JPS59128800U

JPS59128800U - Substrate processing equipment

Info

Publication number: JPS59128800U
Application number: JP2255283U
Authority: JP
Inventors: 丸山　実; 高村　唯史
Original assignee: パイオニア株式会社
Priority date: 1983-02-18
Filing date: 1983-02-18
Publication date: 1984-08-30

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図は本考案に係る基板処理装置の側面図、第２図は
第１図におけるＩ−Ｉ矢視図、第３図は基板押圧装置の
側面図、第４図は該基板押圧装置の動作状態を示す図で
ある。主要部分の符号の説明、１・・・駆動ベース、３・・・
マガジン、４・・・基板、６・・・基板押圧装置、８・
・・ガイドプレート、９・・・スライダ、１０．１６・
・・シリンダ装置、１１・・・中継部材、１３・・・爪
部材、１７拳・・コンベア。FIG. 1 is a side view of the substrate processing apparatus according to the present invention, FIG. 2 is a view taken along the line II in FIG. 1, FIG. 3 is a side view of the substrate pressing device, and FIG. 4 is a side view of the substrate pressing device. It is a figure which shows an operating state. Explanation of symbols of main parts, 1... Drive base, 3...
Magazine, 4... Board, 6... Board pressing device, 8.
・・Guide plate, 9・・Slider, 10.16・
... cylinder device, 11 ... relay member, 13 ... claw member, 17 fist ... conveyor.

Claims

[Scope of utility model registration request]

(1) A drive mechanism that vertically drives a substrate storage magazine that carries an edge of a substrate, a carry-out means that carries the substrate out of the magazine, and a drive mechanism that carries and transports the substrate carried out of the magazine. A substrate processing apparatus having a conveying means, wherein the unloading means presses a part of the substrate from below upward to temporarily separate the substrate from the magazine before unloading the substrate. A substrate processing apparatus comprising a pressing means.

(2) The pressing means includes a guide plate, a slider supported by the guide plate so as to be able to reciprocate in a substantially horizontal direction, and a slider that is swingably provided on the slider so that when swinging, the swinging end portion is attached to the substrate. a pawl member capable of engaging the part;
The slider driving means includes a slider driving means for driving the slider, and a regulating means provided at a predetermined position of the guide plate and engaging with the slider to restrict the forward movement of the slider within a predetermined range. The substrate processing apparatus according to claim 1, wherein the claw member is caused to swing after the forward movement of the slider is regulated by the regulating means.