JPS59127243U - Semiconductor wafer storage equipment - Google Patents
Semiconductor wafer storage equipmentInfo
- Publication number
- JPS59127243U JPS59127243U JP2183383U JP2183383U JPS59127243U JP S59127243 U JPS59127243 U JP S59127243U JP 2183383 U JP2183383 U JP 2183383U JP 2183383 U JP2183383 U JP 2183383U JP S59127243 U JPS59127243 U JP S59127243U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer storage
- rounded
- storage equipment
- processing liquids
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図及び第２図は従来の収容用具の平面図及び正面図
、第３図は第２図の■−■線における断面図、第４図は
第２図のＩＶ−ＩＶ線における断面図、第５図及び第６
図はこの考案の一実施例による収容用具の平面図及び正
面図、第７図は第６図の■−■線における断面図、第８
図は第６図の■−■線における断面図である。
１０・・・半導体ウェーハ、１１・・・側板部、ｌｌａ
・・・収容溝、ｌｌｂ・・・足部、１２．１３・・・端
辺部。
なお、図中同一符号は同−又は相当部分を示す。
Ａｌθ 、１２Figures 1 and 2 are a plan view and a front view of a conventional storage device, Figure 3 is a sectional view taken along the line ■-■ in Figure 2, and Figure 4 is a sectional view taken along the line IV-IV in Figure 2. , Figures 5 and 6
The figures are a plan view and a front view of a storage device according to an embodiment of the invention, FIG. 7 is a sectional view taken along the line ■-■ in FIG. 6, and FIG.
The figure is a sectional view taken along the line ■-■ in FIG. 6. DESCRIPTION OF SYMBOLS 10... Semiconductor wafer, 11... Side plate part, lla
...accommodating groove, llb...foot part, 12.13...edge part. Note that the same reference numerals in the figures indicate the same or equivalent parts. Alθ, 12
Claims (1)
部とで四角状に構成され、上、下方は開放されており、
上記両側板部の対向する内面はくし歯形状に形成され、
多数の収容溝が平行に立て方向に設けられ、これら両側
の収容溝の下方は円弧状に内方に狭められてあり、多数
枚の半導体ウェーハを上記両側の各収容溝にまたがり一
枚宛平行に、かつ、相互に間隔をあけ立てて収容し、各
種の処理液によりる処理及び純水による洗浄をするため
の収容用具において、上記両側板部、両端゛辺部及び各
収容溝部の各角部は丸めた面取りをし、各隅部は丸みを
付けた形状にしたことを特徴とする半導体ウェーハ収容
用具。It is made of a synthetic resin material that is resistant to processing liquids, and has a rectangular configuration with both side plates and both end sides, and is open at the top and bottom.
The opposing inner surfaces of the above-mentioned both side plate parts are formed in a comb tooth shape,
A large number of storage grooves are provided in parallel in the vertical direction, and the lower portions of the storage grooves on both sides are narrowed inward in an arc shape. In the storage tool for storing the containers vertically and spaced apart from each other for processing with various processing liquids and cleaning with pure water, A semiconductor wafer storage tool characterized in that the portion is rounded and chamfered, and each corner is rounded.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2183383U JPS59127243U (en) | 1983-02-15 | 1983-02-15 | Semiconductor wafer storage equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2183383U JPS59127243U (en) | 1983-02-15 | 1983-02-15 | Semiconductor wafer storage equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59127243U true JPS59127243U (en) | 1984-08-27 |
Family
ID=30152950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2183383U Pending JPS59127243U (en) | 1983-02-15 | 1983-02-15 | Semiconductor wafer storage equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59127243U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5645141U (en) * | 1979-09-14 | 1981-04-23 | ||
| JPS56150819A (en) * | 1980-04-24 | 1981-11-21 | Nec Kyushu Ltd | Accomodating case of semicouductor substrate |
-
1983
- 1983-02-15 JP JP2183383U patent/JPS59127243U/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5645141U (en) * | 1979-09-14 | 1981-04-23 | ||
| JPS56150819A (en) * | 1980-04-24 | 1981-11-21 | Nec Kyushu Ltd | Accomodating case of semicouductor substrate |
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