JPS59130420A - 熱処理治具の插入取出し装置 - Google Patents

熱処理治具の插入取出し装置

Info

Publication number
JPS59130420A
JPS59130420A JP22201183A JP22201183A JPS59130420A JP S59130420 A JPS59130420 A JP S59130420A JP 22201183 A JP22201183 A JP 22201183A JP 22201183 A JP22201183 A JP 22201183A JP S59130420 A JPS59130420 A JP S59130420A
Authority
JP
Japan
Prior art keywords
jig
wafer
rod
thermal treatment
internal pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22201183A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6235261B2 (enrdf_load_stackoverflow
Inventor
Masakuni Akiba
秋葉　政邦
Hiroto Nagatomo
長友　宏人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP22201183A priority Critical patent/JPS59130420A/ja
Publication of JPS59130420A publication Critical patent/JPS59130420A/ja
Publication of JPS6235261B2 publication Critical patent/JPS6235261B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP22201183A 1983-11-28 1983-11-28 熱処理治具の插入取出し装置 Granted JPS59130420A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22201183A JPS59130420A (ja) 1983-11-28 1983-11-28 熱処理治具の插入取出し装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22201183A JPS59130420A (ja) 1983-11-28 1983-11-28 熱処理治具の插入取出し装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP4445677A Division JPS53129964A (en) 1977-04-20 1977-04-20 Method and device for inserting and taking out of heat treatment jig

Publications (2)

Publication Number Publication Date
JPS59130420A true JPS59130420A (ja) 1984-07-27
JPS6235261B2 JPS6235261B2 (enrdf_load_stackoverflow) 1987-07-31

Family

ID=16775705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22201183A Granted JPS59130420A (ja) 1983-11-28 1983-11-28 熱処理治具の插入取出し装置

Country Status (1)

Country Link
JP (1) JPS59130420A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6235261B2 (enrdf_load_stackoverflow) 1987-07-31

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