JPS59141236A - Preparation of molten material for liquid epitaxial growth - Google Patents

Abstract

PURPOSE:To form the materials for multiple growth processes easily with excellent reproducibility in a single forming process of a melted material by a method wherein a forming vessel with multiple partitions is insertedly provided downward in a quartz-made ampul while the material contained in the vessel is melted and mixed after rotating the ampul to be cooled down and solidified after the melted material is poured into the forming vessel. CONSTITUTION:A forming vessel 1 is insertedly provided upside down in the upper half region of a high purity quartz-made ampul 3 with inside diameter which is sufficient to contain the peripheral wall of half cylindrical high purity quartz-made melt forming vessel 1 with multiple partitions 2. Then the lower half vacant region of the ampul 3 is filled with melting raw material 4 for growth. Firstly after making the space inside the ampul 3 vacuum, the opening of the ampul 3 is sealed. Then the ampul 3 is heated in a heating furnace 6 to melt the melting raw material 4 and the ampul 3 is rotated by 180 degrees to pour the melted raw material 4 into the forming vessel 1. Secondly the ampul 3 may be immersed in coolant 7 to make the melting material 14 soldify within each partition.

Description

Detailed Description of the invention
≧shiatsuw1mh This invention relates to a manufacturing method that can simultaneously obtain a plurality of molding melt materials for liquid phase epitaxial growth having the same composition with slight compositional errors.

(b) Technology Trends Generally, mercury, which has a narrow energy gap, is used as a material for forming photoelectric conversion elements such as infrared sensing elements.

Cattle-only crystals of compounds such as cadmicum and tellurium (Hg1-XCdXTe) are used. For example Ht
A single crystal consisting of 21-x 0dxTe is usually grown by liquid phase epitaxial growth, such as the tipping method, which involves tilting a quartz ampoule, or the boat slide (Boa, 5lide) method, which uses a carbon slide boat. For example, it is formed as a crystal layer on a crystal substrate of cadmium telluride (cdTo) by a method. By the way, by the above-mentioned growth method, a desired uniform composition of 1-xCTX're can be grown on a 0dTe crystal substrate.
In order to grow a crystal layer consisting of
It is necessary to thoroughly melt and combine the melt materials for growth consisting of Cd and Te in advance to form a uniform compound.

(C) Discrepancies between the conventional technology and the conventional technology, HE', which uses the above-mentioned easily evaporable Hg, 1-
For liquid phase epitaxial growth consisting of Knowing and increasing the light,
Once inside the asifle, the opening is hermetically sealed. After heating this ampoule to a predetermined temperature to sufficiently melt the melt material inside and uniformly combine it, the ampoule is rapidly cooled to solidify the material inside the ampoule and release Hg.
A compound melt material of 1-xCdxTe was formed.

However, in this method of forming the melt material for growth one unit at a time, there is a problem that there is a slight error in the composition ratio of the melt material for growth for each forming unit, and the reproducibility is poor. However, it was also an extremely inefficient method. For this reason, there has been a need for a method for forming a growing melt material for one roll with good reproducibility.

(d) Purpose of the Invention In order to solve the above-mentioned problems, the present invention is a novel method that improves the reproducibility of melt material spines for growth in one melt material forming process. It is an object of the present invention to provide a method for cleaving melt paulownia thorns for liquid phase eviaxial growth. .

(e) Structure and object of the invention According to the present invention, a plurality of molded containers are inserted downward in the upper longitudinal region of a quartz ampoule, and a melt-molded container is inserted in the lower region. After accommodating the material and hermetically sealing the ampoule, the ampoule is heated to a predetermined temperature to melt and mix the melt material inside, and in this state, the ampoule is rotated to release the molten paulownia. A liquid characterized in that the lees is allowed to flow into the molding container with a plurality of partitions which is turned upside down, and the rear ampoule is cooled to form a molded melt material with a cold surface in the molding container. Melt materials for phase epitaxial growth! 8! This is achieved by providing a force-building method.

(f) Examples of the invention - Examples of the manufacturing method of the invention will be described in detail below with reference to the drawings.

FIGS. 1 to 4 are a perspective view and a schematic cross-sectional view of essential parts, illustrating an embodiment of the method for manufacturing a melt material for liquid phase epitaxial growth according to the present invention.

First, as shown in Figure 1, a semi-cylindrical melt made of high-purity quartz is formed with a plurality of (in this case five) partitions 2! ! i!
Prepare base 1. Next, as shown in FIG. 2, the melt-molded container 1 is placed in the upper half region of the ampoule 3 made of high-purity stone layer, which has an inner diameter that allows the outer part of the melt-molded container 1 to fit with precision. Place it inset upside down. Then, in the lower half space *# in the ampoule 3, 9, for example, easily evaporable Hg and O(1, Te) were mixed in a prescribed composition ratio in a predetermined plow-scale manner. Fill the ampoule 3 with the weighed growth melt 4 for at least 6 growth steps. 3. After evacuating the inside of the ampoule 3, melt the opening of the ampoule 3 and evacuate the inside of the ampoule 3. After that, an inert scum of argon (Ar)/4- may be sealed.) After that, a stone 11! is placed in the sealed end 3a of the ampoule 3. : Welding the operating tool 5 made of the product, placing the ampoule 3 in the heating furnace 6 as shown in the figure, heating it to melt the growth melt material 4 in the ampoule 3, and in a sufficiently melted state, The ampoule 3 is 180
7% rotation to reduce the melt molding volume &1 in the ampul 3.
Inside.

The molten growth melt material 4 flows in and fills the space. Next, as shown in FIG. 3, the ampoule 3 is prepared.

The melt cord material 4 for growth in the melt molding container 1 is quenched by immersing it in a cooling solution 7 such as ethylene glycol (HOOH2.CH20H) to which condensate discharged from the heating furnace 6 has been added. By doing so, the easily evaporable component I(g) in the growth melt material 4 is prevented from evaporating into the air, and the growth melt material 14 consisting of Hg1-XCdXTe having a uniform composition is A negative mold 17 is placed in each compartment 2 of the container 1.

Therefore, by subsequently pulling out the ampoule 3 from the cooling solution 7 to collect the melt-formed wood 1, the melt material 114 for liquid phase epitaxial growth grown in the Issei process is obtained as shown in Section 4 I. It is possible to get 6 at once. In addition, since these six melt materials 14 all have the same composition ratio, by using this series of melt materials 14 for liquid phase epiaxial growth, it is possible to easily form an epitaxial layer made of 110(]xTe with good crystallinity. A crystalline layer can be obtained.

In the above examples, Hgx containing Hg, an easily evaporable element,
An example will be explained in which a melt material for growth such as Also applicable: Needless to say.

(b)) Effects of the invention As is clear from the above explanation, 1. According to the method for producing a melt material for liquid phase epitaxial growth according to the present invention, a plurality of vacancies with a uniform composition of the melt aggregates of a plurality of ridges can be produced. Another advantage is that the effectiveness of the melt material in the growth unit is greatly reduced all at once. Therefore, the melt material of the growth unit formed by the manufacturing method of the present invention is Hgl, Cr5XTe%-
It is extremely advantageous to apply it to the liquid phase epitaxial growth of monolithic crystals of compounds consisting of.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing an embodiment of a partitioned melt molding container used in the method for producing a melt material for liquid phase epitaxial growth according to the present invention, and FIGS. 2 and 3 show a melt molding container for liquid phase epitaxial growth according to the present invention. FIG. 4 is a cross-sectional view of a main part of the process for explaining an embodiment of the method for producing the material; FIG. 4 is a perspective view showing an embodiment of the melt material of the growth unit obtained by the production method of the present invention. In the drawing, 1 is a melt forming machine fM'4 with partition 2. 3 is a quartz ampoule, 3a is a sealed end of ampoule 3, 4
5 is for Nord rope material for growth, and 5 is for ampoule operation. Reference numeral 6 indicates a cooling solution in a heating furnace 17, and 14 indicates a melt material for growth molded into several pieces. Figure 1 Figure 2 Figure 3 Figure 4! I! J

Claims (1)

[Scope of Claims] A plurality of partitioned melt molding containers are inserted in one direction in the upper region of the quartz ampoule in the longitudinal direction, and a melt material is stored in the lower region. After the ampoule is hermetically sealed, the ampoule is heated to a predetermined temperature to melt and mix the melt material inside, and in this state, the ampoule is rotated to turn the melt material in the molten state to one side of the V. The melt is poured into the melt molding container through the plurality of partitions mentioned above. A method for producing a melt material for liquid phase epitaxial growth, characterized in that the quartz ampoule is then cooled to form the molded material (to form a plurality of molded melt materials solidified in each vessel).