JPS5645141U - - Google Patents
Info
- Publication number
- JPS5645141U JPS5645141U JP12743279U JP12743279U JPS5645141U JP S5645141 U JPS5645141 U JP S5645141U JP 12743279 U JP12743279 U JP 12743279U JP 12743279 U JP12743279 U JP 12743279U JP S5645141 U JPS5645141 U JP S5645141U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12743279U JPS5645141U (en) | 1979-09-14 | 1979-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12743279U JPS5645141U (en) | 1979-09-14 | 1979-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5645141U true JPS5645141U (en) | 1981-04-23 |
Family
ID=29359292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12743279U Pending JPS5645141U (en) | 1979-09-14 | 1979-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5645141U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59127243U (en) * | 1983-02-15 | 1984-08-27 | 三菱電機株式会社 | Semiconductor wafer storage equipment |
-
1979
- 1979-09-14 JP JP12743279U patent/JPS5645141U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59127243U (en) * | 1983-02-15 | 1984-08-27 | 三菱電機株式会社 | Semiconductor wafer storage equipment |