JPS5914636A - マ−ク検出装置 - Google Patents

マ−ク検出装置

Info

Publication number
JPS5914636A
JPS5914636A JP12391082A JP12391082A JPS5914636A JP S5914636 A JPS5914636 A JP S5914636A JP 12391082 A JP12391082 A JP 12391082A JP 12391082 A JP12391082 A JP 12391082A JP S5914636 A JPS5914636 A JP S5914636A
Authority
JP
Japan
Prior art keywords
mark
value
signal
detected
peak
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12391082A
Other languages
English (en)
Japanese (ja)
Other versions
JPS634933B2 (enrdf_load_stackoverflow
Inventor
Tetsuo Yuasa
湯浅　徹雄
Yasuyuki Kosaka
康之 小坂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP12391082A priority Critical patent/JPS5914636A/ja
Publication of JPS5914636A publication Critical patent/JPS5914636A/ja
Publication of JPS634933B2 publication Critical patent/JPS634933B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP12391082A 1982-07-16 1982-07-16 マ−ク検出装置 Granted JPS5914636A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12391082A JPS5914636A (ja) 1982-07-16 1982-07-16 マ−ク検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12391082A JPS5914636A (ja) 1982-07-16 1982-07-16 マ−ク検出装置

Publications (2)

Publication Number Publication Date
JPS5914636A true JPS5914636A (ja) 1984-01-25
JPS634933B2 JPS634933B2 (enrdf_load_stackoverflow) 1988-02-01

Family

ID=14872365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12391082A Granted JPS5914636A (ja) 1982-07-16 1982-07-16 マ−ク検出装置

Country Status (1)

Country Link
JP (1) JPS5914636A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116007558A (zh) * 2022-12-30 2023-04-25 深圳市磐锋精密技术有限公司 电子产品的内部灰尘检测处理方法、装置和计算机设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5127917A (ja) * 1974-09-02 1976-03-09 Matsushita Electric Ind Co Ltd Supiika
JPS5615040A (en) * 1979-07-17 1981-02-13 Nippon Telegr & Teleph Corp <Ntt> Mark detector
JPS5690204A (en) * 1979-12-24 1981-07-22 Fujitsu Ltd Pattern check device
JPS56149687A (en) * 1980-04-22 1981-11-19 Tokyo Shibaura Electric Co Printed end detector

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5127917A (ja) * 1974-09-02 1976-03-09 Matsushita Electric Ind Co Ltd Supiika
JPS5615040A (en) * 1979-07-17 1981-02-13 Nippon Telegr & Teleph Corp <Ntt> Mark detector
JPS5690204A (en) * 1979-12-24 1981-07-22 Fujitsu Ltd Pattern check device
JPS56149687A (en) * 1980-04-22 1981-11-19 Tokyo Shibaura Electric Co Printed end detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116007558A (zh) * 2022-12-30 2023-04-25 深圳市磐锋精密技术有限公司 电子产品的内部灰尘检测处理方法、装置和计算机设备

Also Published As

Publication number Publication date
JPS634933B2 (enrdf_load_stackoverflow) 1988-02-01

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