JPS59145482A - 照射加熱炉 - Google Patents
照射加熱炉Info
- Publication number
- JPS59145482A JPS59145482A JP1887083A JP1887083A JPS59145482A JP S59145482 A JPS59145482 A JP S59145482A JP 1887083 A JP1887083 A JP 1887083A JP 1887083 A JP1887083 A JP 1887083A JP S59145482 A JPS59145482 A JP S59145482A
- Authority
- JP
- Japan
- Prior art keywords
- light source
- lamp
- lamps
- heating furnace
- heated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Resistance Heating (AREA)
- Vertical, Hearth, Or Arc Furnaces (AREA)
- Furnace Details (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1887083A JPS59145482A (ja) | 1983-02-09 | 1983-02-09 | 照射加熱炉 |
| US06/574,453 US4511788A (en) | 1983-02-09 | 1984-01-27 | Light-radiant heating furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1887083A JPS59145482A (ja) | 1983-02-09 | 1983-02-09 | 照射加熱炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59145482A true JPS59145482A (ja) | 1984-08-20 |
| JPS627475B2 JPS627475B2 (enExample) | 1987-02-17 |
Family
ID=11983571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1887083A Granted JPS59145482A (ja) | 1983-02-09 | 1983-02-09 | 照射加熱炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59145482A (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57179097U (enExample) * | 1981-05-08 | 1982-11-12 |
-
1983
- 1983-02-09 JP JP1887083A patent/JPS59145482A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57179097U (enExample) * | 1981-05-08 | 1982-11-12 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS627475B2 (enExample) | 1987-02-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3484651B2 (ja) | 加熱装置と加熱する方法 | |
| US4511788A (en) | Light-radiant heating furnace | |
| US3627590A (en) | Method for heat treatment of workpieces | |
| KR100832273B1 (ko) | 적외선에 의해 기판을 고속으로 균일하게 가열하기 위한장치 | |
| US9029739B2 (en) | Apparatus and methods for rapid thermal processing | |
| TWI663362B (zh) | 圓形燈陣列 | |
| JPS59928A (ja) | 光加熱装置 | |
| JP5338723B2 (ja) | 加熱装置 | |
| KR20190080682A (ko) | 열처리 장치 | |
| TW200921754A (en) | Filament lamp and light irradiation type heat treatment device | |
| JP5964630B2 (ja) | 熱処理装置 | |
| JPS60161616A (ja) | 半導体ウエハの赤外線加熱装置 | |
| JPS59145482A (ja) | 照射加熱炉 | |
| JP3443779B2 (ja) | 半導体基板の熱処理装置 | |
| JPS60189927A (ja) | 気相反応容器 | |
| JPH04713A (ja) | 基板の加熱装置 | |
| JP2003234303A (ja) | 熱処理装置 | |
| RU2843085C1 (ru) | Вакуумный комплекс термического отжига полупроводниковых пластин | |
| JP2004011938A (ja) | 赤外線高温観察炉 | |
| KR920004964B1 (ko) | 광화학증착장치용 적외선 가열장치 | |
| JPS60247934A (ja) | 熱処理装置 | |
| JP3784662B2 (ja) | 熱処理装置 | |
| JPS5842225A (ja) | 外熱形の横型半導体気相成長装置 | |
| JPS597883A (ja) | 照射加熱炉 | |
| JPH0150837B2 (enExample) |