JPS59150154U - 多極電極 - Google Patents

多極電極

Info

Publication number
JPS59150154U
JPS59150154U JP4506283U JP4506283U JPS59150154U JP S59150154 U JPS59150154 U JP S59150154U JP 4506283 U JP4506283 U JP 4506283U JP 4506283 U JP4506283 U JP 4506283U JP S59150154 U JPS59150154 U JP S59150154U
Authority
JP
Japan
Prior art keywords
electrode
screw
support
multipolar
supported
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4506283U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0228603Y2 (enrdf_load_stackoverflow
Inventor
貞夫 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP4506283U priority Critical patent/JPS59150154U/ja
Publication of JPS59150154U publication Critical patent/JPS59150154U/ja
Application granted granted Critical
Publication of JPH0228603Y2 publication Critical patent/JPH0228603Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP4506283U 1983-03-29 1983-03-29 多極電極 Granted JPS59150154U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4506283U JPS59150154U (ja) 1983-03-29 1983-03-29 多極電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4506283U JPS59150154U (ja) 1983-03-29 1983-03-29 多極電極

Publications (2)

Publication Number Publication Date
JPS59150154U true JPS59150154U (ja) 1984-10-06
JPH0228603Y2 JPH0228603Y2 (enrdf_load_stackoverflow) 1990-07-31

Family

ID=30175584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4506283U Granted JPS59150154U (ja) 1983-03-29 1983-03-29 多極電極

Country Status (1)

Country Link
JP (1) JPS59150154U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5536523U (enrdf_load_stackoverflow) * 1978-08-31 1980-03-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5536523U (enrdf_load_stackoverflow) * 1978-08-31 1980-03-08

Also Published As

Publication number Publication date
JPH0228603Y2 (enrdf_load_stackoverflow) 1990-07-31

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