JPS59124318A - 走査方式 - Google Patents

走査方式

Info

Publication number
JPS59124318A
JPS59124318A JP57233805A JP23380582A JPS59124318A JP S59124318 A JPS59124318 A JP S59124318A JP 57233805 A JP57233805 A JP 57233805A JP 23380582 A JP23380582 A JP 23380582A JP S59124318 A JPS59124318 A JP S59124318A
Authority
JP
Japan
Prior art keywords
scanning mirror
scanning
angle
data
rotary encoder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57233805A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0228124B2 (OSRAM
Inventor
Yuichi Hagiwara
雄一 萩原
Tsunehiko Yoshimura
吉村　恒彦
Akito Osada
明人 長田
Hiroyuki Washino
鷲野　弘幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57233805A priority Critical patent/JPS59124318A/ja
Publication of JPS59124318A publication Critical patent/JPS59124318A/ja
Publication of JPH0228124B2 publication Critical patent/JPH0228124B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Radiation Pyrometers (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP57233805A 1982-12-30 1982-12-30 走査方式 Granted JPS59124318A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57233805A JPS59124318A (ja) 1982-12-30 1982-12-30 走査方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57233805A JPS59124318A (ja) 1982-12-30 1982-12-30 走査方式

Publications (2)

Publication Number Publication Date
JPS59124318A true JPS59124318A (ja) 1984-07-18
JPH0228124B2 JPH0228124B2 (OSRAM) 1990-06-21

Family

ID=16960856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57233805A Granted JPS59124318A (ja) 1982-12-30 1982-12-30 走査方式

Country Status (1)

Country Link
JP (1) JPS59124318A (OSRAM)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61203329U (OSRAM) * 1985-06-10 1986-12-20
JPS62263425A (ja) * 1986-05-10 1987-11-16 Jeol Ltd サ−モグラフイ装置
JPH0222617A (ja) * 1988-04-25 1990-01-25 Electro Scient Ind Inc 光ビーム位置誤差補正方法と装置
JPH0483221A (ja) * 1990-07-26 1992-03-17 Agency Of Ind Science & Technol 高精度ガルバノミラー駆動系

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02309709A (ja) * 1989-05-24 1990-12-25 Matsushita Electric Ind Co Ltd フィルタ装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50130988A (OSRAM) * 1974-04-05 1975-10-16
JPS5327445A (en) * 1976-08-27 1978-03-14 Hitachi Ltd Vibration tes ter

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50130988A (OSRAM) * 1974-04-05 1975-10-16
JPS5327445A (en) * 1976-08-27 1978-03-14 Hitachi Ltd Vibration tes ter

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61203329U (OSRAM) * 1985-06-10 1986-12-20
JPS62263425A (ja) * 1986-05-10 1987-11-16 Jeol Ltd サ−モグラフイ装置
JPH0222617A (ja) * 1988-04-25 1990-01-25 Electro Scient Ind Inc 光ビーム位置誤差補正方法と装置
JPH0483221A (ja) * 1990-07-26 1992-03-17 Agency Of Ind Science & Technol 高精度ガルバノミラー駆動系

Also Published As

Publication number Publication date
JPH0228124B2 (OSRAM) 1990-06-21

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