JPS59132600A - プラズマト−チ並びにその使用法 - Google Patents

プラズマト−チ並びにその使用法

Info

Publication number
JPS59132600A
JPS59132600A JP58171058A JP17105883A JPS59132600A JP S59132600 A JPS59132600 A JP S59132600A JP 58171058 A JP58171058 A JP 58171058A JP 17105883 A JP17105883 A JP 17105883A JP S59132600 A JPS59132600 A JP S59132600A
Authority
JP
Japan
Prior art keywords
tube
gas
plasma
plasma torch
waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58171058A
Other languages
English (en)
Japanese (ja)
Inventor
エミル・ブロワエ
フイリツプ・ルプランセ
ジヤン・マレ−
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bpifrance Financement SA
Original Assignee
Agence National de Valorisation de la Recherche ANVAR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agence National de Valorisation de la Recherche ANVAR filed Critical Agence National de Valorisation de la Recherche ANVAR
Publication of JPS59132600A publication Critical patent/JPS59132600A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49157—Limitation, collision, interference, forbidden zones, avoid obstacles

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
JP58171058A 1982-09-16 1983-09-16 プラズマト−チ並びにその使用法 Pending JPS59132600A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8215682A FR2533397A2 (fr) 1982-09-16 1982-09-16 Perfectionnements aux torches a plasma
FR8215682 1982-09-16

Publications (1)

Publication Number Publication Date
JPS59132600A true JPS59132600A (ja) 1984-07-30

Family

ID=9277514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58171058A Pending JPS59132600A (ja) 1982-09-16 1983-09-16 プラズマト−チ並びにその使用法

Country Status (6)

Country Link
US (1) US4611108A (en:Method)
EP (1) EP0104109B1 (en:Method)
JP (1) JPS59132600A (en:Method)
CA (1) CA1228650A (en:Method)
DE (1) DE3376379D1 (en:Method)
FR (1) FR2533397A2 (en:Method)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03214600A (ja) * 1990-01-17 1991-09-19 Nippon Koshuha Kk マイクロ波熱プラズマ反応装置
JP2001510939A (ja) * 1997-07-16 2001-08-07 レール・リキード・ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード 表面波プラズマでガスを励起する装置
JP2014063721A (ja) * 2012-08-28 2014-04-10 Agilent Technologies Inc 電磁導波路およびプラズマ源を含む機器
CN106304602A (zh) * 2016-09-26 2017-01-04 吉林大学 一种微波耦合等离子体谐振腔

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FR2595868B1 (fr) * 1986-03-13 1988-05-13 Commissariat Energie Atomique Source d'ions a resonance cyclotronique electronique a injection coaxiale d'ondes electromagnetiques
NL8901806A (nl) * 1989-07-13 1991-02-01 Philips Nv Vermogensgenerator voor het leveren van een hoogfrequente hoogspanning.
US5389153A (en) * 1993-02-19 1995-02-14 Texas Instruments Incorporated Plasma processing system using surface wave plasma generating apparatus and method
US5565118A (en) * 1994-04-04 1996-10-15 Asquith; Joseph G. Self starting plasma plume igniter for aircraft jet engine
AU2003195A (en) * 1994-06-21 1996-01-04 Boc Group, Inc., The Improved power distribution for multiple electrode plasma systems using quarter wavelength transmission lines
DE19511915C2 (de) * 1995-03-31 1997-04-30 Wu Jeng Ming Dipl Ing Plasmabrenner mit einem Mikrowellengenerator
US5793013A (en) * 1995-06-07 1998-08-11 Physical Sciences, Inc. Microwave-driven plasma spraying apparatus and method for spraying
DE29616475U1 (de) * 1996-09-21 1996-12-05 Preussag Wasser und Rohrtechnik GmbH, 30625 Hannover Plasmabrennerspitze
US5963169A (en) * 1997-09-29 1999-10-05 The United States Of America As Represented By The Secretary Of The Navy Multiple tube plasma antenna
US6057645A (en) * 1997-12-31 2000-05-02 Eaton Corporation Plasma discharge device with dynamic tuning by a movable microwave trap
DE19814812C2 (de) * 1998-04-02 2000-05-11 Mut Mikrowellen Umwelt Technol Plasmabrenner mit einem Mikrowellensender
US6420699B1 (en) * 1998-09-30 2002-07-16 President And Fellows Of Harvard College Method and apparatus for altering the velocity of molecules
RU2157061C1 (ru) * 1999-03-23 2000-09-27 Институт проблем технологии микроэлектроники и особочистых материалов РАН Устройство для свч-плазменной обработки материалов
DE19925790A1 (de) * 1999-06-05 2000-12-07 Inst Oberflaechenmodifizierung Verfahren und Vorrichtung zur Bearbeitung von optischen und anderen Oberflächen mittels Hochrate-Plasmaprozessen
US6624719B1 (en) 2000-04-05 2003-09-23 Asi Technology Corporation Reconfigurable electromagnetic waveguide
US6812895B2 (en) 2000-04-05 2004-11-02 Markland Technologies, Inc. Reconfigurable electromagnetic plasma waveguide used as a phase shifter and a horn antenna
US6369763B1 (en) 2000-04-05 2002-04-09 Asi Technology Corporation Reconfigurable plasma antenna
AUPQ861500A0 (en) * 2000-07-06 2000-08-03 Varian Australia Pty Ltd Plasma source for spectrometry
FR2815888B1 (fr) 2000-10-27 2003-05-30 Air Liquide Dispositif de traitement de gaz par plasma
DE10112494C2 (de) * 2001-03-15 2003-12-11 Mtu Aero Engines Gmbh Verfahren zum Plasmaschweißen
US7465362B2 (en) 2002-05-08 2008-12-16 Btu International, Inc. Plasma-assisted nitrogen surface-treatment
US7445817B2 (en) 2002-05-08 2008-11-04 Btu International Inc. Plasma-assisted formation of carbon structures
US7432470B2 (en) 2002-05-08 2008-10-07 Btu International, Inc. Surface cleaning and sterilization
US7560657B2 (en) 2002-05-08 2009-07-14 Btu International Inc. Plasma-assisted processing in a manufacturing line
US7494904B2 (en) 2002-05-08 2009-02-24 Btu International, Inc. Plasma-assisted doping
US7497922B2 (en) 2002-05-08 2009-03-03 Btu International, Inc. Plasma-assisted gas production
WO2003095058A2 (en) 2002-05-08 2003-11-20 Dana Corporation Plasma-assisted multi-part processing
US7498066B2 (en) 2002-05-08 2009-03-03 Btu International Inc. Plasma-assisted enhanced coating
US7638727B2 (en) 2002-05-08 2009-12-29 Btu International Inc. Plasma-assisted heat treatment
US6876330B2 (en) * 2002-07-17 2005-04-05 Markland Technologies, Inc. Reconfigurable antennas
US6710746B1 (en) 2002-09-30 2004-03-23 Markland Technologies, Inc. Antenna having reconfigurable length
US7189940B2 (en) 2002-12-04 2007-03-13 Btu International Inc. Plasma-assisted melting
JP4109213B2 (ja) * 2004-03-31 2008-07-02 株式会社アドテック プラズマ テクノロジー 同軸形マイクロ波プラズマトーチ
US7442271B2 (en) * 2004-04-07 2008-10-28 Board Of Trustees Of Michigan State University Miniature microwave plasma torch application and method of use thereof
US7164095B2 (en) * 2004-07-07 2007-01-16 Noritsu Koki Co., Ltd. Microwave plasma nozzle with enhanced plume stability and heating efficiency
US7271363B2 (en) * 2004-09-01 2007-09-18 Noritsu Koki Co., Ltd. Portable microwave plasma systems including a supply line for gas and microwaves
US20080093358A1 (en) * 2004-09-01 2008-04-24 Amarante Technologies, Inc. Portable Microwave Plasma Discharge Unit
WO2007013875A2 (en) * 2004-09-01 2007-02-01 Amarante Technologies, Inc. A portable microwave plasma discharge unit
US7189939B2 (en) * 2004-09-01 2007-03-13 Noritsu Koki Co., Ltd. Portable microwave plasma discharge unit
US20060052883A1 (en) * 2004-09-08 2006-03-09 Lee Sang H System and method for optimizing data acquisition of plasma using a feedback control module
US7619178B2 (en) * 2006-02-06 2009-11-17 Peschel William P Directly connected magnetron powered self starting plasma plume igniter
TW200742506A (en) * 2006-02-17 2007-11-01 Noritsu Koki Co Ltd Plasma generation apparatus and work process apparatus
US8887683B2 (en) 2008-01-31 2014-11-18 Plasma Igniter LLC Compact electromagnetic plasma ignition device
US20100074810A1 (en) * 2008-09-23 2010-03-25 Sang Hun Lee Plasma generating system having tunable plasma nozzle
US7921804B2 (en) * 2008-12-08 2011-04-12 Amarante Technologies, Inc. Plasma generating nozzle having impedance control mechanism
US20100201272A1 (en) * 2009-02-09 2010-08-12 Sang Hun Lee Plasma generating system having nozzle with electrical biasing
US20100254853A1 (en) * 2009-04-06 2010-10-07 Sang Hun Lee Method of sterilization using plasma generated sterilant gas
TW201224198A (en) * 2010-12-15 2012-06-16 Yu-Nan Lin Plasma coating device
GB2490355B (en) 2011-04-28 2015-10-14 Gasplas As Method for processing a gas and a device for performing the method
US10477665B2 (en) * 2012-04-13 2019-11-12 Amastan Technologies Inc. Microwave plasma torch generating laminar flow for materials processing
CN103269561B (zh) * 2013-05-15 2016-01-06 浙江大学 波导直馈式微波等离子体炬装置
US10167556B2 (en) * 2014-03-14 2019-01-01 The Board Of Trustees Of The University Of Illinois Apparatus and method for depositing a coating on a substrate at atmospheric pressure
PL3389862T3 (pl) 2015-12-16 2024-03-04 6K Inc. Sferoidalne metale podlegające odwodornieniu oraz cząstki stopów metali
US10987735B2 (en) 2015-12-16 2021-04-27 6K Inc. Spheroidal titanium metallic powders with custom microstructures
DE102017130210A1 (de) 2017-12-15 2019-06-19 Hegwein GmbH Plasmabrennerspitze für einen Plasmabrenner
US20190186369A1 (en) 2017-12-20 2019-06-20 Plasma Igniter, LLC Jet Engine with Plasma-assisted Combustion
CA3104080A1 (en) 2018-06-19 2019-12-26 6K Inc. Process for producing spheroidized powder from feedstock materials
CN114007782A (zh) 2019-04-30 2022-02-01 6K有限公司 机械合金化的粉末原料
SG11202111578UA (en) 2019-04-30 2021-11-29 6K Inc Lithium lanthanum zirconium oxide (llzo) powder
JP2023512391A (ja) 2019-11-18 2023-03-27 シックスケー インコーポレイテッド 球形粉体用の特異な供給原料及び製造方法
US11590568B2 (en) 2019-12-19 2023-02-28 6K Inc. Process for producing spheroidized powder from feedstock materials
JP2023532457A (ja) 2020-06-25 2023-07-28 シックスケー インコーポレイテッド 微細複合合金構造体
CN116547068A (zh) * 2020-09-24 2023-08-04 6K有限公司 用于启动等离子体的系统、装置及方法
US11919071B2 (en) 2020-10-30 2024-03-05 6K Inc. Systems and methods for synthesis of spheroidized metal powders
EP4275239A4 (en) 2021-01-11 2024-12-18 6K Inc. METHODS AND SYSTEMS FOR RECLAIMING LI-ION CATHODE MATERIALS USING MICROWAVE PLASMA TREATMENT
CN117120182A (zh) 2021-03-31 2023-11-24 6K有限公司 用于金属氮化物陶瓷的增材制造的系统和方法
WO2023229928A1 (en) 2022-05-23 2023-11-30 6K Inc. Microwave plasma apparatus and methods for processing materials using an interior liner
US12040162B2 (en) 2022-06-09 2024-07-16 6K Inc. Plasma apparatus and methods for processing feed material utilizing an upstream swirl module and composite gas flows
WO2024044498A1 (en) 2022-08-25 2024-02-29 6K Inc. Plasma apparatus and methods for processing feed material utilizing a powder ingress preventor (pip)
US12195338B2 (en) 2022-12-15 2025-01-14 6K Inc. Systems, methods, and device for pyrolysis of methane in a microwave plasma for hydrogen and structured carbon powder production

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3588594A (en) * 1968-01-19 1971-06-28 Hitachi Ltd Device for bending a plasma flame
JPS5939178B2 (ja) * 1977-04-25 1984-09-21 株式会社東芝 活性化ガス発生装置
US4230448A (en) * 1979-05-14 1980-10-28 Combustion Electromagnetics, Inc. Burner combustion improvements
FR2456787A1 (fr) * 1979-05-18 1980-12-12 Thomson Csf Dispositif hyperfrequence pour le depot de films minces sur des solides
FR2473833A1 (fr) * 1980-01-11 1981-07-17 Petrov Evgeny Plasmatron a ultra-haute frequence
FR2480552A1 (fr) * 1980-04-10 1981-10-16 Anvar Generateur de plasmaŸ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03214600A (ja) * 1990-01-17 1991-09-19 Nippon Koshuha Kk マイクロ波熱プラズマ反応装置
JP2001510939A (ja) * 1997-07-16 2001-08-07 レール・リキード・ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード 表面波プラズマでガスを励起する装置
JP2014063721A (ja) * 2012-08-28 2014-04-10 Agilent Technologies Inc 電磁導波路およびプラズマ源を含む機器
CN106304602A (zh) * 2016-09-26 2017-01-04 吉林大学 一种微波耦合等离子体谐振腔

Also Published As

Publication number Publication date
CA1228650A (fr) 1987-10-27
DE3376379D1 (en) 1988-05-26
FR2533397B2 (en:Method) 1985-03-08
US4611108A (en) 1986-09-09
EP0104109A1 (fr) 1984-03-28
FR2533397A2 (fr) 1984-03-23
EP0104109B1 (fr) 1988-04-20

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