JPS5914264U - マイクロ波放電光源装置 - Google Patents

マイクロ波放電光源装置

Info

Publication number
JPS5914264U
JPS5914264U JP10970182U JP10970182U JPS5914264U JP S5914264 U JPS5914264 U JP S5914264U JP 10970182 U JP10970182 U JP 10970182U JP 10970182 U JP10970182 U JP 10970182U JP S5914264 U JPS5914264 U JP S5914264U
Authority
JP
Japan
Prior art keywords
lamp
light source
source device
discharge light
microwave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10970182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS638008Y2 (enrdf_load_stackoverflow
Inventor
勲 正田
児玉　仁史
馬場　景一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10970182U priority Critical patent/JPS5914264U/ja
Publication of JPS5914264U publication Critical patent/JPS5914264U/ja
Application granted granted Critical
Publication of JPS638008Y2 publication Critical patent/JPS638008Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Discharge Lamps And Accessories Thereof (AREA)
JP10970182U 1982-07-20 1982-07-20 マイクロ波放電光源装置 Granted JPS5914264U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10970182U JPS5914264U (ja) 1982-07-20 1982-07-20 マイクロ波放電光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10970182U JPS5914264U (ja) 1982-07-20 1982-07-20 マイクロ波放電光源装置

Publications (2)

Publication Number Publication Date
JPS5914264U true JPS5914264U (ja) 1984-01-28
JPS638008Y2 JPS638008Y2 (enrdf_load_stackoverflow) 1988-03-09

Family

ID=30255436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10970182U Granted JPS5914264U (ja) 1982-07-20 1982-07-20 マイクロ波放電光源装置

Country Status (1)

Country Link
JP (1) JPS5914264U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04230949A (ja) * 1990-03-26 1992-08-19 Fusion Syst Corp 改良型バルブ装着構成を有する無電極ランプ
JP2008010384A (ja) * 2006-05-31 2008-01-17 Ushio Inc 光源装置
JP2011146275A (ja) * 2010-01-15 2011-07-28 Iwasaki Electric Co Ltd 光源装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04230949A (ja) * 1990-03-26 1992-08-19 Fusion Syst Corp 改良型バルブ装着構成を有する無電極ランプ
JP2008010384A (ja) * 2006-05-31 2008-01-17 Ushio Inc 光源装置
JP2011146275A (ja) * 2010-01-15 2011-07-28 Iwasaki Electric Co Ltd 光源装置

Also Published As

Publication number Publication date
JPS638008Y2 (enrdf_load_stackoverflow) 1988-03-09

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