on a color television monitor 27. Now, in FIG. 6, if the surface of the object to be inspected 1 is a mirror surface, no change occurs in the color television camera 26 and the color television monitor 27. However, if there are scratches 28, scratches 29, and foreign matter 3o on the surface of the object to be inspected 1, the green light 23. Blue light 24. Each of the red light beams 25 is scattered by the scratches 28, 29, and the foreign object 30, and the scattered light is directed at the color television camera 26, resulting in a change on the color television monitor 27. Let's consider scratch 2B, scratch 29, and foreign object 30 here. The foreign matter 30 to be shredded will be explained.
緑色を所有する光源２０．青色を所有する光源２１、赤
色を所有する光源２２よりの緑色光線２３、青色光線２
４、赤色光線２５、を同時に異物３０に照射すると、緑
色光線２３、青色光線２４、赤色光線２５の散乱光の光
量は同じになる。ここで、３つの光線は、カラ−３原色
の緑・青・赤であるので、このカラ−３原色を混合させ
れば白色になる。すなわち、異物３ｏによって散乱され
た散乱光は、カラーテレビカメラ２６に入力され、カラ
ーテレビモニタ２７上には白色の色を持つた像になり、
異物の有無が確認できる。次に傷２Ｂ、。Light source possessing green color20. Green light ray 23 from light source 21 possessing blue color, light source 22 possessing red color, and blue light ray 2
4. When the foreign object 30 is irradiated with the red light ray 25 at the same time, the amounts of scattered light of the green light 23, the blue light 24, and the red light 25 become the same. Here, since the three light rays are the three primary colors of green, blue, and red, white is produced by mixing these three primary colors. That is, the scattered light scattered by the foreign object 3o is input to the color television camera 26, and becomes a white image on the color television monitor 27.
The presence or absence of foreign matter can be confirmed. Next is wound 2B.
傷２９について説明する。まず傷２９について考えると
、第６図において、傷２９の所有している長手方向に対
してほぼ直角方向に線色を所有する光源２０が設置され
た状況にあるので、先に述べた様に、緑色光線２３は、
傷２９０所有している長手方向に対してほぼ直角方向か
ら照射されるバ他の青色光線２４、赤色光線２５は、そ
れ以外の方向から照射しているので、傷２９によって散
乱される散乱光の光量は、緑色光線２３の緑色か一番多
くなり、他の青色、赤色は極小量になるので、カラーテ
レビモニタ２７上には、傷２９の部分が緑色の色を持っ
た像になり、傷２９の有無が確認できる。次に、傷２８
について第６図によって考えてみると、傷２８の所有し
ている長手方向に対して、直角方向に設置されている光
源は１つも無いが、傷２′８の所有している長手方向に
対し３つの光源の内、一番直角方向に近い光源は、赤色
光源２２であることがわかる。そこで、傷２８によって
散乱される散乱光の光量は、赤色光線２５の赤色が多く
なり、他の緑色、青色は少なくなるので、カラーテレビ
モニタ２７上には、傷２８の部分か、緑色、青色を少し
加えた赤色の像になり、傷２８の一有無が確認できる。The flaw 29 will be explained. First, considering the flaw 29, in FIG. 6, the light source 20 having a line color is installed in a direction almost perpendicular to the longitudinal direction of the flaw 29, so as mentioned earlier, , the green ray 23 is
The other blue light rays 24 and red light rays 25 that are irradiated from a direction substantially perpendicular to the longitudinal direction of the scratch 290 are irradiated from other directions, so the scattered light scattered by the scratch 29 is The amount of light is the highest for the green light ray 23, and the other blue and red light are minimal, so the scratch 29 becomes an image with a green color on the color TV monitor 27, and the scratch 29 becomes a green image. The presence or absence of 29 can be confirmed. Next, wound 28
Considering this using FIG. 6, there is no light source installed perpendicular to the longitudinal direction of the flaw 28, but there is no light source installed perpendicular to the longitudinal direction of the flaw 2'8. It can be seen that among the three light sources, the light source closest to the right angle direction is the red light source 22. Therefore, in the amount of scattered light scattered by the scratch 28, the red of the red light ray 25 increases, and the other green and blue light decreases, so that the amount of scattered light scattered by the scratch 28 increases, and the other green and blue light rays decrease. The image becomes red with a slight addition of , and the presence or absence of any scratches 28 can be confirmed.
今まで説明してきたように、カラーテレビモニタ２７上
には、異物の場合には、白色の色を持った像が現われ、
傷の場合には、傷の方向性に対し一瞥直角方向に近い色
すなわち、傷の方向性に一番影響がある色が、カラーテ
レビ毛二タ上に写し出されるので、その写し出された色
により、傷の方向性がわかる。又、最近は、カラーテレ
ビカメラからの信号を、・（ターン認識等の技術を用い
て測定、検査の自動化をはかることが多いか、緑、青、
赤色のそれぞれの信号の違いから、異物、傷の区別たけ
でなく、傷の方向性おも区別することか容易になること
は、明白である。As explained above, in the case of a foreign object, a white image appears on the color television monitor 27,
In the case of scratches, the color that is closest to the direction perpendicular to the direction of the scratch, that is, the color that has the most influence on the direction of the scratch, is projected on the color TV screen, so the projected color , the direction of the wound can be seen. In addition, recently, signals from color television cameras are often used to automate measurement and inspection using technologies such as turn recognition, green, blue,
It is clear that the difference in each red signal makes it easy to distinguish not only foreign objects and scratches, but also the direction of the scratches.
発明の効果
以上のように本発明による鏡面体の表面欠陥検査方法に
よれば、被検査体表面の傷の方向性に関係なく傷の検出
が可能となり、しかも、傷の方向性も確認でき、また、
傷と異物の区別が可能となる。さらに、被検査体の全面
を一度に観察できるので、従来性なわれていた斜光目視
などの目視検査にたよることがなくなるので、確実に傷
、異物の検出が可能となる。Effects of the Invention As described above, according to the surface defect inspection method of a mirror surface object according to the present invention, it is possible to detect flaws regardless of the directionality of the flaws on the surface of the object to be inspected, and the directionality of the flaws can also be confirmed. Also,
It becomes possible to distinguish between scratches and foreign objects. Furthermore, since the entire surface of the object to be inspected can be observed at once, it is no longer necessary to rely on conventional visual inspections such as oblique light observation, making it possible to reliably detect flaws and foreign objects.
第１図は従来の鏡面体の表面欠陥検査方法を実施した装
置の一例の概略側面図、第２図は同装置の光源と表面欠
陥との位置関係を示す平面図、第３図、第４図はそれぞ
れ同側面図、第５図は本発明の一実施例における鏡面体
の表面欠陥検査方法を実施した装置の側面図、第６図は
同平面図である。
３１・・・・被検査体、２０・・・・・緑色を所有する
光源、２１・・・・青色を所有する光源、２２・・・・
・・赤色を所有する光源、２３・・・・・・緑色光線、
２４・・・・・・青色光線、２５・・・・・・赤色光線
、２６・・・・・・カラーテレビカメｅう、２７・・・
・・・カラーテレビモニタ、２８゜２９・・・・・・傷
、３０・・・・・・異物。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第１
図 ？
第４図Fig. 1 is a schematic side view of an example of an apparatus that implements a conventional method for inspecting surface defects on specular objects, Fig. 2 is a plan view showing the positional relationship between the light source and surface defects of the same apparatus, and Figs. The figures are respectively the same side view, FIG. 5 is a side view of an apparatus in which a method for inspecting surface defects of a specular object according to an embodiment of the present invention is implemented, and FIG. 6 is a plan view of the same. 31...Object to be inspected, 20...Light source having green color, 21...Light source having blue color, 22...
...Light source that possesses red color, 23...Green light ray,
24...Blue light, 25...Red light, 26...Color TV camera, 27...
...Color TV monitor, 28°29...Scratch, 30...Foreign object. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
figure ? Figure 4
Claims (2)
光線を前記被検査体表面と適宜の角度を持って照射し、
前記被検査体表面の傷、異物等の欠陥によって散乱した
反射光をカラーテレビカメラ。 カラーテレビモニターで観察するよう構成し、前記３方
向からの平行光線の色を互に異ならせるようにした鏡面
体の表面欠陥検査方法。(1) Irradiate the surface of the object to be inspected with parallel light beams from three directions at appropriate angles with the surface of the object to be inspected,
A color television camera detects reflected light scattered by defects such as scratches and foreign objects on the surface of the object to be inspected. A method for inspecting a surface defect of a specular object, which is configured to be observed on a color television monitor, and the colors of parallel light beams from the three directions are made to differ from each other.
色、青色、赤色である特許請求の範囲第１項記載の鏡面
体の表面欠陥検査方法。(2) The method for inspecting a surface defect of a specular object according to claim 1, wherein the colors of the parallel light beams from three directions are the three primary colors of green, blue, and red.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2795083A JPS59153108A (en) | 1983-02-22 | 1983-02-22 | Method for checking defects on surface of mirror body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2795083A JPS59153108A (en) | 1983-02-22 | 1983-02-22 | Method for checking defects on surface of mirror body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59153108A true JPS59153108A (en) | 1984-09-01 |
Family
ID=12235167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2795083A Pending JPS59153108A (en) | 1983-02-22 | 1983-02-22 | Method for checking defects on surface of mirror body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59153108A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01282410A (en) * | 1988-05-09 | 1989-11-14 | Omron Tateisi Electron Co | Curved surface nature inspection device |
| EP0413817A1 (en) * | 1988-05-09 | 1991-02-27 | Omron Corporation | Substrate examining apparatus |
| JPH05107032A (en) * | 1991-10-16 | 1993-04-27 | Matsushita Electric Ind Co Ltd | Method for inspecting external apperance of mounted board |
| CN102520537A (en) * | 2011-12-02 | 2012-06-27 | 深圳市华星光电技术有限公司 | Automatic optical inspection method and automatic optical inspection equipment |
| JP2019039798A (en) * | 2017-08-25 | 2019-03-14 | Ｊｆｅスチール株式会社 | Inspection method for metal strip surface and inspection equipment |
-
1983
- 1983-02-22 JP JP2795083A patent/JPS59153108A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01282410A (en) * | 1988-05-09 | 1989-11-14 | Omron Tateisi Electron Co | Curved surface nature inspection device |
| EP0413817A1 (en) * | 1988-05-09 | 1991-02-27 | Omron Corporation | Substrate examining apparatus |
| US5245671A (en) * | 1988-05-09 | 1993-09-14 | Omron Corporation | Apparatus for inspecting printed circuit boards and the like, and method of operating same |
| EP0685732A1 (en) * | 1988-05-09 | 1995-12-06 | Omron Corporation | Printed circuit board inspecting apparatus |
| JPH05107032A (en) * | 1991-10-16 | 1993-04-27 | Matsushita Electric Ind Co Ltd | Method for inspecting external apperance of mounted board |
| CN102520537A (en) * | 2011-12-02 | 2012-06-27 | 深圳市华星光电技术有限公司 | Automatic optical inspection method and automatic optical inspection equipment |
| WO2013078708A1 (en) * | 2011-12-02 | 2013-06-06 | 深圳市华星光电技术有限公司 | Automatic optical detection method and automatic optical detection device |
| JP2019039798A (en) * | 2017-08-25 | 2019-03-14 | Ｊｆｅスチール株式会社 | Inspection method for metal strip surface and inspection equipment |
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