JPS59145034U - ウエハ−取扱装置 - Google Patents

ウエハ−取扱装置

Info

Publication number
JPS59145034U
JPS59145034U JP3756883U JP3756883U JPS59145034U JP S59145034 U JPS59145034 U JP S59145034U JP 3756883 U JP3756883 U JP 3756883U JP 3756883 U JP3756883 U JP 3756883U JP S59145034 U JPS59145034 U JP S59145034U
Authority
JP
Japan
Prior art keywords
wafer
water
shaped opening
wafers
water tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3756883U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6244534Y2 (enrdf_load_stackoverflow
Inventor
平野　好也
Original Assignee
第一精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 第一精機株式会社 filed Critical 第一精機株式会社
Priority to JP3756883U priority Critical patent/JPS59145034U/ja
Publication of JPS59145034U publication Critical patent/JPS59145034U/ja
Application granted granted Critical
Publication of JPS6244534Y2 publication Critical patent/JPS6244534Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
JP3756883U 1983-03-17 1983-03-17 ウエハ−取扱装置 Granted JPS59145034U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3756883U JPS59145034U (ja) 1983-03-17 1983-03-17 ウエハ−取扱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3756883U JPS59145034U (ja) 1983-03-17 1983-03-17 ウエハ−取扱装置

Publications (2)

Publication Number Publication Date
JPS59145034U true JPS59145034U (ja) 1984-09-28
JPS6244534Y2 JPS6244534Y2 (enrdf_load_stackoverflow) 1987-11-25

Family

ID=30168254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3756883U Granted JPS59145034U (ja) 1983-03-17 1983-03-17 ウエハ−取扱装置

Country Status (1)

Country Link
JP (1) JPS59145034U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009515349A (ja) * 2005-11-09 2009-04-09 ウルフギャング クーネン， 付着力を用いて円盤状基板を分離する方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011061120A (ja) * 2009-09-14 2011-03-24 Sumitomo Metal Fine Technology Co Ltd ウエハ搬送方法およびウエハ搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009515349A (ja) * 2005-11-09 2009-04-09 ウルフギャング クーネン， 付着力を用いて円盤状基板を分離する方法

Also Published As

Publication number Publication date
JPS6244534Y2 (enrdf_load_stackoverflow) 1987-11-25

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