JPS59123286A - Carbon acid gas laser device - Google Patents

Abstract

PURPOSE:To improve the output stability at the time of starting the operation and thus avoid the generation of output variation even after passing a long time by controlling the exhaust amount of a laser gas exhaust device which exhausts the mixed gas in a laser oscillating device, and providing a controlling device which continuously changes the inner pressure of the laser oscillating device. CONSTITUTION:Helium gas, nitrogen gas, and carbon gas are taken in a laser gas supplying device 4, and the ratio of mixture is kept constant. The mixed gas is introduced to the laser oscillating device 6 via a valve 5, thus increasing the pressure to a constant pressure. The laser is oscillated by generating glow discharge by the electric power from a power source 9 in the device 6, resulting in starting the operation. On the other hand, the mixed gas in the device 6 is exhaust-treated by means of the laser gas exhaust device 8 through an electromagnetic valve 7. The electromagnetic valve 7 is controlled by the controlling device 10, and constantly controls the gas pressure 3 in the device. Further, mixed gas is continuously introduced to the device at a constant ratio of mixture also after that point, and the gas pressure in the device 6 is kept constant in accordance with the action of the electromagnetic valve 7.

Description

[Detailed Description of the Invention] [Technical Field of the Invention 1] The present invention provides a carbon dioxide gas relay positioning system that stabilizes the output and stabilizes the output.
Related.

[Technical forerunner of the invention] Generally, in a carbonic acid sleigh system, as shown in FIG.
1 filled helium gas cylinder, 2 nitrogen gas cylinders
:Weight: 30 kg+ Each dreg is transferred from the filled carbon dioxide gas cylinder 3 to the laser gas supply device 4 as the laser oscillation gas.
In response to this, the mixing ratio of each gas is appropriately set using the laser gas supply device 4, and then introduced into the rake oscillation device 6 through the valve 5.

The mixed dregs thus confined in the C laser oscillation device 6 is sent to the laser gas exhaust device 8 through the electromagnetic valve 7 and is exhausted.

Further, power is supplied from the laser power supply 9 to the laser oscillation device O, and this power generates a claw discharge in the laser oscillation device 6, which forms an optical resonator and generates Rayleigh light.

To briefly explain the operation of the oscillator 11 described above, first, the mixed gas supplied from the respective gas cylinders 1.2.3 of helium gas, nitrogen gas, and carbon dioxide is supplied to the laser gas supply device 4. The mole ratio of 1-(e:N2:CO2 is 32
:15:3 ratio up to 35 torr. After filling the mixed gas into the laser oscillation device 6 is completed,
The electromagnetic valve 7 operates, and the mixed scum is exhausted and discharged from the laser oscillation device 6 by the laser gas IJI device 8.

If only exhaust is performed at this time, the pressure inside the laser oscillation device 6 will drop, so the mixed gas is supplied by the laser gas supply device 4 to 1-1e: 3.2λ/min, N2: 1.5β/min,
CO2: Introduced for a total of 5°C and 7' minutes at a ratio of 0°3j2/min and covered. At this time, the pressure inside the laser oscillation device 6 is kept constant at 35 torr+' by opening and opening the electromagnetic valve 7 on the exhaust side.

[Problems with front illumination technology] In general, carbon dioxide laser devices operate as described above, but such operations exhibit unstable output characteristics as shown in FIG. In the case of the graph above, the time characteristics of the laser output are shown when d3 is at the discharge input and current feedback is performed, and the discharge input is kept constant at a rated output of 2.5 kW, but there is a sudden change in the output at the start of laser oscillation. An output fluctuation of approximately 20% of the rated output occurred in the first 10 minutes, and a slow output change was observed as time passed after the oscillation started, and approximately 10% after approximately 4 hours.
There has been a decline in output.

As mentioned above, conventional carbon dioxide laser devices have the disadvantage that output fluctuations are large at the start of operation, and that subsequent changes in output over time are also large.

[Object of the Invention] The present invention I (a carbonic acid laser that has been made in response to the above conventional circumstances, has good output stability at the start of operation, and does not cause output changes even after a long period of time) The aim is to provide equipment.

[Summary of the Invention] In other words, the present invention provides a laser oscillation device that generates LED light by performing glow discharge in a mixture of at least three types of gases: helium gas, nitrogen gas, and carbon dioxide gas, and a laser gas supply device that supplies a mixed gas to the laser oscillation device while changing the mixing ratio of the laser oscillation device; and a laser gas exhaust device that exhausts the mixed residue at the time of starting the laser oscillation.
A carbon dioxide laser oscillation device comprising: a control device that controls the exhaust amount of the exhaust device and continuously changes the internal pressure of the laser oscillation device; and a power source that supplies power to the laser oscillation device. .

[Embodiments of the Invention] The details of the present invention are shown in the drawings below and will be explained in reference to J-Embodiments (7λ).

First, the present invention will be explained in detail.

First, basic experimental data regarding carbon dioxide laser equipment will be explained.

Figure 3 shows helium gas, nitrogen gas and carbon dioxide 32
At a mixing ratio of : 15 and : 3, 35 tor
It is sealed in a laser oscillation device up to a pressure of r and circulated at high speed.
The elapsed time from the start of operation of the carbon dioxide gas relay system and the pressure of the sealed gas when approximately 30 kW of electricity is generated in the system, and the heat generated by the discharge is cooled by a heat exchanger. The changes are shown below.According to this, the gas pressure changes rapidly several minutes after the start of discharge, and then gradually changes over several hours.

Figure 4 shows helium gas, nitrogen gas and carbon dioxide gas.
At a mixing ratio of 2:15:3, 35
torr and further sealed at 1-18:3.2℃ per minute.
,N,! : 1.5β, CO2: 0.3℃ and the same amount of exhaust gas,
This is a graph showing the elapsed time after the start of operation when the molar partial pressure of carbon dioxide sludge was fixed at 1llllll when a glow hk electric power input of about 30kW was applied in the same way as described above while maintaining the torr. In this case as well, the molar partial pressure of JS carbonate is
It changes rapidly in the first few minutes, and gradually changes in the next few hours.

FIG. 5 is a graph of the scum pressure angle versus elapsed time, which shows the relationship shown in FIG. 4 by converting it into the number of moles of carbon dioxide per unit body.

Based on the data shown in FIGS. 3 to 5 above, the following can be understood.

First, the rapid change in initial pressure in Figure 3 is due to the temperature change of the lone gas, for example △]--6
If there is a change to 0°, the pressure P is generally expressed as p −nl(-Y”, where 1) is the number of moles of gas, k is the gas constant, and y is the absolute temperature, so the absolute temperature To Pressure P at degree K
That is, P o = nko TO, and the pressure P' when the absolute temperature rises from To degrees K to Δ-■ degrees is P' = nk(To + Δ ding). Therefore, P'/P o -(T o A-△-r')/
T.

If To = 293°, then P' /Po - (293°i〈460'K〉/'2
')3°1<-1=1.20, which causes a pressure increase of about 20%.

The subsequent slow pressure horn TR is considered to be due to the decomposition of carbon dioxide gas due to the influence of discharge, and it can be inferred that the reaction COz#c O'+ (1/2) 02 is occurring.

Similarly, in Figures 4 and 5, the pressure is constant
Since rolling is performed, the number of moles of the enclosed dregs changes as the temperature changes, and the following relational expression holds true.

Po=nkT.

Pa = n' k (To + Δt) Therefore, n '7'n = -r o / (To + Δt) roar, To = 293°K, ΔT = 60' K and n' / n stop 0.83 roar , carbonate scum molecules cause a decrease in density of about 17%.

Figure 6 shows [Pull 1-1e: N2] during steady state operation.
．． :CO2 mixing ratio, total flow rate 5 at 32:15:3
2 is a graph showing the relationship between gas pressure and laser output in β/min. In this case, the laser output is approximately proportional to the gas pressure.

Figure 7 shows this relationship obtained for the mole of carbon dioxide molecules when the gas pressure is constant. found.

The present invention was made based on the above basic experimental results, and is based on the following theory.

The output of the carbon dioxide laser device is proportional to the moles of carbon dioxide molecules per unit volume, as shown in Figure 7. If you adjust the number of moles to be constant, the output of KM9 sword sleri!!ifa will be stabilized by 1g.

Generally, in a conventional carbon dioxide laser device, during its operation, the mixing ratio of Cl−, >l helium gas, nitrogen gas, and carbon dioxide gas was constant, and the set pressure was also constant. Therefore, the pressure P of the filler gas in the laser oscillation device is 45 (P) as a function of time (kl, 1 × 2, α
, β is a constant, and is expressed as follows.

P=Po (e + α) (e −”t+f
J)-h, t'' In the above equation, Po is the pressure at the start of laser oscillation, and the first term (e-k・ゝ+α) in the above equation is the carbon dioxide caused by the rise in smallpox caused by the initial heat input. This is a decrease in the number of moles of dregs molecules.

The second term (e-, t+β) is a decrease in the number of carbon dioxide molecules caused by the decomposition of carbon dioxide molecules. The first term shows a rapid change, and the second term shows a slow change.

(Here, we have a term that corresponds to the inverse function of each of the first and second terms, that is, 1/(e + α >
, 1/ (e ``a-'+ β ) If we add physical phenomena like P-Pa (e - '' + α) (e-'lt+(
3) X (1/ (e-kIt+cn)
/ (e-)LL%+β))-P.

As a result, the number of moles of carbon dioxide molecules per unit volume can be kept constant, and therefore the output of the laser can be kept constant.

Based on the above considerations, in the present invention, we first cancel the sudden change in the first term by using a term with 8JguJ Song,
This equipment was constructed so that the set pressure several minutes after the start of operation was higher than the set pressure at the start of operation.

In addition, the terms that have the J-effect that cancel out the slow change in the second term are the mixing ratio of helium gas, nitrogen gas, and carbon dioxide gas sealed at the start of operation, and the mixture ratio of helium gas, nitrogen gas, and carbon dioxide gas introduced after the start of operation. The mixing ratio of carbon dioxide gas was varied, and the apparatus was configured to increase the aggregation ratio (particularly of carbon dioxide gas) after the start of operation.

The structure of an embodiment of the present invention based on the above-mentioned original 111 is not shown in FIG. In addition, in FIG. 8, J5 has the same cylinder in the same part as the conventional carbon dioxide laser device shown in FIG. 1.

In the figure, reference numerals 81.2.3 indicate gas cylinders for helium gas, nitrogen gas, and carbon dioxide gas, respectively, and the gas in each of these gas cylinders 1.2.3 is taken out into the laser scum supply device 4 and turned into a mixed gas. be thrown away.

The laser gas supply device 4 that takes out this mixed gas has a means (not shown) that freely changes the mixing ratio of each gas over time, and the mixed gas mixed in this laser gas supply device @4 passes through a valve 5. The oscillator is then sealed into the 1-no-1 oscillator @6.

The laser oscillation device 6 generates claw discharge while introducing and exhausting the mixed gas, thereby avoiding generation of laser light. The mixed gas in the laser emitting device 4 and device 6 is exhausted by a laser gas exhaust device 8 via a solenoid valve 7.

The solenoid valve 7 connected to the laser oscillation device 6 is
Its operation is controlled by the Iζ control device 10, and the pressure of the mixed gas in the laser oscillation device 6 is adjusted.

Note that the reference numeral 9 indicates a power source d5 that supplies power to the laser oscillation wave El 6, and the power supplied from this power source causes glow discharge to occur in the laser oscillation device 6.

Next, the operation of the above-described embodiment will be explained by showing actual numerical examples.

The rated output of the carbon dioxide laser device of this example is 2.
5. Suppose that l\W.

Therefore, at 9th f 1v during the operation of this carbon dioxide gas relay device, helium gas, nitrogen gas and carbon dioxide gas are received into the laser scum supply device 4 from the l\ium gas cylinder 1, nitrogen gas cylinder 2 and carbon dioxide gas cylinder 3, and this In the laser scum supply device 4 (the mixing ratio of helium gas, nitrogen 4 gas, and carbon dioxide gas is 32° 1:3).The mixed gas is passed through the valve 5 into the -C laser oscillation device 6. is introduced into the oscillator 6, and the pressure in this laser oscillator 6 is increased to 35
Increase the torr. Then, a re-glow discharge is generated in the laser oscillator G using the power from the power source 9 to cause the laser to oscillate, and the operation of the carbon dioxide laser device is started. Immediately after the start of operation, each gas in the laser scum supply device 4 is Varying the mixing ratio, 1-1e: 3.05R/min, N2
: The above amount of mixed gas with a mixing ratio of 1.50 to 7 minutes and CO2 to 0.45 β/' was continuously introduced into the laser oscillation device 6, and the gas pressure in the laser oscillation device 6 was increased for about 5 minutes. so that it reaches 39 torr.

On the other hand, the mixed gas in the laser oscillation device 6 is exhausted by the laser gas exhaust device 8 through the electromagnetic valve 7 . The opening and closing operations of the electromagnetic valve 7 are controlled by a control device 10, and the gas pressure in the laser oscillation device 6 is controlled to be constant at 3-g+o+.1. Furthermore, even after that point, the laser oscillation device 6 was continuously heated with 1-1e: 3.05°C/min, N2: 1
．． The mixed gas is continuously introduced at a mixing ratio of 5oJ2/min and CO2:0°45ρ7', and in combination with the operation of the electromagnetic valve 7, the gas pressure in the laser oscillation device 6 is kept constant.

In this way, inside the laser oscillation device 6, the gas pressure is 35 torr at the beginning of operation of the carbon dioxide laser device.
H2:N2 :C02=32:15:3
5 minutes after the start of operation, the gas pressure was 391 o + g, the mixing ratio was 32:15:3, and the operation continued for a long time while introducing gas (if the gas pressure was 39 tOrr, Mixing ratio 1-1e: N2: C0
2=30.5:15:4.5.

Experimental results and measurement data for the carbon dioxide laser device configured as described above are shown in FIGS. 9 and 10.

FIG. 9 shows the change in the relay output with respect to the operating time during operation of the above-mentioned carbon dioxide gas relay device. If you follow this,
The initial rapid change in output is almost canceled out, and there is almost no change after that, and the output remains stable.

FIG. 10 shows the time characteristics of the total gas pressure and the partial pressure of carbon dioxide in the laser oscillation device 6 of the carbon dioxide laser device of the present invention. It can be seen that the number of moles of carbon dioxide gas molecules per unit body has been made constant.

[Effects of the Invention] As mentioned above, according to the present invention, the scum pressure can be transferred to the controller 1 by the solenoid valve without using multiple means such as optical feedback or city cuff r-dopack. , flow rate h
A carbon dioxide laser device with extremely stable output can be created using a very simple method of setting the gas flow path in step 1, and its industrial value is extremely high.

[Brief explanation of drawings]

Fig. 1 is a system diagram of a conventional carbon dioxide laser device, Fig. 2 is a graph showing the time characteristics of laser output in a conventional carbon dioxide laser device, and Fig. 3 is a graph showing gas pressure over time in gas filling and sealing states. Graph showing the characteristics. Figure 4 is a graph showing the time characteristics of the total gas pressure and carbon dioxide partial pressure during gas introduction and exhaust operation states. Figure 5 is the carbon dioxide partial pressure shown in Figure 4. FIG. 6 is a graph showing the relationship between gas pressure and laser output, FIG. 7 is a graph showing the relationship between carbon dioxide moles and laser output, and FIG. 8 is a graph showing the relationship between carbon dioxide gas moles and laser output. A system diagram of the carbon dioxide laser device of the embodiment, Fig. 9 is a graph showing the time characteristics of the laser output of the embodiment of Fig. 8, and Fig. 10 shows the total gas pressure and carbon dioxide partial pressure of the embodiment of Fig. 8. There is a graph that does not show the change over time. 1... Helium gas cylinder 2...
・・・・・・・・・Nitrogen gas cylinder 3・・・・・・・・・
・・・・・・Carbon dioxide cylinder 4・・・・・・・・・・・・
Laser gas supply device 5...Valve 6...Laser oscillation device 7...
...... Solenoid valve 8 ...... Laser scum exhaust device 9 ...
・・・・・・・・・Power supply 10・・・・・・・・・Patent attorney representing control device
Suyama Sa - 45 Figure

Claims (1)

[Claims] (1) A glow discharge is performed in a mixed gas of at least three types of helium gas, nitrogen scum, and carbon dioxide gas. A laser gas supply device for supplying to the oscillation device, a laser gas exhaust device for exhausting the mixed gas in the laser oscillation device, and an exhaust M of this exhaust device are controlled to continuously maintain the internal pressure of the laser oscillation device. 11. A carbon dioxide gas ray oscillation device comprising: a control device for controlling a change in V; and a power source for supplying power to the laser oscillation device.