JPS6059528U - Liquid phase epitaxial growth equipment - Google Patents
Liquid phase epitaxial growth equipmentInfo
- Publication number
- JPS6059528U JPS6059528U JP15159783U JP15159783U JPS6059528U JP S6059528 U JPS6059528 U JP S6059528U JP 15159783 U JP15159783 U JP 15159783U JP 15159783 U JP15159783 U JP 15159783U JP S6059528 U JPS6059528 U JP S6059528U
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- epitaxial growth
- phase epitaxial
- growth equipment
- solution storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のボート斜視図、又、第２図は第１・区ボ
ートの断面図である。第３図は本考案のボート構成実施
例断面図、第４図は第３図実施例図と異なる他のボート
構成実施例図、第５図は第４図の溶液収容部の下底構造
を示す断面図、及び第６図は上底と下底夫々の細孔配置
実施例になる平面図である。、
図中、１は基板保持板、２はスライダ、３は溶液収容箱
、４は２の窓部又は凹部、７は加工対象の成膜基板、８
は収容箱３底面の細孔、１０と１１は溶液収容箱、１３
は上底、１２と１６は下底、及び１５は収容箱の蓋であ
る。FIG. 1 is a perspective view of a conventional boat, and FIG. 2 is a sectional view of the first section boat. Figure 3 is a sectional view of an embodiment of the boat configuration of the present invention, Figure 4 is a diagram of another boat configuration example different from the embodiment diagram of Figure 3, and Figure 5 shows the bottom structure of the solution storage section of Figure 4. The sectional view shown and FIG. 6 are plan views showing examples of pore arrangement in the upper and lower bases, respectively. , In the figure, 1 is a substrate holding plate, 2 is a slider, 3 is a solution storage box, 4 is a window or recess of 2, 7 is a film forming substrate to be processed, 8
10 and 11 are the pores on the bottom of storage box 3, 13 are solution storage boxes,
is the top bottom, 12 and 16 are the bottom bottoms, and 15 is the lid of the storage box.
Claims (1)
を具えるスライダとからなるボートを備え、前記溶液収
納窓の底部に少なくとも二枚の複数個の孔を有する底板
がそれぞれ隔離して配設され、且つ前記底板それぞれに
設けられた孔の位置がズして配設されていることを特徴
とする液相エピタキシャル成長装置。A boat comprising a substrate holding plate and a slider having a solution storage window that slides on the substrate holding plate, and at least two bottom plates each having a plurality of holes are separated from each other at the bottom of the solution storage window. A liquid phase epitaxial growth apparatus characterized in that the holes provided in each of the bottom plates are arranged at different positions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15159783U JPS6059528U (en) | 1983-09-30 | 1983-09-30 | Liquid phase epitaxial growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15159783U JPS6059528U (en) | 1983-09-30 | 1983-09-30 | Liquid phase epitaxial growth equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6059528U true JPS6059528U (en) | 1985-04-25 |
Family
ID=30335893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15159783U Pending JPS6059528U (en) | 1983-09-30 | 1983-09-30 | Liquid phase epitaxial growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6059528U (en) |
-
1983
- 1983-09-30 JP JP15159783U patent/JPS6059528U/en active Pending
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