JPS59143906A - Measuring projector - Google Patents

Abstract

PURPOSE:To simplify the device and to make the device compact, by providing a mirror on the opposite side of a work with respect to a half mirror in a measuring projector, wherein a telecentric lighting system is provided and an image is expanded and formed by an expanding and projecting lens by utilizing the reflected light from the work, thereby performing reflection lighting and transmission lighting by a reflection lighting system. CONSTITUTION:The reflection lighting of a work W, which is mounted on the focal point of a projection lens 13, is performed by a light source lamp 4 through a half mirror 6. The image of the reflected light from the work W is expanded and formed by the projection lens 13 on a screen 8. Thus the state of the surface of the work W is checked. The light, which is reflected by the half mirror 6 and passed through the periphery of the work W, is reflected by a reflecting surface 14A of a mirror 14, and the contour and the shape of the work W are expanded and formed on the screen 8 through the projection lens 13. Thus the shape, the size, and the like of the Work are measured. The reflecting surface 14A is formed on the back side of the mirror 14, and its upper side serves the role of mounting table, on which the work W is mounted.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement of a projection inspection machine for inspecting cutting edges of machine tools, gears, etc. by enlarging projection.

Conventionally, as shown in FIG. 1, light from a light source lamp 1 is irradiated from below through a condenser lens 2 onto a workpiece (not shown) placed on a stage 3, or as described above. Light from a light source lamp 4 placed on the side of the table 3 is irradiated from above the workpiece on the table 3 through a condenser lens 5 and a half mirror 6, and transmitted light or reflected light is generated thereby. There is a projection method in which the shape of the workpiece is imaged on a screen 8 via an enlarged projection device 7.

Reference numeral 10 in the figure represents a heat ray absorption filter, and 11 and 12 represent mirrors for reflecting the light beams that have passed through the projection lens 13 of the enlarged projection device 7 and guiding them to the screen 8, respectively.

The conventional projector described above is designed to obtain an optimally enlarged image of the workpiece on the stage 3 by appropriately utilizing one or both of transmitted illumination and reflected illumination. Since the separate light source lamps 1 and 4 for illumination are each attached to the main body H, measures must be taken to prevent the influence of thermal distortion from occurring on the enlarged projection device 7, and each is provided with its own light source. Therefore, the amount of light lost is large, and when only one light source lamp is used, the other light source lamp is not used and its efficiency is low.
In addition, there is a problem that the entire structure becomes large.

The present invention has been made in view of the above-mentioned conventional problems, and provides a projection inspection machine that can perform reflected illumination and transmitted illumination using a counter illumination system, and that can be made simple and compact. The first goal is to do so.

After this light is released, a verno mirror is placed on the optical axis of the magnifying projection lens, and the light projected from the side of the half mirror is reflected by the half mirror to illuminate the workpiece placed at the focal position of the projection lens. In a projection inspection machine that is equipped with a telesend link illumination system and that uses reflected light from the workpiece to form an enlarged image of the shape of the workpiece on the screen using the enlarged projection lens, the half mirror of the workpiece and the The above objective is achieved by placing a mirror on the opposite side.

Further, the present invention achieves the above object by providing the projection inspection machine with the mirror as a back mirror and allowing the workpiece to be placed on the front side of the mirror.

Further, the present invention achieves the above object by making the mirror a surface mirror in the projection inspection machine and allowing the mirror to move in and out of the telesend link illumination system.

Embodiments of the present invention will be described below with reference to the drawings.

In this embodiment, the same or equivalent parts as those of the conventional projection inspection machine shown in FIG. 1 are given the same reference numerals.

In this embodiment, as shown in FIG. 2, a half mirror 6 is arranged on the optical axis 13A of the magnifying projection lens 13, and the light emitted from the measuring direction of the half mirror 6 is reflected by the half mirror 6. and includes a telecentric illumination system that irradiates the work W placed at the focal position of the projection lens 13,
In the projection inspection machine, the shape of the workpiece is enlarged and imaged on the screen 8 by the enlargement projection lens 13 using reflected light from the workpiece W 7'll, etc. A mirror 14 is placed on the side.

This mirror 14 has a reflective surface 14 on the back side, as shown in an enlarged view in FIG. A is formed on the front side thereof, and a mounting table 8 is provided on the front side thereof so as to also serve as a stage on which the workpiece \ is placed.

In this embodiment, the workpiece W placed at the focal point of the projection lens 13 is reflected and illuminated from the light source lamp 47 through the half mirror 6, and the workpiece \\I' is illuminated with d-
3 is enlarged and imaged on the screen 8 by the projection lens 13.
1 can be inspected, and after being violated by the half mirror 6, it passes around the workpiece ＼・V and the mirror 1
The outline shape of the work W can be projected onto the screen 8 via the projection lens 13 by the light reflected by the reflective surface 14A of No. 4, and its shape and dimensions can be measured.

Therefore, the surface shape and outline shape of the workpiece W can be inspected by subjecting the workpiece W to reflected and transmitted illumination using only the counter-illumination system in the conventional projection inspection machine.

1 (In this case, the mirror 14 also serves as a stage for the work ~\, so not only can the number of parts be reduced, but also the irregular surface of the mirror 14 can be In addition, since the distance between the offending surface 1' 4A of the mirror 14 and the reflecting surface of the workpiece W can be kept large and always a constant distance, it is possible to securely protect the workpiece W from the back side. It has the advantage of being able to provide qf4 lighting.

In the above embodiment, the reflective surface 14A is formed on the back side of the mirror 14, but the present invention is not limited to this, and as shown in FIG. It may be rubbed to form surface 14A. In this case, in order to prevent the illegal surface 14A from protruding, the transparent stage 3
It is best to place it below.

Further, the mirror 14 is installed in the telecentric illumination system at a position below the stage 3 in the projection inspection machine shown in FIG. In the 1: state, it is possible to selectively obtain reflected illumination and transmitted illumination, or by taking out the mirror 14 from the telecenter 1-rick illumination system and obtaining only the counter illumination in the 1: state.

Further, in the above embodiment, if the mirror 14 is made wavelength selective, for example, so that only green light is reflected, the contour shape of the image of the workpiece W on the screen 8 will be the same as that of the green light. During the observation, it is possible to distinguish the reflected light from the surface of work 'v14.

In the above embodiment, the reflective surface 148 of the mirror 14 is
Although this embodiment shows a case in which the mirror 14 is placed close to the workpiece W, the present invention is not limited to this, and as long as the position of the mirror 14 is not significantly more complicated than the workpiece ~\I. , may be placed at positions spaced apart within a certain range. In this case, since the illumination system is a telescopic illumination system, the transmitted illumination light formed by the reflective surface 14A of the mirror 14 does not become dark.

Furthermore, in the above embodiment, the half mirror 6 is replaced by the projection lamp 13.
and the work W.
l. The present invention is not limited to this, but the half mirror 6 may be arranged between the lamp groups constituting the projection lens 13.
Alternatively, a half mirror 6 may be placed between the projection lamp 13 and the screen 8.

Since the present invention is configured as described above, it is possible to obtain reflected illumination and transmitted illumination using only a conventional reflected illumination system with a simple configuration.Therefore, the conventional transmitted illumination system is not required, and a projection inspection machine can be used. It has the inherent advantage that it can be made smaller and simpler, the influence of thermal distortion can be reduced, and manufacturing costs can be significantly reduced.

[Brief explanation of the drawing]

Fig. 1 is an optical system layout diagram showing the outline of the optical system in a conventional projection 1@ scanner, and Fig. 2 is an optical system layout diagram similar to Fig. 1, showing an embodiment of the projection inspection system according to the present invention. 3 is an enlarged four-sided view showing a portion of the mirror in the same embodiment, and FIG. 4 is a sectional view similar to FIG. 3 of the second embodiment of the present invention. 4... Light source lamp, 6... Half mirror-1 8... Screen, 13... Projection lens, 13A... Optical axis, 14... Mirror, 14 A... Reflective surface, \\ ···work. Agent Keisuke Matsuyama (and 1 other person) Figure 1 Figure 2 Figure 4

Claims (3)

[Claims] (1) A half mirror is arranged on the optical axis of the magnifying projection lens, and the light projected from the side of the half mirror is directed to the half mirror.
a telecentric one-link illumination system that reflects light from the workpiece and illuminates the workpiece placed at the focal position of the projection lens, and uses the reflected light from the workpiece to enlarge the shape of the workpiece onto a screen by the magnifying projection lens. A projection system characterized in that a mirror is placed on the opposite side of the workpiece to the half mirror, in a projection system that forms an image. (2) The projection inspection machine according to claim 1, wherein the mirror is a back mirror, and the workpiece can be placed on the front side of the mirror. (3) The projection inspection machine according to claim 1, wherein the mirror is a surface mirror and the telescopic illumination light can be freely entered and exited.