JPS59145482A - 照射加熱炉 - Google Patents

照射加熱炉

Info

Publication number
JPS59145482A
JPS59145482A JP1887083A JP1887083A JPS59145482A JP S59145482 A JPS59145482 A JP S59145482A JP 1887083 A JP1887083 A JP 1887083A JP 1887083 A JP1887083 A JP 1887083A JP S59145482 A JPS59145482 A JP S59145482A
Authority
JP
Japan
Prior art keywords
light source
lamp
lamps
heating furnace
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1887083A
Other languages
English (en)
Japanese (ja)
Other versions
JPS627475B2 (enExample
Inventor
荒井 徹治
芳樹 三村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP1887083A priority Critical patent/JPS59145482A/ja
Priority to US06/574,453 priority patent/US4511788A/en
Publication of JPS59145482A publication Critical patent/JPS59145482A/ja
Publication of JPS627475B2 publication Critical patent/JPS627475B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Resistance Heating (AREA)
  • Vertical, Hearth, Or Arc Furnaces (AREA)
  • Furnace Details (AREA)
JP1887083A 1983-02-09 1983-02-09 照射加熱炉 Granted JPS59145482A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1887083A JPS59145482A (ja) 1983-02-09 1983-02-09 照射加熱炉
US06/574,453 US4511788A (en) 1983-02-09 1984-01-27 Light-radiant heating furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1887083A JPS59145482A (ja) 1983-02-09 1983-02-09 照射加熱炉

Publications (2)

Publication Number Publication Date
JPS59145482A true JPS59145482A (ja) 1984-08-20
JPS627475B2 JPS627475B2 (enExample) 1987-02-17

Family

ID=11983571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1887083A Granted JPS59145482A (ja) 1983-02-09 1983-02-09 照射加熱炉

Country Status (1)

Country Link
JP (1) JPS59145482A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57179097U (enExample) * 1981-05-08 1982-11-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57179097U (enExample) * 1981-05-08 1982-11-12

Also Published As

Publication number Publication date
JPS627475B2 (enExample) 1987-02-17

Similar Documents

Publication Publication Date Title
JP3484651B2 (ja) 加熱装置と加熱する方法
US4511788A (en) Light-radiant heating furnace
US3627590A (en) Method for heat treatment of workpieces
KR100832273B1 (ko) 적외선에 의해 기판을 고속으로 균일하게 가열하기 위한장치
US9029739B2 (en) Apparatus and methods for rapid thermal processing
TWI663362B (zh) 圓形燈陣列
JPS59928A (ja) 光加熱装置
JP5338723B2 (ja) 加熱装置
KR20190080682A (ko) 열처리 장치
TW200921754A (en) Filament lamp and light irradiation type heat treatment device
JP5964630B2 (ja) 熱処理装置
JPS60161616A (ja) 半導体ウエハの赤外線加熱装置
JPS59145482A (ja) 照射加熱炉
JP3443779B2 (ja) 半導体基板の熱処理装置
JPS60189927A (ja) 気相反応容器
JPH04713A (ja) 基板の加熱装置
JP2003234303A (ja) 熱処理装置
RU2843085C1 (ru) Вакуумный комплекс термического отжига полупроводниковых пластин
JP2004011938A (ja) 赤外線高温観察炉
KR920004964B1 (ko) 광화학증착장치용 적외선 가열장치
JPS60247934A (ja) 熱処理装置
JP3784662B2 (ja) 熱処理装置
JPS5842225A (ja) 外熱形の横型半導体気相成長装置
JPS597883A (ja) 照射加熱炉
JPH0150837B2 (enExample)